In this thesis, we demonstrate in-situ scanning electron microscopy techniques for both electron beam lithography (EBL) and in-situ one dimensional nano materials electrical characterization. A precise voltage contrast image positioning for in-situ EBL to integrate nanowires into suspended structures for nanoswitch fabrication has been developed. The in-situ EBL eliminates the stage movement error and field stitching error by preventing any movements of the stage during the nanolithography process; hence, a high precision laser stage and alignment marks on the substrate are not needed, which simplifies the traditional EBL process. The ZnO piezoelectronics is also studied using nano-manipulators in scanning electron microscope. Methods to improve the contact have been demonstrated and the contacts between probe tips and the nanowires are found to have significant impact on the measurement results.

This graduation thesis deals with the problem of voltage contrast in ESEM. The purpose of this work was to verify influence of used detectors in the dependence on conditions in specimen chamber on the size of voltage contrast. With the conditions in specimen chamber we understand pressure and working conditions of signal detection. We used power transistor as specimen.

Innovative multifunctional materials are essential to many new sensor applications. Piezoresistive nano-composites make up a promising class of such materials that have the potential to provide a measurable response to strain over a much wider range than typical strain gages. Commercial strain gages are currently dominated by metallic sensors with a useable range of a few percent strain at most. There are, however, many applications that would benefit from a reliable wide-range sensor. These might include the study of explosive behavior, instrumentation of flexible components, motion detection for compliant mechanisms and hinges, human-technology interfaces, and a wide variety of bio-mechanical applications where structural materials may often be approximated as elastomeric. In order to quantify large strains, researchers often use optical methods which are tedious and difficult. This thesis proposes a new material and technique for quantifying large strain (up to 40%) by use of piezoresistive nano-composite strain gages. The nano-composite strain gage material is manufactured by suspending nickel nano-strands within a biocompatible silicone matrix. Study and design iteration on the strain gage material requires an improved understanding of the electrical behavior and conduction path within the material when strained. A percolation model has been suggested for numerical approximations, but has only provided marginal results for lack of data. Critical missing information in the percolation model is the nano-strand cluster size, and how that size changes in response to strain. These data are gathered using a dynamic technique in the scanning electron microscope called voltage contrast. Cluster sizes were found to vary in size by approximately 6% upon being strained to 10%. A feasibility study is also conducted on the nano-composite to show its usability as a strain gage. High Displacement Strain Gages (HDSGs) were manufactured from the nano-composite. HDSGs measured the strain of bovine ligament under prescribed loading conditions. Results demonstrate that HDSGs are an accurate means for measuring ligament strains across a broad spectrum of applied deformations.

This thesis deals with scanning electron microscope working at higher pressure in the specimen chamber. The main goal was to study the voltage contrast on the PN junction of the transistor under suitable working conditions for using environmental scanning microscope. The observation of sample was enabled by a scintillation detector designed for observation of high pressure.

Thesis deals with environmental scanning electron microscopy and with detection of signal electrons by using ionization detector. First part talks about the principle of environmental scanning electron microscope. Second part describes signals generated by interaction of primary electron beam with sample. Third section explains the principle of impact ionization and ionization detector. Experimental part deals with usage of segmental ionization detector and with measuring of signal amplification from copper and platinum. Thesis also examines arrangement of electrodes of ionisation detector on material contrast and examines also on influence of voltage contrast on base - emitter junction of an NPN bipolar transistor. All experiments were carried out in dependency on saturated water vapour pressure in sample chamber.

Thesis deals with environmental scanning electron microscopy and with detection of signal electrons by using ionization detector. First part talks about the principle of environmental scanning electron microscope. Second part describes signals generated by interaction of primary electron beam with sample. Third section explains the principle of impact ionization and ionization detector. Experimental part deals with usage of segmental ionization detector and with measuring of signal amplification from copper and platinum. Thesis also examines arrangement of electrodes of ionisation detector on material contrast and examines also on influence of voltage contrast on base - emitter junction of an NPN bipolar transistor. All experiments were carried out in dependency on saturated water vapour pressure in sample chamber.

Thesis deals with theoretical knowledge about scanning electron microscopy and environmental scanning electron microscopy. It describes principle of operation, signals generated by interaction between primary electron beam and specimen and means of detection of secondary electron signal in environmental conditions using scintillation detector. Furthermore, thesis focuses on optimization of detection od secondary electrons by adjusting electrode system of scintillation detector. Computer program Simion is used for modelling signal electron trajectories for proper adjustments. Simulation were starting-point for adjusting the design of the detector. Detection efficiency of adjusted detector was determined by evaluating signal magnitude from captured images, secondary electron detection capability from voltage contrast and quality of the captured images from signal/noise ratio.