The LDD model was first applied to Arsenic concentration profiles determined in surface diffusion experiments by Yoshida and
Arai [1]. The new method presented is based on a mathematical convolution with a delta-function-like concentration profile. By comparing the LDD approximation of post-surface diffusion with post-implant diffusion experiments, the same LDD model parameter r is found to hold for both experimental arrangements. This work found that post-implant diffusivity is concentration dependant and this might indicate an anomalous diffusion mechanism for Arsenic.
| Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:13836 |
| Date | January 2011 |
| Creators | Wirbeleit, Frank |
| Contributors | GLOBAL FOUNDRIES, Universität Leipzig |
| Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
| Language | English |
| Detected Language | English |
| Type | doc-type:article, info:eu-repo/semantics/article, doc-type:Text |
| Source | Diffusion fundamentals 15 (2011) 3, S. 1-10 |
| Rights | info:eu-repo/semantics/openAccess |
| Relation | urn:nbn:de:bsz:15-qucosa-178925, qucosa:13500 |
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