The rapid development of microelectronics has equally rapidly increased the demand for miniaturized energy storage devices. On-chip micro-supercapacitors (MSCs), as promising power candidates, possess great potential to complement or replace electrolytic capacitors (ECs) and microbatteries (MBs) in various applications. Recently, planar two-dimensional (2D) MSCs, composed of isolated thin-film microelectrodes with extremely short ionic diffusion path and free of separator on a single substrate, have become particularly attractive because they can be directly integrated with microelectronic devices on the same side of a flexible substrate to act as a standalone microsized power source. However, the areal capacities and energy densities of the 2D MSCs are commonly limited by the low voltage window and the thin layer of the electrode materials. Obviously, integrating more active material into cleverly designed three-dimensional (3D) electrode architectures will effectively increase the areal performance within a limited footprint area in spite of some loss of flexibility and cycling stability. However, it is still a big challenge to effciently and cost-effectively fabricate on-chip MSCs with high electro-chemical performance and abundant electrode structures. Here, three types of MSCs including graphene-based 2D planar MSCs, on-chip 3D interdigital MSCs and self-assembled 3D tubular MSCs were fabricated, respectively. The fabrication process, electrode materials structure and morphology, electrochemical performance, mechanical properties, integration process and difficulty, and practical application of these 2D and 3D devices are studied in detail.
| Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:75135 |
| Date | 14 June 2021 |
| Creators | Li, Fei |
| Contributors | Schmidt, Oliver G., Zhu, Feng, Technische Universität Chemnitz |
| Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
| Language | English |
| Detected Language | English |
| Type | info:eu-repo/semantics/publishedVersion, doc-type:doctoralThesis, info:eu-repo/semantics/doctoralThesis, doc-type:Text |
| Rights | info:eu-repo/semantics/openAccess |
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