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Strategies for realization of integrated microelectromechanical systems : on-board power, silicon circuitry, multichip modules

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1. http://hdl.handle.net/1853/14997
2. 449539

Identifer	oai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/14997
Date	08 1900
Creators	Lee, Jeong-Bong
Publisher	Georgia Institute of Technology
Source Sets	Georgia Tech Electronic Thesis and Dissertation Archive
Detected Language	English
Type	Dissertation
Rights	Access restricted to authorized Georgia Tech users only.