Coordinated or synchronized tasks can always
be found in various manufacturing processes,
e.g., machining along spatial trajectories,
coordinated operations of multi-manipulators, and
vacuum pumps, etc. The vacuum pump is a typical
device with synchronized motion among those
examples. The vacuum pump has played an important
role in current semiconductor manufacturing
processes. Its pumping feature is achieved by
synchronized motion of two mating pump rotors. A
common approach to accomplish the synchronized
motion is by idle gears. Nevertheless, this
design cannot meet serious requirements of vacuum
systems demanded by growing manufacturing
techniques.
In order to provide a complete and proper
control strategy for synchronized motion, and to
overthrow traditional architecture of vacuum
pumps by raising a better control scheme for new
generation oil-less products, the paper focuses
on synchronized motion control for dual motors.
The first objective of here is to develop a
control method for synchronized motion of two
separated motors. Both system uncertainties and
unknown disturbances occurring in actual
implementation need to be carefully considered.
An experimental setup will also be established
for examinations and verifications. And then
synchronized motion control of dual motors
including two mating screw rotors then will be
investigated. During this period, the emphasis
will be on solution finding for unexpected
contact collision between two rotors. An
effective and efficient control strategy will be
developed for synchronized motion control of dual
motors. Longer operation time and better
synchronization performance for two motors can
therefore be anticipated.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0704101-001352 |
| Date | 04 July 2001 |
| Creators | Hsueh, Po-Wen |
| Contributors | Yuan-Liang Hsu, Ing-Rong Horng, Chi-Cheng Cheng |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0704101-001352 |
| Rights | off_campus_withheld, Copyright information available at source archive |
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