The passive devices (such as resistor, capacitor, and inductor) in recent wireless communication system tend to occupy large area due to their inability to be integrated with IC in one chip.
This paper presents an IC compatible tunable capacitor by using MEMS technology. This tunable capacitor is consist of one suspended top plate and two fixed bottom plates (signal electrode and bias electrode). By driving electrostatic force, the gap between top and bottom electrodes will be changed and result in capacitance variation. To increase the tuning range, the tunable capacitor with two different gap space will be involved in our design. Based on theory, 200% tuning range will be achieved. One the other hand, this paper present the processing of three different sacrificial layers : (1) photoresists (2) photoresist and metal (3) metals sacrificial layers.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0719105-095950 |
| Date | 19 July 2005 |
| Creators | Huang, Chih-Sheng |
| Contributors | I-yu Huang, none, none, none |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0719105-095950 |
| Rights | not_available, Copyright information available at source archive |
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