In this study, AlN films are deposited using reactive RF magnetron sputter on various bottom metals, such as Mo, Al and Pt. The orientation of piezoelectric AlN thin films on different bottom electrode materials are investigated. Moreover, the acoustic Bragg reflectors deposited by DC magnetron sputter are composed of alternating layers of high and low acoustic impedance materials. To improve the performance of the reflectors, rapid thermal anneal and deposition process control over roughness of the thin film are also investigated.
The resonance characteristics are improved obviously by deposition process control over thin films. The roughness control is the key factor of good frequency responses of SMR. In addition, the more layer of the reflectors the better the frequency response we obtained.
The frequency responses of SMR are slightly improved by rapid thermal annealing procsess. Although defects in the thin films would be eliminated, nevertheless the thin film roughness became worse after annealing. This phenomenon would limit the improvement of frequency responses.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0721105-220926 |
| Date | 21 July 2005 |
| Creators | Wei, Ching-Liang |
| Contributors | none, Yeong-Her Wang, none, Ying-Chung Chen, Mau-Phon Houng |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0721105-220926 |
| Rights | unrestricted, Copyright information available at source archive |
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