This experiment was growing CZTSe (Cu2ZnSnSe4) single phase thin film by using rapid thermal selenization process on Se/Cu/Sn/Zn/SLG thin film. It can complete the reaction to avoid Cu2SnSe3 appearing during the RTP. To discuss the effect of nitrogen and selenium flow rates on the thin film quality and adhesion, and to confirm the composition of the CZTSe single phase thin film. And I also annealed and changed the Se/Cu/Zn/Sn/SLG stacked layer to improve the thin film uniformity. Finally, it was stacked on the Mo/SLG and annealed by varying raising rate of temperature in order to enhance the adhesion. The results indicated that the various flow of nitrogen could cause different conditions. The element selenium easily escaped due to lower nitrogen flow could not provide enough outer pressure; larger nitrogen flow carried the extra high vapor pressure gas go through the surface of substrate and lead to the worse adhesion with the substrate. Unfortunately, using the analysis of X-ray diffraction and Raman spectrum couldn¡¦t determine the single phase of CZTSe. However, it has been confirmed by optical bandgap. In this experiment, the compositions of CZTSe single phase are found to be Cu-poor and Zn-poor, the optical bandgap (Eg) is 0.88~1.04 eV, and the resistivity (£l) is 1~10-2 £[-cm. By the rapid thermal selenization process, because of the rapid gradient of temperature, it brought out the diffused non-uniformly among the precursors. Therefore, the uniformity of thin films would not be perfect. As the result, re-annealing and change are the efficient methods to improve the uniformity of the thin film. The problems are un-wetting effect exists in the stacked liquid phase Se/Cu/Zn/Sn and the sodium glass substrates. The morphologies of the thin films are island connection. Finally, increasing the temperature in 15 oC per second and annealing the thin film for one minute at 250 oC with the stacked layer of Se/Cu/Sn/Zn/Mo/SLG are successful to promote the adhesion between the CZTSe and Mo.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0827112-155243 |
| Date | 27 August 2012 |
| Creators | Kao, Chien-Hui |
| Contributors | Tsung-ming Tsai, Wen-shi Lee, Bae-heng Tseng |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0827112-155243 |
| Rights | user_define, Copyright information available at source archive |
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