The solidly mounted resonator (SMR) is constructed of a Bragg reflector and a piezoelectric layer AlN. In order to obtain an appropriate SMR for the high frequency communication applications and high sensitivity bio-sensor applications, the Bragg reflector, the AlN, and the loading effect have been investigated thoroughly.
The thesis presents the influences of surface roughness of the Bragg reflector and materials¡¦ selection on the resonance characteristics of an SMR. Three combinations of thin films, AlN/Al, Mo/Ti, and Mo/SiO2, are adopted. Originally, an AlN/Al multi-layer is used as the Bragg reflector. The poor surface roughness of this Bragg reflector results in a poor SMR frequency response. To improve the surface roughness of Bragg reflectors, a Mo/Ti multi-layer with a similar coefficient of thermal expansion is adopted. By controlling deposition parameters, the surface roughness of the Bragg reflector is improved. Finally, a material combination of Mo/SiO2 with high acoustic impedance ratio of 4.7 is adopted. Better resonance characteristics of SMR are obtained. The experimental results show a distinct resonance phenomenon around 2.5 GHz and excellent noise restraint.
Afterwards, a ¼£f mode SMR is experimentally realized. The selection of high and low acoustic impedance for the first layer beneath piezoelectric layer results in the ¼£f mode and ½ £f mode resonance configurations, respectively. The coupling coefficient Keff2 of 6.9% is obtained, which is in agreement with the theoretical analysis.
Following, the theoretical analysis upon the dual mode frequency-shift was characterized, and a modified formula was carried out. The c-axis tilted angle of AlN was altered as well as the various mass loading on the SMR. Based on the experimental results, the dual resonance frequencies showed a nonlinear decreasing trend with a linear increase of the mass loading. Furthermore, the ratio of the longitudinal resonant frequency to the shear resonant frequency remained at a range around 1.76 despite the various c-axis tilted angles of AlN and gradual mass loading on the SMR. The electromechanical coupling coefficient, keff2, of the shear resonance rose with the increase of the c-axis tilted angle of AlN. However, the longitudinal resonance fades away with the AlN c-axis tilted angle, and the quality factor of the longitudinal resonance decreases.
Finally, the dual mode resonances are improved by tilting the off-center substrates toward the sputtering source and successfully enhance the longitudinal resonance while preserve the shear resonance at the same time. Not only the shear resonance for the liquid-based sensing application, but also an outstanding longitudinal resonance could be obtained. The practicability of the dual-mode resonator is extended for the applications of high frequency wireless communication and high sensitivity bio-chemical sensors.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-1225108-124645 |
| Date | 25 December 2008 |
| Creators | Chung, Chung-jen |
| Contributors | Jow-Lay Huang, Shoou-Jinn Chang, Sheng-Yuan Chu, Chien-Chuan Cheng, Wei-Hsing Tuan, Mau-Phon Houng, Cheng-Liang Huang, Ying-Chung Chen, Yeong-Her Wang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | English |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-1225108-124645 |
| Rights | not_available, Copyright information available at source archive |
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