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Through-wafer interrogation of MEMS device motion

Thesis (M.S.)--West Virginia University, 1999. / Title from document title page. Document formatted into pages; contains xii, 122 p. : ill. (some col.) Includes abstract. Includes bibliographical references (p. 119-122).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/42448555
Date January 1999
CreatorsDawson, Jeremy M.
PublisherMorgantown, W. Va. : [West Virginia University Libraries],
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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