Development of a large displacement flexure based nano-precision XY positioning stage for vacuum environments

Description

Thesis (Ph. D.)--University of Texas at Austin, 2003. / Supervisor: S. V. Sreenivasan. Vita. Includes bibliographical references. Available also from UMI Company.

Links & Downloads

1. http://wwwlib.umi.com/cr/utexas/fullcit?p3117892
2. http://repositories.lib.utexas.edu/bitstream/handle/2152/506/choiy039.pdf

Tags

Mechanical movements Semiconductors.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/55991132
Date	January 2003
Creators	Choi, Yeong-jun, Sreenivasan, S. V.,
Source Sets	OCLC
Language	English
Detected Language	English