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MEMS for heterogeneous integration of microsystems /

Thesis (Ph.D.) -- University of Texas at Dallas, 2005 / Includes vita. Includes bibliographical references (leaves 139-145)

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/62457782
Date January 2005
CreatorsNallani, Arun Kumar,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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