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Control systems for capacitive micromachined inertial sensors with high-order sigma-delta modulators

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:427467
Date January 2006
CreatorsDong, Yufeng
PublisherUniversity of Southampton
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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