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An electron cyclotron resonance (ECR) plasma source which couples microwave to the plasma using an internal antenna was developed. The use of internal antenna provides a "windowless" power coupling method that can eliminate the issues of contamination which require frequent source maintenance. Antenna structure, magnetic configuration and plasma parameters were modified for carbon film deposition by chemical sputtering. The ECR source generated low-plasma-potential (10 V), high-plasma-density (10^16 m^-3) discharges at low gas pressures (10^-1 Pa) and low input power (100 W). The antenna realized stable operation for more than 5 h and can be utilized for carbon film deposition. / 博士(工学) / Doctor of Philosophy in Engineering / 同志社大学 / Doshisha University

京都大学 / 0048 / 新制・課程博士 / 博士(理学) / 甲第20210号 / 理博第4295号 / 新制||理||1617(附属図書館) / 京都大学大学院理学研究科生物科学専攻 / (主査)教授 鹿内 利治, 教授 長谷 あきら, 准教授 小山 時隆 / 学位規則第4条第1項該当 / Doctor of Science / Kyoto University / DGAM

本論文では，遮断周波数以下のTE・TMモードを利用した右手/左手系複合円筒導波管および方形導波管を提案する．この提案したCRLH導波管にスリットまたはスロットを設けることで構成された導波管型漏洩波アンテナの放射特性について述べている．最後に，CRLH導波管を試作し解析結果と実験結果の比較を行うことで，CRLH方形・円筒導波管の構成法の有用性を明らかにする． / This paper proposes a composite right/left-handed cylindrical and rectangular waveguides using the cutoff TE and TM modes. The CRLH waveguides can be successfully applied to radiation characteristics of leaky-wave antenna by setting slits or slots. Finally, usefulness of the proposed CRLH waveguides is verified by comparison between the calculated and the measured values. / 博士(工学) / Doctor of Philosophy in Engineering / 同志社大学 / Doshisha University