Chemical Mechanical Planarization (CMP) is one of the most critical processing steps that enables fabrication of multilevel interconnects. The success of CMP process is limited by the implementation of an optimized process and reduction of process generated defects along with post CMP surface characteristics such as dishing and erosion. This thesis investigates to identify various sources of defects and studies the effect of factors that can be used to optimize the process. The major contributions of this work are: Understanding the effect of temperature rise on surface tribology, electrochemistry and post CMP pattern effects during the CMP process; investigating the effect of pad conditioning temperature and slurry flow rate on tribology and post CMP characteristics; development of novel slurries using polymer hybrid particles and improvement in slurry metrology to reduce surface damage during CMP. From the current research, it was shown that the effect of temperature on CMP tribology is predominantly affected by the polishing parameters and the polishing pad characteristics more than the chemical nature of the slurry. The effect of temperature is minimal on the resulting surface roughness but the with-in die non-uniformity is significantly affected by the temperature at the interface. Secondly, in this research it was shown that the effectiveness and aggressiveness of the pad conditioning process is highly influenced by the conditioning temperature. This aspect can be utilized to optimize the parameters for the pad conditioning process. Further, post CMP characteristics such as dishing, erosion and metal loss on patterned samples were shown to decrease with increase in slurry flow rate. This research then concentrates on the development of novel low defect slurry using polymer hybrid abrasive particles. Several varieties of surface functionalized polymer particles were employed to make oxide CMP slurries. These novel slurries proved to be potential candidates to reduce surface damage during CMP as they resulted in low coefficient of friction and much less surface scratches as compared to conventional abrasives. Thus, this research helps to reduce defects and non-planarity issues during CMP process thereby improving yield and reducing the cost of ownership.

During the past several decades, the water jet cutting concept has developed from a novel concept into a well-accepted machine cutting tool. With the addition of abrasive particles and the improvement of high pressure pumps, the water jet stream is currently capable of cutting through metal, concrete, and composite materials. Water jet systems have been utilized at a wide range of different pressures. Research performed at Brigham Young University has revealed that low pressure water jets have the ability to cut human teeth. Experiments have shown that when abrasive particles are added to the water jet stream, an greater amount of tooth material can be removed at lower input pressures. Many different methods have been proposed to entrain and suspend particles in a high pressure water jet system. The abrasive particles can be entrained before the water is pressurized, while the water is being pressurized, or after the water jets stream exits the pressurized system. Each method has its advantages and disadvantages. Unfortunately, keeping abrasive particles homogeneously entrained and suspended in a water jet stream has proven to be difficult. Research at Brigham Young University has encountered similar problems. Researchers are attemping to place abrasive particles in a low pressure water jet stream, but have not been able to maintain a suspended homogeneous slurry. It is the objective of this research to investigate and suggest several possible methods to entrain and suspend abrasive particles into a low pressure water jet system intended for a dental cutting application. A broad review of methods to entrain abrasives in high pressure water jet systems was performed. A list of methods and concepts as possible solutions to entrain abrasives in a low pressure system has been generated. Product design principles were applied to screen, score, and rank these generated concepts to narrow down the list to the most viable concepts for BYU's low pressure dental water jet. Several tests and experiments were also performed to validate the suggested concepts and to provide useful information for future research. It is anticpated that one or more of these methods will be applicable for the proposed dental application as well as other similar applications.

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CAPES - Coordenação de Aperfeiçoamento de Pessoal de Nível Superior / CNPq - Conselho Nacional de Desenvolvimento Científico e Tecnológico / O trabalho tem como objetivo contribuir ao entendimento do efeito das caraterísticas superficiais no desgaste abrasivo com e sem efeito corrosivo. Utilizou-se o equipamento de micro-abrasão-corrosão desenvolvido no Laboratório de Tribologia e Materiais (LTM). Foi utilizado nos testes: amostras de aço inoxidável austenítico AISI 304, partículas abrasivas de sílica e velocidade de rotação de 150 rpm. Para a parte corrosiva foi usada solução eletrolítica com 1N de H2SO4. Para a influência da topografia de superfície do corpo de prova o aço AISI 304 foi preparado em lixas de carbeto de silício de granulometria #80 e #4000, e com disposições de lixamento perpendicular e paralelo com respeito ao sentido de rotação da esfera. Esferas de zircônia (Ø 25,4 mm) foram usadas como contra-corpos. Para avaliar a influência da natureza e evolução topográfica da superfície do contra-corpo usaram-se cinco contra-corpos esféricos (Ø 25,4 mm): um cerâmico (nitreto de silício, Si3N4), um metálico (aço AISI 52100) e três polímeros termoplásticos (polipropileno, PP, poliacetal, POM, e poliamida 6,6, PA 6,6); para os testes de micro-abrasão-corrosão foram usados um cerâmico (Si3N4) e um polímero termoplástico (PP). Foi acompanhada a evolução topográfica ao longo dos testes nos contra-corpos por meio de interferometria e perfilometría. O deslizamento das partículas abrasivas foi predominante nas calotas geradas em todos os testes realizados. A topografia de superfície do corpo e contra-corpo mostrou ter relação com a taxa de desgaste na micro-abrasão e micro-abrasão-corrosão. Topografia de superfície com parâmetros de rugosidade maiores apresentam maiores taxas de desgaste, tendo maior sensibilidade na micro-abrasão-corrosão. Atribuiu-se que, com maiores valores dos parâmetros de rugosidade, consegue-se maior efetividade no arraste e participação de partículas abrasivas no contato. / The aim of this work is to contribute to the understanding of the effect of surface characteristics on abrasive wear with and without corrosive effect. The micro-abrasion-corrosion apparatus developed at the Tribology and Materials Laboratory (LTM) was used. The following tests were used: AISI 304 austenitic stainless steel test specimens (body), silica abrasive particles and rotational speed of 150 rpm. For the corrosive analysis, an 1N H2SO4 electrolytic solution was used. For the influence of the surface topography of the specimen, the AISI 304 steel was grinded using silicon carbide (SiC) (#80 and # 4000), and tested with perpendicular and parallel arrangements with respect to the direction of rotation of the sphere. Zirconia balls (Ø 25.4 mm) were used as counter bodies. In order to analyze the influence of the nature and topographic evolution of the counter-body surface, five spherical counter bodies (Ø 25.4 mm) were used in the micro-abrasion tests: one ceramic (silicon nitride, Si3N4), one metal (AISI steel 52100) and three thermoplastic polymers (polypropylene, PP, polyacetal, POM and polyamide 6.6, PA 6.6); For the micro-abrasion-corrosion tests one ceramic (silicon nitride) and one thermoplastic polymer (PP) were used. The topographic evolution of the counter bodies was monitored along the tests through interferometry and profilometry. The grooving of the abrasive particles was predominant in the wear scars generated in all tests performed. The surface topographies of the body and counter-body showed to have relation with the wear rate in the micro-abrasion and micro-abrasion-corrosion tests. Higher roughness parameters induced higher wear rates, and show greater sensitivity in micro-abrasion-corrosion. It was attributed that higher values of the roughness parameters achieved greater effectiveness in the drag and participation of abrasive particles in the contact. / Tese (Doutorado)