The object of this thesis research is to facilitate the appraisal and analysis of the signatures of the modern acoustic wave biosensors, as well as to improve the experimental methodology to enhance sensor performance. For this purpose, both theoretical characterization of acoustic wave sensor signatures and experimental studies for the most frequently used acoustic wave biosensors, the liquid phase QCM (quartz crystal microbalance) and the vapor phase SAW (surface acoustic wave) sensors, are presented. For the study of SAW vapor phase detection, the author fabricated different types of two-port SAW resonator sensors on quartz substrates and designed and performed a significant number of detection experiments. These were conducted both with calibrated or known target samples under laboratory conditions at Georgia Tech Hunt Lab and with samples of unknown concentrations such as seized crack cocaine (courtesy of Georgia Bureau of Investigation, GBI) to see the sensors capability to work in the field conditions. In addition, the dependence of the SAW sensor signatures on specific locations of the surface perturbation was investigated to account for some observed abnormal responses. Finally, a novel approach to classify and visualize chemically analogous substances is introduced. The author expects that the thesis work herein may contribute to the study of the modern acoustic wave biosensors which includes but is not limited to: the establishment of underpinning theory that will aid in the evaluation of the signatures; the practical aspects of design and fabrication of SAW devices specific to the vapor phase immunoassay; the development of efficient experimental methodologies; the strategic immobilization of a biolayer on SAW resonator based biosensors; and, the acquisition of reference data for the development of commercial acoustic wave sensors.

In the present thesis, diamond-like carbon thin films were deposited on Si(100) and LiNbO3 substrates by a planar capacitor plasma-enhence-chemical-vapor-deposition system. The reaction gases were C2H2,CH4,O2 and mixed with Ar (95¢M) and H2(5¢M).The influence of the growth of the thin film from different substrates and three different source gases flow ratios have been studied. The bi-layers structure of SAW(Surface Acoustic Wave) device was then fabricated. The interdigital transducers (IDTs) were fabricated on the bi-layers structure. The conditions of the DLC thin film of the bi-layers structure was varied in order to discuss its effects on SAW devices. In addition to Raman analyses, SEM and AFM have been employed to characterize the DLC thin film quality. From the experimental results of Raman spectrum analysis reveals that the DLC film has wide and flat spectrum region at wavelength of 1585~1600cm-1 of G-band and 1390cm-1 of D-band .It indicates that the DLC film contains much graphite sp2 bonds and a small part of amorphous DLC sp3 bonds. The optimal deposition conditions of the DLC film have been found for the reaction gas of C2H2 and Ar, from which the insertion loss of the SAW filter shows the quality better than from the others. SEM and AFM analyses shows that the roughness of the DLC film is below 10 nm and the faces of the DLC films are flat to be made into devices.

Thin Film bulk acoustic wave devices have the advantages of low loss, low temperature coefficient of the resonant frequency, and high power handling. These excellent characteristics are suitable for the applications on high frequency communication systems. In this study, thin film bulk acoustic wave filters using the ladder-type filter and stacked crystal filter configurations were investigated. Platinum was chosen as the top and bottom electrodes. To improve the platinum adhesion on SiNx/SiO2/Si substrates, a seeding layer of titanium is used. Highly c-axis oriented piezoelectric zinc oxide thin films were deposited by two-step deposition method under room temperature. As resonant area decreases, the band rejection of ladder-type filter will increase. Because the resonant area decreased, the distance between signal and ground will increase the results in an increased insertion loss. On the other hand, stacked crystal filters have larger band rejection and less 3dB bandwidth, which are suitable for the application of narrow band filters.

In this study, T-ladder type thin film bulk acoustic wave filters had been fabricated based on thin film bulk acoustic wave resonators. The titanium (Ti) seeding layer and platinum (Pt) for bottom electrode were deposited on silicon substrates by a dual-gun DC sputtering system. Field-emission scanning electron microscopy, atomic force microscopy and the four-point probe method showed that the Pt bottom electrode deposited on the Ti seeding layer exhibited favorable characteristics, such as a surface roughness of 0.69 nm and a sheet resistance of 2.27 £[/¡¼. The ZnO piezoelectric film was deposited using the two-step deposition method by RF magnetron sputtering. Field-emission scanning electron microscopy, atom force microscopy and X-ray diffraction revealed that ZnO piezoelectric film exhibited excellent characteristics, such as a the high preferred c-axis orientation and a rigidly precise surface structure with surface roughness of 7.37 nm. The wet etching process is adopted to fabricate cavity of device. The concentration of 30 wt% KOH and etching temperature of 100 ¢J had been indicated appropriate for etching processes. Finally, the top electrodes of the devices are varied to approach the performances of device applications. The results showed the highest coupling coefficient (kt2) of FBAR device can be obtained using platinum top electrode. The high coupling coefficient of FBAR device is appropriate for wide passband filter. The annealing processes had been used in order to improve the characteristics of piezoelectric films. The stress of ZnO film has been improved from -1.656 Gpa to 0.611 Gpa through the annealing process. At the annealing temperature of 400¢J, the ZnO piezoelectric film exhibited excellent characteristics, such as a large grain size with smooth surface. The quality factor of FBAR device using ZnO film with 400¢J annealing was better than that without annealing. The optimal conditions of fabrication processes are adopted to fabricate top electrode, bottom electrode and piezoelectric film. The T-ladder type FBAR band pass filter was constructed by FBAR resonators. The frequency response is measured using an HP8720 network analyzer and a CASCADE probe station. The 3-dB bandwidth, insertion loss and band rejection of the T-ladder type thin film bulk acoustic wave filter are 79MHz, -3.5 dB and 8.4dB at 2,379MHz, respectively.

Wireless Surface Acoustic Wave (SAW) devices were fabricated and tested using planar Lithium Niobate (LiNbO₃) as substrate. The working frequencies were in the 180 MHz and 360 MHz range. Using a network analyser, the devices were interrogated with a wireless range of more than 2 metres. Trials with Electron Beam Lithography (EBL) to fabricate SAW devices working in the 2450 MHz with a calculated feature size of 350 nm are discussed. Charging problems became evident as LiNbO₃ is a strong piezoelectric and pyroelectric material. Various attempts were undertaken to neutralise the charging problems. Further investigation revealed that sputtered Zinc Oxide (ZnO) is a suitable material for attaching SAW devices on irregularly shaped material. DC sputtering was used and several parameters have been optimised to achieve the desired piezoelectric effect. ZnO was sputtered using a magnetron sputtering system with a 75 mm Zn target and a DC sputter power of 250 Watts. Several trials were performed and an optimised material has been prepared under the following conditions: 9 sccm of Oxygen and 6 sccm of Argon were introduced during the process which resulted in a process pressure of 1.2x10⁻² mbar. The coatings have been characterised using Rutherford Backscattering, X-ray diffraction, SEM imaging, and Atomic force microscopy. SAW devices were fabricated and tested on 600 nm thick sputtered ZnO on a Si substrate with a working frequency of 430 MHz. The phase velocity has been calculated as 4300m/s. Non-planar samples have been coated with 500 nm of sputtered ZnO and SAW structures have been fabricated on using EBL. The design frequency is 2450 MHz, with a calculated feature size of 1 µm. The surface roughness however prevented a successful lift-off. AFM imaging confirmed a surface roughness in the order of 20 nm. Ways to improve manufacturability on these samples have been identified.

Thesis (MEng)--Stellenbosch University, 2015. / ENGLISH ABSTRACT: Please refer to full text for abstract.

Wireless surface acoustic wave (SAW) sensors offer unique advantages over other sensor technologies because of their inherent ability to operate in harsh environments and completely passive operation, providing a reliable, maintenance-free life cycle. For certain SAW sensor applications the challenge is building a wirelessly interrogatable device with the same lifetime as the SAW substrate. The design of these application intensive sensors is complicated by the degradation of device bond wires, die adhesive, and antenna substrate. In an effort to maximize the benefits of the platform, this dissertation demonstrates wafer-level integrated SAW sensors that directly connect the thin film SAW to a thick film on-wafer antenna. Fully integrated device embodiments are presented that operate over a wide range of temperatures using different fabrication techniques, substrates, and coding principles.

When sound waves propagate in a duct in the presence of turbulent flow, turbulent mixing can cause attenuation of the sound waves extra to that caused by the viscothermal effects. Experiments show that compared to the viscothermal effects, this turbulent absorption becomes the dominant contribution to the sound attenuation at sufficiently low frequencies. The mechanism of this turbulent absorption is attributed to the turbulent stress and the turbulent heat transfer acting on the coherent perturbations (including the sound waves) near the duct wall, i.e. sound-turbulence interaction. The purpose of the current investigation is to understand the mechanism of the sound-turbulence interaction in low-Mach-number internal flows by theoretical modeling and numerical simulations. The turbulence absorption can be modeled through perturbation turbulent Reynolds stresses and perturbation turbulent heat flux in the linearized perturbation equations. In this thesis, the linearized perturbation equations are reviewed, and different models for the turbulent absorption of the sound waves are investigated. A new non–equilibrium model for the perturbation turbulent Reynolds stress is also proposed. The proposed model is validated by comparing with experimental data from the literature, and with the data from Direct Numerical Simulations (DNS) of pulsating turbulent channel flow. Good agreement is observed. / <p>QC 20150526</p>

No / A novel technique for the laboratory characterization of the frequency-dependent acoustic surface admittance of partly saturated samples of sands is presented. The technique is based on a standard laboratory de-watering apparatus coupled with a standard acoustic impedance tube. The dependence of the surface admittance on the degree of water saturation is investigated for two samples of sand with widely different flow resistivities. It is shown that a relatively small change (e.g., from 0% to 11% by volume) in the degree of water saturation can result in a much larger change (e.g., twofold) in the acoustic surface admittance. An empirical relationship is found between the peaks observed in the real part of admittance spectra for the low flow resistivity sand and the degree of water saturation. The data are compared with predictions of two widely used ground impedance models: a semiempirical single parameter model and a two parameter model. A modified two-parameter version of a single-parameter model is found to give comparable fit to the two-parameter model. However, neither model provides an accurate fit.

Compared to the much more common photonic crystals that are used to manipulate light, phononic crystals (PnCs) with inclusions in a lattice can be used to manipulate sound. While trying to propagate in a periodically structured media, acoustic waves may experience geometries in which propagation forward is totally forbidden. Furthermore, defects in the periodicity can be used to confine acoustic waves to follow complicated routes on a wavelength scale. Using advanced fabrication methods, we aim to implement these structures to control surface acoustic wave (SAW) propagation on the piezoelectric surface and eventually interact SAWs with quantum structures. To investigate the interaction of SAWs with periodic elastic structures, SAW interdigital transducers (IDTs) and PnC fabrication procedures were developed. GaAs is chosen as a piezoelectric substrate for SAWs propagation. Lift-off photolithography processes were used to fabricate IDTs with finger widths as low as 1.5 micron. PnCs are periodic structures of shallow air holes created in GaAs substrate by means of a wet-etching process. The PnCs are square lattices with lattice constants of 8 and 4 micron. To predict the behavior of a SAW when interacting with the PnC structures, an FDTD simulator was used to calculate the band structures and SAW wave displacement on the crystal surface. The bandgap (BG) predicted for the 8 micron crystal ranges from 180 MHz to 220 MHz. Simulations show a shift in the BG position for 4 micron crystals ranging from 391 to 439 MHz. Two main waveguide geometries were considered in this work: a simple line waveguide and a funneling entrance line waveguide. Simulations indicated an increase in acoustic power density for the funneling waveguides. Fabricated device evaluated with electrical measurements. In addition, a scanning Sagnac interferometer is used to map the energy density of the SAWs. The Sagnac interferometer is designed to measure the outward displacement of a surface due to the SAW. Interferometric measurements confirmed waveguiding in the modified funnel entrance waveguide embedded in the 4 micron PnC. However, they also revealed strong dissipation of the SAW in the waveguide due to the non-vertical sidewalls resulting from the wet-etch process. / Thesis (Master, Physics, Engineering Physics and Astronomy) -- Queen's University, 2013-11-29 15:53:46.369