En l’espace d’une dizaine d’années, les jets de plasma froid à pression atmosphérique ont su s’imposer comme un outil pertinent pour les applications biomédicales. La simplicité de conception et d’utilisation de ces dispositifs, combinée à leurs facultés de produire des espèces réactives (NO, OH, O …), ont significativement contribué au développement rapide du domaine. Beaucoup d’efforts ont été entrepris dans le développement de diagnostics quantitatifs, pour mesurer la production des espèces réactives dans la plume plasma d’un jet donné. Toutefois, la diversité des géométries de décharge, des sources d’alimentations électriques ou des conditions d’utilisation, rendent les comparaisons d’un jet à l’autre, difficiles. Cette thèse a porté sur l’étude du jet de plasma froid à pression atmosphérique développé au GREMI, le Plasma Gun (hélium, impulsion de tension microseconde). Nous avons étudié les mécanismes de décharge susceptibles de considérablement affecter la production d’espèces réactives, dans des conditions approchantes d’applications biomédicales. La thèse s’articule en trois chapitres principaux : l’étude de la modification de l’écoulement de l’hélium par plasma (par strioscopie) ; l’étude de la propagation du plasma dans le capillaire diélectrique (étude expérimentale et numérique de la dynamique de propagation rapide du plasma et de l’évolution du champ électrique en mélange hélium-azote) ; l’étude de l’interaction du plasma avec une cible conductrice (mesures dans le capillaire et dans la plume de l’évolution spatiale et temporelle de la concentration des métastables de l’hélium, corrélées à des mesures du champ électrique). Ce dernier point est en particulier représentatif de tout jet plasma en condition traitement biomédical in vivo et tend à faire une distinction fondamentale avec les mécanismes de décharge du jet plasma dit « libre », sans obstacle entravant la plume plasma. / Over the past ten years, the cold atmospheric pressure plasma jets (CAPPJ) became useful devices for biomedical applications. Their relatively simple design and use, combine with their ability to produce reactive species (NO, OH, O, …), led to a rapid research growth in this field. A lot of studies have been devoted to quantitative diagnostics development for the reactive species production measurements in the plasma plume. However, it is difficult to compare one jet with another because of the huge variety of discharge geometries, electric power supplies or operating conditions. This thesis deals with the study of the CAPPJ developed in GREMI, the Plasma Gun (helium feeded, microsecond voltage pulse). We have studied discharge mechanisms which strongly impact the reactive species production in near target biomedical application conditions. This study is divided in three parts : the study of helium flow modifications induced by the plasma (strioscopy visualization); the study of plasma propagation inside dielectric capillary (experimental and numerical study of fast plasma propagation dynamic and electric field evolution for helium-nitrogen mixtures); the study of conductive target-plasma interaction (space and time resolved measurements inside the capillary and the plasma plume of helium metastable production, correlated with electric field evolution). The conductive target contact concerns any in vivo biomedical treatments. CAPPJ in front of such a conductive target leads to fundamentally different discharge mechanisms compare to the free jet case.

The objective of this thesis is to provide a better understanding of various physical phenomena related to microplasmas/microdischarges. For this purpose, arrays of microreactors on silicon were studied. Different array configurations were fabricated to analyse the influence of each parameter on the physical operation of these devices. The present work focuses on the development and characterisation of micro-discharge devices based on silicon. In this thesis, direct current (DC) and alternating current (AC) regimes are studied using different discharge configurations. For the fabrication of these reactors, Silicon wafers are structured and processed in a cleanroom. Fabrication technology used is compatible with the CMOS technology. The microreactors are fabricated with nickel and silicon electrodes, separated by a dielectric layer of SiO2 with a thickness of 6 μm. The thickness of the dielectric is much lower here than the microreactors studied so far. The devices consist of cavities with 25 to 150 μm in diameter. Experiments of the microdischarges are performed in inert gases at a pressure between 100 and 1000 Torr. We first studied the phenomena of ignition and extinction for the microdevices based on alumina. Then, we studied the microreactors based on silicon containing 1 to 1024 cavities under DC and AC regimes. Characteristics of microdischarges were studied by electrical measurements, measurements of optical emission spectroscopy (OES), laser diode absorption spectroscopy (DLAS) and phase resolved optical emission spectroscopy (PROES). These diagnostics allowed us to investigate the phenomena of ignition, extinction, instability and failure mechanisms of the microplasma devices. This thesis work allowed testing the performance and technological limitations of the silicon based microdischarge arrays. Particular attention was paid to their life time.

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