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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

Computational modelling of a hot-wire chemical vapour deposition reactor chamber

Fourie, Lionel Fabian January 2020 (has links)
>Magister Scientiae - MSc / In this thesis, I explore the subjects of fluid dynamics and the Hot-Wire Chemical Vapour Deposition (HWCVD) process. HWCVD, in its simplicity, is one of the more powerful and elegant deposition techniques available in thin film research which allows for both the growth and post deposition treatments of functional thin films. In the HWCVD process, the quality of the final films is determined by a fixed set of deposition parameters namely: temperature, pressure and the gas flow rate. Finding the optimal combination of these parameters is key to obtaining the desired film specifications during every deposition. Conducting multiple trial experiments to determine said parameters can be expensive and time consuming, this is where simulation methods come into play. One such simulation method is Computational Fluid Dynamics (CFD) modelling

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