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<p>Silicon-based dielectric thin films including amorphous hydrogenated aluminium-doped silicon oxides (<em>a-</em>SiAl_xO_y:H), amorphous hydrogenated silicon nitrides (<em>a-</em>SiN_x:H), and amorphous hydrogenated silicon carbides (<em>a-</em>SiC_x:H) were deposited by remote plasma chemical vapour deposition (RPECVD) techniques including electron cyclotron resonance plasma enhanced chemical vapour deposition (ECR-PECVD) and inductively-coupled-plasma chemical vapour deposition (ICP-CVD) on silicon (Si) wafers, soda-lime glass microscope slides, and glassy carbon (C) plates. Aluminium (Al) in the SiAlO films was incorporated by way of a metalorganic Al(TMHD)₃ precursor.</p> <p>Thickness, refractive index, and growth rate of the films were measured using variable angle spectroscopic ellipsometry (VASE). Film composition was measured using energy dispersive X-ray spectroscopy (EDX) for the SiAlO films and Rutherford backscattering spectrometry (RBS) for the SiC_x films. Elastic modulus and hardness of the SiAlO and SiC_x films were measured using nanoindentation and their adhesion was characterized via progressive load scratch testing.</p> <p>All films were observed to be optically transparent at near-IR and red wavelengths with many SiN_x and SiC_x films exhibiting significant optical absorption above 2.25eV. Modification of a previously developed deposition recipe produced doubled growth rates in SiN_x and SiC_xfilms. SiAlO films were produced with up to 1.6±0.1at% aluninium (Al) incorporation, while SiC_x films with composition ranging from SiC_0.25:H to SiC₂:H could be produced depending on the growth gas flow ratios. SiAlO films exhibited hardness and reduced modulus (<em>H</em> and <em>E</em>) up to 8.2±0.4 and 75±2GPa, respectively; <em>H </em>and <em>E</em> for the SiC_xfilmsreached 11.9±0.2 and 87±3 GPa. Initially, adhesion to Si wafers was extremely poor with films delaminating at loads of 1.5±0.3N when scratched with a 3/16” alumina (Al₂O₃) sphere; implementation of a rigorous pre-deposition surface cleaning procedure produced films showing only cracking and no delamination up to 30N loads vs. a 200μm radius Rockwell C diamond stylus.</p> / Master of Applied Science (MASc)

Carbon nanotubes (CNTs) are tubular structure of a layer or layers of carbon atoms. CNTs serve as a prototypical nanomaterial holding great promises for various basic and applied research applications in the fields of electrical, thermal, and structural materials owing to their superlative mechanical, thermal, electrical, optical, and chemical properties. Since the discovery of CNTs by Iijima in 1991, numerous researches have been conducted to quantify and understand the atomic origin of their high strength, exceptional thermal conductivity, and unique electrical properties. CNTs are also widely used as nanofillers in composite materials to enhance their mechanical properties such as fracture toughness and to serve as sensing agents. There is thus an imperative need to deeply understand the physical properties of CNTs and their responses to various models of deformations such as stretching, bending, twisting, and combinations thereof. In this thesis, we apply all-atom molecular dynamics simulations to study in detail the behavior of several single-walled, armchair CNTs under stretching and bending deformations, realized by imposing appropriate boundary conditions on the CNTs. The simulation results reveal unique scaling properties of the stretching and bending stiffness with respect to the CNT radius and length, which indicate that a single-walled CNT is best modeled as a thin cylindrical shell with a cross-sectional radius equal to the CNT radius and a constant wall thickness much smaller than the CNT radius. By studying the thermal fluctuations of carbon atoms on the CNT wall, the wall thickness is determined to be about 0.45~AA~for all the single-walled CNTs studied in this thesis and correspondingly, Young's modulus is estimated to be about 8.78 TPa for these CNTs. / Master of Science / Carbon atoms are magic building blocks of our world and the basis of life on the earth, and likely in the universe too. They can also form amazing materials with dimensionalities ranging from 0 to 3. For example, carbon atoms can form soccer-ball like spherical structures called fullerenes, with 0 dimensionality. They can also form 1-dimensional tubular structures with only one wall (i.e., one layer of carbon atoms) or multiple walls, called carbon nanotubes (CNTs) that have diameters typically in the nanometer range and lengths as long as 0.5 meter. Carbon atoms also form graphene sheets, which can be regarded as 2-dimensional structures, and 3-dimensional materials including graphite and diamond. In this work, we model CNTs using the molecular dynamics simulation method, where the motion of each atom is resolved and controlled if needed. Specifically, we study CNTs under stretching by fixing one end while pulling the other end in the axial direction, or bending by pulling the middle of a CNT along the radial direction in its cross-section while fixing its two ends. By fitting the simulation results to the continuum mechanics models, we show that a CNT is best described as a thin cylindrical shell with a radius equal to the CNT radius and a wall thickness much smaller than the radius. At the end, the wall thickness of all the CNTs studied here is determined to be about $0.45times 10^{-10}$ meter and their Young's modulus is estimated to be about $8.78times 10^{12}$ Pa, confirming that CNTs are one of the strongest and stiffest materials.

Currently, NCHRP Report 356 has published an equation to estimate the ultimate strength of the local zone in normal weight concrete. The local zone is the area of concrete directly ahead of the bearing plate. The equation can be broken into two distinct parts: unconfined bearing strength of concrete enhanced by the A/A_b ratio and the enhancement of strength due to the presence of confining. Research has shown that the strength enhancement of the A/Ab ratio and confining reinforcing is less in lightweight concrete than in normal weight concrete. To determine the strength of the local zone in lightweight concrete 30 reinforced prisms, 2 unreinforced prisms, and concrete cylinders were tested. The dimensions of the prisms were 8 in. x 8 in. x 16 in. and the cylinders were 4 in. x 8 in. cylinders. The simulated reinforcing in the prisms extended only through the top 8 in. of the prism and consisted of either ties or spirals with different spacing or pitch, respectively. To determine the effect of the A/A_b ratio for each spacing or pitch arrangement of the reinforcing, one of two different size bearing plates were used. From the testing performed in this research and other research, it is apparent that the NCHRP equation is unconservative when estimating the ultimate strength of the local zone in lightweight concrete. By modifying both parts of the NCHRP equation it is possible to conservatively predict the ultimate strength of the local zone in lightweight concrete. Also investigated in this thesis are equations to predict the splitting cylinder strength and modulus of elasticity of lightweight concrete. For a sand-lightweight concrete, as defined by ACI 318-05 Building code and Commentary, the splitting tensile strength can be accurately predicted by multiplying the square root of the compressive strength by 5.7. / Master of Science