The development and advancement of microelectronics technology have been dramatically. The time and cost, for research and optimization of process and equipment, can be saved by using flow simulation. The governing equations of flow field, inside chemical vapor deposition (CVD) reactor, are constructed, dispersed, and solved by grid mesh and numerical method. At present, rapid thermal process (RTP) is becoming more important and popular for thin-film depositing technology. In this thesis, vertical type single wafer RTCVD reactor in poly-silicon thin-film depositing process is analyzed by numerical method. Several operating process parameters, such as: (a) the gap between shower head and wafer surface, (b) gas inlet velocity in shower head, and (c) operating pressure inside chamber of reactor, are considered for discussion and analysis of steady or unsteady phenomenon in three steps of thin-film depositing process, including (¢¹) heating for wafer, (¢º) deposition in steady state, (¢») cooling after deposition etc.. As shown in the results, each operating parameters performs different relations and phenomenon in these steady and unsteady steps: Operating pressure can affect the activity of chemical reaction strongly in unsteady or steady region. Larger gap between wafer and shower head causes less influence by flow effects or buoyancy. And also, radiation heat transfer, which is adopted by RTCVD process, can decrease the influence of some parameters on flow field.

I present results from quantitative evaluation of the capability of hosting and trapping CO₂ of a carbonate brine reservoir from Dickman Field, Kansas. The analysis includes estimation of some reservoir parameters such as porosity and permeability of this formation using pre-stack seismic inversion followed by simulating flow of injected CO₂ using a simple injection technique. Liner et at (2009) carried out a feasibility study to seismically monitor CO₂ sequestration at Dickman Field. Their approach is based on examining changes of seismic amplitudes at different production time intervals to show the effects of injected gas within the host formation. They employ Gassmann's fluid substitution model to calculate the required parameters for the seismic amplitude estimation. In contrast, I employ pre-stack seismic inversion to successfully estimate some important reservoir parameters (P- impedance, S- impedance and density), which can be related to the changes in subsurface rocks due to injected gas. These are then used to estimate reservoir porosity using multi-attribute analysis. The estimated porosity falls within a reported range of 8-25%, with an average of 19%. The permeability is obtained from porosity assuming a simple mathematical relationship between porosity and permeability and classifying the rocks into different classes by using Winland R35 rock classification method. I finally perform flow simulation for a simple injection technique that involves direct injection of CO₂ gas into the target formation within a small region of Dickman Field. The simulator takes into account three trapping mechanisms: residual trapping, solubility trapping and mineral trapping. The flow simulation predicts unnoticeable changes in porosity and permeability values of the target formation. The injected gas is predicted to migrate upward quickly, while it migrates slowly in lateral directions. A large amount of gas is concentrated around the injection well bore. Thus my flow simulation results suggest low trapping capability of the original target formation unless a more advanced injection technique is employed. My results suggest further that a formation below our original target reservoir, with high and continuously distributed porosity, is perhaps a better candidate for CO₂ storage. / text

published_or_final_version / Mechanical Engineering / Master / Master of Philosophy

This study presents an improved ghost-cell immersed boundary approach to represent a solid body in compressible flow simulations. In contrast to the commonly used approaches, in the present work ghost cells are mirrored through the boundary described using a level-set method to farther image points, incorporating a higher-order extra/interpolation scheme for the ghost cell values. In addition, a shock sensor is in- troduced to deal with image points near the discontinuities in the flow field. Adaptive mesh refinement (AMR) is used to improve the representation of the geometry efficiently. The improved ghost-cell method is validated against five test cases: (a) double Mach reflections on a ramp, (b) supersonic flows in a wind tunnel with a forward- facing step, (c) supersonic flows over a circular cylinder, (d) smooth Prandtl-Meyer expansion flows, and (e) steady shock-induced combustion over a wedge. It is demonstrated that the improved ghost-cell method can reach the accuracy of second order in L1 norm and higher than first order in L∞ norm. Direct comparisons against the cut-cell method demonstrate that the improved ghost-cell method is almost equally accurate with better efficiency for boundary representation in high-fidelity compressible flow simulations. Implementation of the improved ghost-cell method in reacting Euler flows further validates its general applicability for compressible flow simulations.

This study observes how the size and type of land development can often be limited by the supply of fresh groundwater sources. Multiple-use recharge basins were found to be effective in diverting pollutants around a potable source of groundwater, thus reducing the chances of that source becoming contaminated. A computer-aided numerical model was used to simulate groundwater flow and its responses to recharge basins in a hypothetical situation.Through a series of trials, artifical recharge was able to abate the problem of groundwater contamination in certain geohydrologic conditions. Optimum rates of recharge and discharge were determined to effectively divert contaminated groundwater around several types of developments. From these findings, land use options and development intensities can be safely recommended for areas which otherwise may have been nearly undevelopable. / Department of Landscape Architecture

abstract: In the recent past, due to regulatory hurdles and the inability to expand transmission systems, the bulk power system is increasingly being operated close to its limits. Among the various phenomenon encountered, static voltage stability has received increased attention among electric utilities. One approach to investigate static voltage stability is to run a set of power flow simulations and derive the voltage stability limit based on the analysis of power flow results. Power flow problems are formulated as a set of nonlinear algebraic equations usually solved by iterative methods. The most commonly used method is the Newton-Raphson method. However, at the static voltage stability limit, the Jacobian becomes singular. Hence, the power flow solution may fail to converge close to the true limit. To carefully examine the limitations of conventional power flow software packages in determining voltage stability limits, two lines of research are pursued in this study. The first line of the research is to investigate the capability of different power flow solution techniques, such as conventional power flow and non-iterative power flow techniques to obtain the voltage collapse point. The software packages used in this study include Newton-based methods contained in PSSE, PSLF, PSAT, PowerWorld, VSAT and a non-iterative technique known as the holomorphic embedding method (HEM). The second line is to investigate the impact of the available control options and solution parameter settings that can be utilized to obtain solutions closer to the voltage collapse point. Such as the starting point, generator reactive power limits, shunt device control modes, area interchange control, and other such parameters. / Dissertation/Thesis / Masters Thesis Electrical Engineering 2017

The master’s thesis deals with the Wankel rotary engines and their 1D simulations using a thermodynamic simulation software for the piston engines. The necessary steps for creation of the equivalent model of the four-stroke three-cylinder combustion engine are provided. The engine used for the validation model was Aixro XR 50. The data measured on this engine during testing were used to validate the created thermodynamic model. The discharge coefficient calculation of the intake and the exhaust ports is shown. The 11kW engine design is created using validated thermodynamic model.

Simulation of viscoelastic fluid flows in complex geometry at high Weissenburg (Wi) number is still a challenging problem in computational rheology. In this thesis, parallel computing toolbox available in OpenFOAM has been analysed in details. The scalability of parallel viscoelastic flow solver has been critically evaluated under benchmark flow problems, including 2D and 3D 4:1 contraction flow, 2D flow past a cylinder with 50% blockage, using up to 4096 CPU cores and 55 million computational grids. Areas for further improvements in parallel computational rheology are discussed. A new monitoring and preserving molecular conformation method is proposed to overcome the unphysical artefact problem in simulation of the FENE-CD-JS model under benchmark flow problems. It greatly enhances the stability of parallel viscoelastic flow solver in simulation of high Wi number flows and, for the first time, successfully captures elastic turbulence in flow past a cylinder problem. A new constitutive model, named as FENE-CD2-JS model, is proposed to overcome the existing shortcomings of the original FENE dumbbell model. The model accounts for high order interactions between non-equilibrium polymer chain molecules and could reproduce the asymmetric oscillatory vortex dynamics in the 16:1 contraction flow geometry at high Wi number (up to 48) flow observed in the experiments. For the first time, the analysis of the spatial distribution of non-equilibrium polymer conformation, through the conformational tensor, in strong complex flow and the results of their power-law scaling are also presented.

The master’s thesis deals with the Wankel rotary engines and their 1D simulations using a thermodynamic simulation software for the piston engines. The necessary steps for creation of the equivalent model of the four-stroke three-cylinder combustion engine are provided. The engine used for the validation model was Aixro XR 50. The data measured on this engine during testing were used to validate the created thermodynamic model. The discharge coefficient calculation of the intake and the exhaust ports is shown. The 11kW engine design is created using validated thermodynamic model.

In current production systems, automation and handling of workpieces is often solved by use of vacuum technology. Most production systems use vacuum ejectors which generate vacuum from compressed air by means of the Venturi effect. However, producing vacuum with compressed air is significantly less efficient than using other principles. To minimize the energy costs of pneumatic vacuum generation or to make full use of the energy available, it is important that the inner contour of the nozzle is shaped precisely to suit the specific application - also the system\'s flow conduction needs to be optimal and the flow losses have to be minimized. This paper presents a method for optimally designing pneumatic vacuum generators and producing them economically even at very low lot sizes in order to keep the operation costs low and address other concerns (such as noise emissions) as well.