Les nanofils (NFs), de par leur propriétés opto et nanoélectroniques sont devenus des éléments indispensable à la fabrication des dispositifs de la nanoélectronique. Le problème principal reste la reproductibilité en terme de densité de NFs, de diamètre... Cette thèse a pour but de développer grâce à la technologie FIB, un procédé permettant l'élaboration de NFs organisés et homogène en taille. / Due to their ease of fabrication and unique physical properties, semiconductor nanowires (NWs) have been proposed as building blocks for new nanoelectronic and photonic devices. Various processes have been developed to obtain large density of ultra-small NWs but naturally forms nanowires often lack reproducibility. We propose to develop a bottom-up (B-U)processes which is based on naturally formed NWs grown on a patterned substrate resulting from self-assembly of metallic clusters or exposition to a focused ion beam (FIB). The major goal consist to obtain organized and homogeneous NWs.