Digital systems have derived performance benefits due to the scaling down of CMOS microprocessor feature sizes towards packing billions of transistors on a chip, or gigascale integration (GSI). This has placed immense bandwidth demands on chip-to-chip and chip-to-board interconnects. The present-day electrical interconnect may limit bandwidth as transmission rates grow. As such, optical interconnects have been proposed as a potential solution. A critical requirement for enabling chip-to-chip and chip-to-board optical interconnection is out-of-plane coupling for directing light between a chip and the board. Any solution for this problem must be compatible with conventional packaging and assembly requirements. This research addresses the prospects for integrating waveguides with mirrors and polymer pillar optical I/O interconnects to provide such a compatible, out-of-plane, chip-to-board packaging solution through the design, analysis, fabrication, and testing of its constituent parts and their ultimate integration.

The objective of this dissertation is to derive a set of compact physical models addressing power integrity issues in high performance gigascale integration (GSI) systems and three-dimensional (3-D) systems. The aggressive scaling of CMOS integrated circuits makes the design of power distribution networks a serious challenge. This is because the supply current and clock frequency are increasing, which increases the power supply noise. The scaling of the supply voltage slowed down in recent years, but the logic on the integrated circuit (IC) still becomes more sensitive to any supply voltage change because of the decreasing clock cycle and therefore noise margin. Excessive power supply noise can lead to severe degradation of chip performance and even logic failure. Therefore, power supply noise modeling and power integrity validation are of great significance in GSI systems and 3-D systems. Compact physical models enable quick recognition of the power supply noise without doing dedicated simulations. In this dissertation, accurate and compact physical models for the power supply noise are derived for power hungry blocks, hot spots, 3-D chip stacks, and chip/package co-design. The impacts of noise on transmission line performance are also investigated using compact physical modeling schemes. The models can help designers gain sufficient physical insights into the complicated power delivery system and tradeoff various important chip and package design parameters during the early stages of design. The models are compared with commercial tools and display high accuracy.