Microelectronic Measuring Systems (MEMS) are being used to capture kinematic data in real-world environments. The benefits of using MEMS are their small size, relatively low cost (compared to an Optical Motion Capture System) and the ability to capture real-time data in almost any environment. The accuracy and precision of MEMS can be influenced by elements in their surrounding environment such as building materials (i.e., reinforced steel) and structural components (i.e., elevators). Recognizing the influence of the environment on MEMS output is important if the MEMS are to be used in real-world environments where subjects could navigate between various environments. MEMS can also be affected by dynamic motion therefore testing of the MEMS in the same conditions in which they are to be used will help to identify any issues prior to data collection. The overall purpose of this thesis was to determine if the outputs of four Shimmer 2r MEMS were accurate and precise enough in static and dynamic conditions to use in a future study to assess gait activities of daily living in individuals with a unilateral transtibial amputation. In order to understand the effect of the environment on the MEMS, accuracy and precision were assessed in a rural environment (to reduce the effect of building materials and structural components) as well as the clinical environment where they will eventually be used for research. The MEMS were also evaluated in static and dynamic conditions to better understand how motion affected accuracy and precision. The results of this study confirmed that the clinical environment affected the MEMS outputs. During the dynamic condition, the gyroscope output of one MEMS sensor was significantly different than the other devices indicating recalibration or possible exclusion from future studies. Prior to using MEMS in research, it is advisable to investigate the effects of the environment on the sensor outputs as well as assess the performance of the individual sensors. / Thesis / Master of Science Rehabilitation Science (MSc) / The overall objective of this thesis was to determine if four Shimmer 2r Microelectronic Measuring Systems (MEMS) were accurate and precise enough in static and dynamic conditions prior to their use in a future study to assess seven activities of daily living (including level walking, ramp walking and stairs) in individuals with a unilateral transtibial amputation in a clinical environment. To understand the effect the environment has on the MEMS, they were assessed in both a rural environment to reduce the effect of building materials, as well as the clinical environment where they will eventually be used for research. This study confirmed that the clinical environment affected the MEMS outputs, although these effects were deemed to be clinically insignificant for the intended purpose of these MEMS. Calibration as well as accuracy and precision assessment of MEMS should be executed in the conditions and environments in which they are to be utilized.

<p dir="ltr">Gyroscopes have become an integral part of many application spaces ranging from consumer electronics to navigation. As navigation and movement tracking becomes necessary through inertial measurement units (that comprises gyroscopes and accelerometers) in myriad of scenarios especially when global navigation and satellite system (GNSS) is not available, stability of gyroscopes plays a detrimental role in the accuracy of navigation. Recent developments in micro-electromechanical systems (MEMS) based gyroscopes enabled them to penetrate into navigation grade application spaces. MEMS based miniaturization approach also revived the interest in nuclear magnetic resonance gyroscopes (NMRGs). In parallel, emerging atomic gyroscope technologies are getting attention such as using quantum defects in single crystal diamond. </p><p><br></p><p dir="ltr">Considering innovative ways MEMS can improve gyroscopes, we investigate solid state gyroscope technologies in piezoelectric MEMS and nuclear spin based platforms for next generation rotation sensing that is shock and vibration insensitive. For the first part of this study, we explore a piezoelectric resonator that can excite wine-glass mode (WGM) and tangential mode. WGM is used for rotation sensing applications in various excitation mechanisms in literature. However, we demonstrate the capability of exciting WGM without the need for segmented electrodes in piezoelectric domain that allows self-alignment of the excitation electrodes using a unique property of Lead Magnesium Niobate-Lead Titanate (PMN-PT). In the second part of the study, we explore Nitrogen-Vacancy (NV) centers in diamond to be used as gyroscopes exploiting the rotation sensitivity of nuclear spins. NV center-based gyroscopes provide solid-state solution with comparable or superior performance without any moving parts. We propose mechanical coupling to NV centers in diamond using piezoelectrically excited bulk acoustic waves (BAW) to extend the coherence time of nuclear spins by dynamical decoupling. We explore piezoelectric coupling design space of AlN thin film BAW resonators (FBARs) to enable efficient mechanical drive to improve Rabi oscillations in diamond to overcome one of the most important bottlenecks of realizing a gyroscope, which is the mitigation and control of nuclear spin and electron spin interaction in diamond NV center system.</p>

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This thesis, for the first time in the literature, presents an automatic mode-matching system that uses the phase relationships between the residual quadrature and drive signals in a gyroscope to achieve and maintain the frequency matching condition, and also the system allows controlling the system bandwidth by adjusting the closed loop parameters of the sense mode controller, independently from the mechanical sensor bandwidth. There are two mode-matching methods, using the proposed mode-matching system, presented in this thesis. In the first method, the frequency matching between the resonance modes of the gyroscope is automatically accomplished by changing the proof mass potential. The main motivation behind the first method is to tune the sense mode resonance frequency with respect to the drive mode resonance frequency using the electrostatic tuning capability of the sense mode. In the second method, the mode-matched gyroscope operation is accomplished by using dedicated frequency tuning electrodes that only provides a capability of tuning the sense mode resonance frequency generating an electrostatic spring effect on the sense frame, independently from the proof mass potential. This study mainly focuses on the second method because the proof mass potential variation is not desired during the gyroscope operation since the proof mass potential directly affects the drive and sense mode dynamics of the gyroscope. Therefore, a single-mass fully-decoupled gyroscope including the dedicated frequency tuning electrodes are designed. To identify mode shapes and mode frequencies of the designed gyroscope, FEM simulations are performed. The designed gyroscopes are fabricated using SOI-based SOG process. The fabrication imperfections are clarified during the formation of the structural layer of the gyroscope. Next, the closed loop controllers are designed for the drive amplitude control, sense force-feedback, quadrature cancellation, and mode-matching regarding the phase relationship between the quadrature and drive signals. Mode-matching is achieved by using a closed loop controller that provides a DC tuning potential. The mode-matching system consisting of vacuum packaged sensor, drive amplitude control, sense force-feedback, quadrature cancellation, and mode-matching modules is implemented on a printed circuit board (PCB), and then the system level tests are performed. Tests illustrate that the mode-matching system operates in a desired manner. Test results demonstrate that the performances of the studied MEMS gyroscopes are improved up to 2.6 times in bias instability and 2 times in ARW under the mode-matched condition compared to the mismatched (~200 Hz) condition, reaching down to 0.73 &deg / /hr and 0.024 &deg / /&radic / hr, respectively. At the mode-matched gyroscope operation, the better performance is obtained to be bias instability of 0.87

This thesis reports the development of advanced readout and control electronics for MEMS gyroscopes developed at METU. These gyroscope electronics are separated into three main groups: high sensitive interface circuits, drive mode amplitude controlled self oscillation loops, and sense mode phase sensitive amplitude demodulators. The proposed circuits are first implemented with discrete components, and then integrated on CMOS chips. A self oscillation loop enabling constant amplitude drive mode vibrations independent of sensor parameters and ambient conditions is developed. A fully functional angular rate system, which is constructed by employing this advanced control electronics together with the transresistance amplifier type interfaces and sense mode electronics, is implemented on a dedicated PCB having 5.4x2.4 cm2 area. This system demonstrates an impressive performance far better than the best performance achieved by any angular rate system developed at METU. Bias instability and angle random walk values are measured as 14.3 &ordm / /hr and 0.126 &ordm / /&amp / #8730 / hr, respectively. The scale factor of the system is found as 22.2 mV/(&ordm / /sec) with a nonlinearity of 0.01%, and a zero rate output of 0.1 &ordm / /sec, in &plusmn / 50 &ordm / /sec measurement range. CMOS unity gain buffer (UGB) and transimpedance amplifier (TIA) type resistive and capacitive interfaces are characterized through AC, transient, and noise tests. It is observed that on chip biasing mechanisms properly DC-bias the high impedance nodes to 0 V potential. UGB type capacitive interfaces demonstrate superior performance than TIA counterparts due to stability problems associated with TIA interfaces. CMOS differential drive mode control and sense mode demodulation electronics give promising results for the future performance tests.

This thesis reports the development of various high performance readout and control electronics for implementing angular rate sensing systems using MEMS gyroscopes developed at METU. First, three systems with open loop sensing mechanisms are implemented, where each system has a different drive-mode automatic gain controlled (AGC) self-oscillation loop approach, including (i) square wave driving signal with DC off-set named as OLS_SquD, (ii) sinusoidal driving signal with DC off-set named as OLS_SineD, and iii) off-resonance driving signal named as OLS_OffD. A forth system is also constructed with a closed loop sensing mechanism where the drive mode automatic gain controlled (AGC) self-oscillation loop approach with square wave driving signal with DC off-set named as CLS_SquD. Sense and drive mode electronics employ transimpedance and transresistance amplifiers as readout electronics, respectively. Each of the systems is implemented with commercial discrete components on a dedicated PCB. Then, the angular rate sensing systems are tested with SOG (Silicon-on-Glass) gyroscopes that are adjusted to have two different mechanical bandwidths, more specially 100 Hz and 30 Hz. Test results of all of these cases verify the high performance of the systems. For the 100 Hz bandwidth, the OLS_SquD system shows a bias instability of 4.67 &amp / #730 / /hr, an angle random walk (ARW) 0.080 &amp / #730 / /&amp / #8730 / hr, and a scale factor of 22.6 mV/(&amp / #730 / /sec). For the 30 Hz bandwidth, the OLS_SquD system shows a bias instability of 5.12 &amp / #730 / /hr, an ARW better than 0.017 &amp / #730 / /&amp / #8730 / hr, and a scale factor of 49.8 mV/(&amp / #730 / /sec). For the 100 Hz bandwidth, the OLS_SineD system shows a bias instability of 6.92 &amp / #730 / /hr, an ARW of 0.049 &amp / #730 / /&amp / #8730 / hr, and a scale factor of 17.97 mV/(&amp / #730 / /sec). For the 30 Hz bandwidth, the OLS_SineD system shows a bias instability of 4.51 &amp / #730 / /hr, an ARW of 0.030 &amp / #730 / /&amp / #8730 / hr, and a scale factor of 43.24 mV/(&amp / #730 / /sec). For the 100 Hz bandwidth, the OLS_OffD system shows a bias instability of 8.43 &amp / #730 / /hr, an ARW of 0.086 &amp / #730 / /&amp / #8730 / hr, and a scale factor of 20.97 mV/(&amp / #730 / /sec). For the 30 Hz bandwidth, the OLS_OffD system shows a bias instability of 5.72 &amp / #730 / /hr, an ARW of 0.046 &amp / #730 / /&amp / #8730 / hr, and a scale factor of 47.26 mV/(&amp / #730 / /sec). For the 100 Hz bandwidth, the CLS_SquD system shows a bias instability of 6.32 &amp / #730 / /hr, an ARW of 0.055 &amp / #730 / /&amp / #8730 / hr, and a scale factor of 1.79 mV/(&amp / #730 / /sec). For the 30 Hz bandwidth, the CLS_SquD system shows a bias instability of 5.42 &amp / #730 / /hr, an ARW of 0.057 &amp / #730 / /&amp / #8730 / hr, and a scale factor of 1.98 mV/(&amp / #730 / /sec). For the 100 Hz bandwidth, the R2 nonlinearities of the measured scale factors of all systems are between 0.0001% and 0.0003% in the &plusmn / 100 &amp / #730 / /sec measurement range, while for the 30 Hz bandwidth the R2 nonlinearities are between 0.0002% and 0.0062% in the &plusmn / 80&amp / #730 / /sec measurement range. These performance results are the best results obtained at METU, satisfying the tactical-grade performances, and the measured bias instabilities and ARWs are comparable to the best results in the literature for a silicon micromachined vibratory gyroscope.

Ce travail de thèse porte sur l’étude et la réalisation de micro-capteurs dédiés à la mesure de vitesse angulaire par des principes basés sur des échanges thermiques. Deux types de gyromètres ont été développés dont la principale différence est liée au principe qui permet la mise en mouvement du gaz : convection forcée pour l’un et expansion thermique pour l’autre. Le principe est basé sur la modification par la force de Coriolis des échanges thermiques dans un fluide chauffé localement lorsque le dispositif est soumis à une vitesse de rotation. L’utilisation d’un fluide comme masse sismique est en rupture avec les concepts de gyromètres dits traditionnels. Cet avantage a pour conséquence la possibilité d’une utilisation dans des conditions environnementales sévères telles que de fortes accélérations (> 10 000 g) et de fortes vibrations. Les objectifs de ce travail consistent à étudier, à développer et à caractériser ces deux types de gyromètres. Pour cela, des études numériques ont été menées afin de mieux appréhender les phénomènes physiques et thermiques mis en jeu dans la cavité. On a pu aussi étudier l’effet des paramètres thermo-physiques du fluide, des différentes dimensions géométriques et de la vitesse d’écoulement du gaz sur la sensibilité et l’étendue de mesure. Par ailleurs, des prototypes des deux types de gyromètres ont été réalisés puis caractérisés. Les résultats sont très encourageants et les principes validés, mais leur confrontation avec ceux de la simulation montre que des améliorations sont à apporter sur le modèle numérique. / This PhD thesis deals with both study and fabrication of micro-sensors dedicated to the measurement of angular velocity, these devices are based on heat exchanges. Two types of gyroscopes have been developed, one using a jet of gas being deflected by the rotation, the other one using thermal expansion of a gas. Under rotation, heat transfers in a locally heated fluid is modified by the Coriolis force and induces a change in temperature distribution. Using a fluid as seismic mass enhances performances in terms shock (> 10 000g) and vibration resistances compared with standard mechanical gyroscopes.The aim of this work has been to study, develop and characterize these two gyroscopes. For this purpose, numerical studies have been carried out in order to improve our understanding of physical and thermal phenomena involved in the device. Effects of thermo-physical parameters, sensor size and gas flow velocity on both sensitivity and measuring range were analyzed.On the other hand, prototypes of both gyroscopes were manufactured and characterized. The proof of concept has been validated and encouraging results have been found. Comparison of measure and simulation have shown that improvements have to be made on the numerical model.

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Cette thèse a été effectuée dans un contexte industriel de forte concurrence en lien avec les capteurs miniatures en silicium, destinés au gigantesque marché dit "consumer", dont l'application phare est le "Smartphone", pour laquelle les fonctionnalités accrues engendrent un besoin en matière de multi-capteurs inertiels dits 10-axes (accéléromètre 3-axes, magnétomètre 3-axes, gyromètre 3-axes et capteur de pression). Tout comme les circuits intégrés, les contraintes de coût de tels capteurs se traduisent par une exigence en termes de densité d'intégration. La technologie M&NEMS (Micro- & Nano- Electro Mechanical Systems) a été développée pour répondre à cette attente. Elle repose sur l'intégration de jauges de contraintes de dimensions nanométriques (~250 nm) avec des structures électromécaniques micrométriques, ce qui prodigue une compacité hors-pair des capteurs, ouvrant la voie à la co-intégration de multi-capteurs sur la même puce de silicium. Toutefois, la nature différente des grandeurs physiques à mesurer impose des contraintes supplémentaires, parfois opposées, ce qui rend leur co-intégration difficile. Partant de ce constat, nous avons exploré et développé, des solutions devant permettre le fonctionnement sous une même pression environnante, d'accéléromètres et de gyromètres à force de Coriolis. Cette problématique de co-intégration, s'étend au-delà du couple accéléromètre-gyromètre. Des questions inhérentes au capteur de pression ainsi qu'aux 3 axes de mesure d'un accéléromètre, sont également traitées dans cette thèse / This thesis was carried out in an industrial context of strong competition in connection with miniature silicon sensors for the huge so-called “consumer” market, where the “Smartphone” is the killer application; its increasing functionality creates a need for the so-called ‘10-axis' inertial multi-sensors (3-axis accelerometer, 3-axis magnetometer, 3-axis gyro sensor and pressure). Similarly to integrated circuits, cost constraints on such sensors translate into a requirement in terms of integration density. The M & NEMS (Micro- & Nano- Electro-Mechanical-Systems) technology has been developed to meet this expectation. It is based on the integration of nanoscale (~ 250 nm) strain gauges together with micrometric electromechanical structures, which ensure unrivaled compactness, paving the way for the co-integration of multiple inertial sensors on the same silicon chip. However, the different nature of the physical quantities to be measured imposes additional constraints, sometimes conflicting, which leads to a difficult co-integration. Based on this observation, we have explored and developed solutions to allow operation under the same ambient pressure, of accelerometers together with Coriolis force based gyroscopes. This issue of co-integration extends beyond the accelerometer-gyroscope couple. Issues inherent to the pressure sensor and to the 3-axis accelerometer measurements, are also addressed in this thesis