The aim of this diploma thesis is to develop a linear positioning stage for Ultra High Vacuum (UHV) environment. Simple prototypes of the linear positioning stage were designed and incorporated as part of a multiaxis sample manipulator for a UHV Scanning Tunneling Microscopy / Atomic Force Microscopy (STM/AFM). Different types of position encoders and linear guideways are discussed. Implementation of the homodyne interferometer as an optimization tool for a slip-stick based linear stage is described. Scalar diffraction theory is used to model the diffraction grating optical position encoder behavior.