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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

Design and Fabrication of 1550 nm Photonic Crystal Surface Emitting Lasers

Martins de Pina, João January 2018 (has links)
In this study, the design and fabrication of a monolithic InP-based 1550-nm photonic-crystal surfaceemitting laser (PCSEL) is reported. The device is composed by an InGaAsP multi-quantum well (MQW) active layer and InP photonic crystal (PhC) formed by metal organic chemical vapour deposition (MOCVD). A theoretical study based mainly on the Fourier modal method using Stanford Stratified Structure Solver (S 4) and finite element analysis using COMSOL Multiphysics was carried out in order to optimize the emission at 1550 nm due to the two-dimensional band-edge resonance effect at the Γ point.The device design and modeling, materials testing (annealing and MOCVD regrowth), process optimization and the fabrication of light emitting diodes (LEDs) based on the same structure as the PCSELs (without the PhC) is reported. The fabricated devices show a low series resistance of 8.19 Ω and a turn-on voltage of 0.84 V. The average differential output power is 41 mW/A with an electroluminescent peak at 1511 nm. The full assembly of the final PCSEL devices is beyond the scope of the present thesis and corresponds to an ongoing project expected to be finalized within the coming year. However, detailed guidelines and fabrication instructions, including the manufacturing of an appropriate lithographic mask set, are provided. / Föreliggande examensarbete rapporterar designen och tillverkningsprocessen för en monolitisk InPbaserad 1550-nm så kallad Photonic-Crystal Surface-Emitting Laser (PCSEL). Komponenten bestå r av en aktiv kvantbrunnsstruktur i InGaAsP och ett fotoniskt-kristall (PhC)-lager i InP, bägge odlade med hjälp av metalorganisk gasfasepitaxi (MOCVD). En teoretisk studie baserad på Fourier-modalmetoden med användning av Stanford Stratified Structure Solver (S4) och finit elementanalys-metoden med med hjälp av av COMSOL Multiphysics utfördes för att optimera emissionen vid 1550 nm genom en tvådimensionell bandkantsresonanseffekt vid Γ punkten.Rapporten går igenom komponentdesign och modellering, materialtestning (värmebehandling och MOCVDåterväxt), processoptimering och tillverkning av lysdioder (LED) baserade på samma struktur som PCSELkomponenterna (men utan PhC-strukturering). De tillverkade lysdioderna uppvisar en låg serieresistans på 8.19 Ω och en framspänning på 0.84 V. Den genomsnittliga differentiella utgångseffekten är 41 mW/A med en luminescenstopp vid 1511 nm. Den slutliga tillverkningen av färdiga PCSEL-enheter ligger utanför ramen för detta examensarbete och motsvarar istället ett pågående projekt som förväntas bli slutfört inom det kommande året. Däremot ges detaljerade riktlinjer och tillverkningsinstruktioner, för vilket ett fotolitografiskt mask-set även tagits fram.
2

Nouvelles architectures de composants photoniques par l'ingénierie du confinement électrique et optique / News architectures for photonic components using electric and optical confinement engineering

Lafleur, Gaël 05 December 2016 (has links)
Le confinement électrique et optique par oxydation des couches minces d'AlGaAs est une étape essentielle dans la réalisation des composants photoniques actifs et passifs dans la filière de matériaux GaAs. La recherche de performances ultimes sur ces composants nécessite une meilleure maîtrise du procédé d'oxydation ainsi qu'une meilleure connaissance des propriétés optiques de l'oxyde d'aluminium (AlOx). Dans cette perspective, j'ai d'abord réalisé une étude expérimentale de la vitesse d'oxydation des couches d'AlGaAs en fonction de la température du substrat, de la composition en gallium des couches étudiées, de la pression atmosphérique et de la géométrie des mesas considérés. Puis, j'ai établi un modèle anisotrope permettant une meilleure résolution spatiale et temporelle de la forme du front d'oxydation de l'AlAs. Enfin, j'ai exploité ce procédé pour réaliser des composants d'optique guidée notamment des micro-résonateurs puis réalisé des guides optiques à fente et caractérisé leurs performances optiques. / Optical and electrical confinement using Al(Ga)As layer oxidation is a key milestone in the fabrication of active and passive GaAs-based photonic components. To optimize those devices, through the control of the optical and electrical confinements, a better modelling of oxidation process and a better understanding of optical properties of aluminum oxide (AlOx) is required. One part of this work is focusing on a throughout experimental study of AlGaAs oxidation kinetics, where I studied different important parameters such as wafer temperature, gallium composition, atmospheric pressure and mesa geometry. Then, I developed a new predictive model taking into account the process anisotropy, thus allowing a better temporal and spatial of AlAs oxidation front evolution. Finally, I could exploit this technological process to realize whispering gallery mode microdisks as well as slot optical waveguides, and I have characterized this latter photonic devices.

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