Typescript (photocopy). / Digitized by Kansas Correctional Industries

LD2668 .T4 1966 T262 / Master of Science

No description available.

published_or_final_version / Electrical Engineering / Master / Master of Philosophy

The equivalent impedance of a RF plasma was experimentally determined by monitoring the voltage and current waveform for different input powers in real time. Average ion energies and fluxes were determined by a computer model which takes ion collisions in the sheath regions into account. In addition two models were proposed which explain how RF energy is converted to DC potential energy in the sheath. Etch rates of Si in a CF₄ discharge were also evaluated and related to the measurements.

by Leung, Kowk-wa. / Thesis (Ph.D.)--Chinese University of Hong Kong, 1993. / Includes bibliographical references (leaves 207-211). / Dedication / Acknowledgements / CHAPTER / Chapter 1. --- INTRODUCTION --- p.1 / Chapter 2. --- ANALYSIS OF A PROBE-FED HEMISPHERICAL DR ANTENNA --- p.13 / Chapter 2.1 --- Introduction --- p.13 / Chapter 2.2 --- Problem Formulation --- p.14 / Chapter 2.3 --- Single Cavity Mode Approximation --- p.33 / Chapter 2.3.1 --- Evaluation of Input Impedance --- p.33 / Chapter 2.3.2 --- Measured and Computed Results --- p.36 / Chapter 2.4 --- Rigorous Moment Method Solution --- p.47 / Chapter 2.4.1 --- Efficient Evaluation of GEz --- p.47 / Chapter 2.4.2 --- Moment Method Formulation for Input Impedance --- p.51 / Chapter 2.4.3 --- Evaluation of Z-matrix --- p.56 / Chapter 2.4.4 --- Evaluation of V-matrix --- p.62 / Chapter 2.4.5 --- Convergence Checks --- p.65 / Chapter 2.4.6 --- Measured and Computed Results --- p.91 / Chapter 2.4.7 --- Conclusion --- p.113 / Chapter 2.5 --- Theoretical Single Cavity Mode Radiation Patterns --- p.114 / Chapter 2.6 --- Conclusion --- p.117 / Chapter 3. --- ANALYSIS OF APERTURE COUPLED HEMISPHERICAL DR ANTENNA --- p.118 / Chapter 3.1 --- Introduction --- p.118 / Chapter 3.2 --- Problem Formulation --- p.120 / Chapter 3.3 --- Moment Method Solution --- p.133 / Chapter 3.4 --- Magnetic Field Green's Function of DR Antenna --- p.138 / Chapter 3.5 --- Efficient Evaluations of Antenna Green's Function and Yamn --- p.150 / Chapter 3.5.1 --- Modal Green's function of DR Antenna --- p.150 / Chapter 3.5.2 --- Evaluation of Yamn --- p.153 / Chapter 3.6 --- Single Cavity Mode Approximation --- p.155 / Chapter 3.6.1 --- Evaluation of Input Impedance --- p.155 / Chapter 3.6.2 --- Measured and Computed Results --- p.157 / Chapter 3.6.3 --- Conclusion --- p.165 / Chapter 3.7 --- Exact Modal Solution --- p.166 / Chapter 3.7.1 --- Convergence Checks --- p.166 / Chapter 3.7.2 --- Measured and Computed Results --- p.166 / Chapter 3.7.3 --- Conclusion --- p.187 / Chapter 3.8 --- Conclusion --- p.188 / Chapter 4. --- CONCLUSION --- p.189 / APPENDIX A PROOF OF EQUATION (2-16) --- p.192 / APPENDIX B DERIVATION OF EQUATION (2-43) --- p.193 / APPENDIX C DERIVATION OF EQUATION (2-44) --- p.196 / APPENDIX D PROPAGATION CONSTANT OF FIELDS INSIDE MICROSTRIPLINE --- p.198 / APPENDIX E NUMERICAL TECHNIQUE OF SPECTRAL DOMAIN INTEGRAL --- p.200 / APPENDIX F EXPERIMENTAL SET-UP FOR PROBE- FED DR ANTENNA MEASUREMENT --- p.203 / APPENDIX G EXPERIMENTAL SET-UP FOR APERTURE- COUPLED DR ANTENNA MEASUREMENT --- p.205 / REFERENCES --- p.207 / LIST OF PUBLICATIONS PRODUCED DURING THE STUDY A-l / INTERNATIONAL AWARD OBTAINED DURING THE STUDY B-l

Thesis (M. Phil.)--University of Hong Kong, 1973. / Mimeographed.

No description available.

No description available.

Thesis (Ph. D.)--University of Washington, 1990. / Vita. Includes bibliographical references (leaves [174]-182).