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Etching of polyphenylene oxide in a downstream microwave plasma using NF₃, SF₆, O₂ and Ar gas mixturesVenkataraman, Arjun 28 September 2004 (has links)
Graduation date: 2005
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Etch products dynamics of polyphenylene oxide laminates using a CF���/O���/Ar downstream microwave plasmaHsu, Chia-Chang 04 March 1999 (has links)
Graduation date: 1999
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Spectroscopic studies of etching gases and microwave diagnostics of plasmas related to the semiconductor industry.Vas̆eková, Eva. January 2006 (has links) (PDF)
Thesis (Ph. D.)--Open University.
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Fabrication of silicon and glass devices for microfluidic bioanalytical applications /Kolari, Kai. January 1900 (has links) (PDF)
Thesis (doctoral)--Helsinki University of Technology, 2007. / Includes bibliographical references. Also available on the World Wide Web.
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An analysis and development of controls for exposures to maintenance personnel working on the plasma metal etchersBoysen, Christopher J. January 1998 (has links) (PDF)
Thesis, PlanB (M.S.)--University of Wisconsin--Stout, 1998. / Includes bibliographical references.
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Plasma etch characteristics of nitrogen trifluoride gas mixtures /Barkanic, John A., January 2004 (has links)
Thesis (Ph. D.)--Lehigh University, 2004. / Includes vita. Includes bibliographical references (leaves 179-187).
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Design and development of metal-polymer film systems for flexible electrodes used in cortical mapping in ratsYeager, John David, January 2008 (has links) (PDF)
Thesis (M.S. in materials science and engineering)--Washington State University, August 2008. / Title from PDF title page (viewed on Mar. 11, 2009). "School of Mechanical and Materials Engineering." Includes bibliographical references.
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In situ monitoring of reactive ion etchingMorris, Bryan George Oneal. January 2009 (has links)
Thesis (Ph.D)--Electrical and Computer Engineering, Georgia Institute of Technology, 2010. / Committee Chair: May, Gary; Committee Member: Brand,Oliver; Committee Member: Hasler,Paul; Committee Member: Kohl,Paul; Committee Member: Shamma,Jeff. Part of the SMARTech Electronic Thesis and Dissertation Collection.
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Deposition of plasma polymerized thin films /Haque, Yasmeen. January 1985 (has links)
Thesis (Ph. D.)--University of Washington, 1985. / Vita. Bibliography: leaves [135]-145.
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Plasmaless automated xenon difluoride MEMS etching system development and applicationXuan, Guangchi. January 2006 (has links)
Thesis (M.E.E.)--University of Delaware, 2006. / Principal faculty advisor: James Kolodzey, Dept. of Electrical and Computer Engineering. Includes bibliographical references.
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