In this thesis, a novel technique for measuring photoacid generation kinetics in chemically amplified photoresists was developed that utilizes capacitance measurements from interdigitated electrodes. In this technique, a chemically amplified photoresist is first coated onto the interdigitated electrode sensors. Then, capacitance measurements are recorded from the sensor as the photoresist is exposed to UV radiation. As acid is generated in the film during exposure, the net dielectric constant of the resist film changes, resulting in a change in the capacitance measured from the IDE sensor. By properly analyzing the observed capacitance response to exposure, it is possible to determine the kinetic rate constant for photoacid generation, or Dill C parameter. The discussion in this thesis describes four major areas of work performed. First, the basic development of the Dill C measurement technique and data analysis algorithm is described. Second, potential complications due to relative humidity changes, spin coating problems, and ambient base contamination are investigated. Next, the discussion turns to two key improvements to the measurement technique: the use of multi-frequency measurements to increase the capacitance signal, and the development of a normalized capacitance expression for improved data analysis. Finally, the effects of two critical components of chemically amplified resist solutions upon the technique are studied: protecting groups and background base quenchers.

Grain storage is an essential part of the food production chain. Therefore, pre- venting grain deterioration is a key issue in a grain storage system. There are several causes for spoilage, all resulting in grain quality and quantity loss. One approach to detect incipient spoilage is by detecting the produced volatiles. In the past, many sensors for detecting volatiles have been developed and are used in industry. However, most of the commercial gas sensors are bulky with high power consumption, mainly limited in range of operating temperature, or require a restricted control over temperature and humidity. This thesis describes the design, fabrication and evaluation of a gas sensor capable of detecting volatiles and considers the potential use of polymer- based sensors. Conductive polymer-based sensors have been reported sensitive to a wide range of volatiles but are commonly evaluated under a controlled environment. Conventional sensor reproducibility and repeatability are also a concern due to the difficulties associated with polymer composite film preparation. In addition, current studies have not fully explored sensor properties in response to humidity, a common factor in any environment, and a variable parameter in grain storage facilities. Moreover, these sensors suffer from ambient temperature dependency as they work based on partitioning mechanism. To enhance sensor performances and eliminate the temperature dependency, a new sensor structure is proposed. The new design uses standard lithography process to fabricate a thermally isolated cantilever containing interdigitated electrodes and a micro-heater to efficiently heat and maintain a constant temperature throughout the interdigitated electrodes. This structure eliminates sensor response drifts caused by ambient temperature variations. Capacitive measurements are performed as the means of volatile detection, which simplify the use of polymers due to the absence of conductive filler and the challenges associated with it. Frequency spectroscopy provides additional information regarding the presence of volatiles compared to conventional resistive sensors, since mechanisms other than swelling are involved. Moreover, frequency and temperature modulations can be employed to further enhance sensor performance, enabling the use of a reduced number of sensors in a sensor array.

Grain storage is an essential part of the food production chain. Therefore, pre- venting grain deterioration is a key issue in a grain storage system. There are several causes for spoilage, all resulting in grain quality and quantity loss. One approach to detect incipient spoilage is by detecting the produced volatiles. In the past, many sensors for detecting volatiles have been developed and are used in industry. However, most of the commercial gas sensors are bulky with high power consumption, mainly limited in range of operating temperature, or require a restricted control over temperature and humidity. This thesis describes the design, fabrication and evaluation of a gas sensor capable of detecting volatiles and considers the potential use of polymer- based sensors. Conductive polymer-based sensors have been reported sensitive to a wide range of volatiles but are commonly evaluated under a controlled environment. Conventional sensor reproducibility and repeatability are also a concern due to the difficulties associated with polymer composite film preparation. In addition, current studies have not fully explored sensor properties in response to humidity, a common factor in any environment, and a variable parameter in grain storage facilities. Moreover, these sensors suffer from ambient temperature dependency as they work based on partitioning mechanism. To enhance sensor performances and eliminate the temperature dependency, a new sensor structure is proposed. The new design uses standard lithography process to fabricate a thermally isolated cantilever containing interdigitated electrodes and a micro-heater to efficiently heat and maintain a constant temperature throughout the interdigitated electrodes. This structure eliminates sensor response drifts caused by ambient temperature variations. Capacitive measurements are performed as the means of volatile detection, which simplify the use of polymers due to the absence of conductive filler and the challenges associated with it. Frequency spectroscopy provides additional information regarding the presence of volatiles compared to conventional resistive sensors, since mechanisms other than swelling are involved. Moreover, frequency and temperature modulations can be employed to further enhance sensor performance, enabling the use of a reduced number of sensors in a sensor array.

This thesis provides a compendium for the use of microcontact printing in fabricating electrical devices. Work has been undertaken to examine the use of soft lithographic techniques for employment in electronic manufacture. This thesis focusses on the use of high electric field generators as a means to producing electroluminescent devices. These devices provide a quantifiable output in the form of light. Analysis of the electrical performance of electrode structures can be determined by their success at producing light. A prospective reduction in driving voltage would deem these devices more efficient, longer lasting and an improvement on current specification. The work focussed on the viability of using relatively crude print techniques to create high resolution structures. This was carried out successfully and demonstrated that lighting structures of 75 μm and 25 μm have been produced. Microcontact printing has been established as a method for patterning gold surfaces with a functionalising self-assembled monolayer using alkanethiol molecules. This layer is then utilised as an etch resist layer to expose gold tracks for use as electric field generator electrode arrays. Through careful analysis of each step of the printing process, techniques were developed and reported to create a robust and repeatable print mechanism for reliability and accuracy. These techniques were employed to optimise the print process culminating in the development of each stage and final electrode structures mounted on a rigid backplate for use as electroluminescent devices for characterisation. These devices were then modelled for their electrical characteristics and investigated for being used in low voltage application. In this case for the development of electroluminescent applications, a driving voltage of 65 V was achieved and represents a significant advance to the field of printed electronics and Electroluminescence.

The capability of manipulating microparticle in small volumes is fundamental to many biological and medical applications, including separation and detection of cells. The development of microtools for effective sample handling and separation in such volumes is still a challenge. DEP (dielectrophoresis) is one of the most widely used methods in handling the microparticles. In this thesis we show that forces generated by nonuniform electric field (DEP) can be used for trapping and separating the microparticles (latex beads). This work further explores the DEP force based on different electrode geometries and medium conductivity. A micromanipulator for latex bead separation was designed, fabricated and characterized. For the development of DEP manipulator, the fabrication and packaging of microfluidic structure with the microelectrode is crucial for reliable analysis. A combination of SU-8 photoresist and polydimethylsiloxane polymer was used for this purpose. Besides, the DEP manipulator, preliminary study on a Coulter counter was conducted. The Coulter counter works on the principle of resistive pulse sensing. This counter is used for counting the beads as they pass through the microfluidic channel. Its possible integration with the manipulator was also explored.

Hydrogen sensors have obtained increased interest with the widened application of hydrogen energy in recent years. Among them, various chemiresistor based hydrogen sensors have been studied due to their relatively simple structure and well-established detection mechanism. The recent progress in micro/nanotechnology has accelerated the development of small-scale chemical sensors. In this work, MEMS (Micro-Electro-Mechanical Systems) sensor platforms with interdigitated electrodes have been designed and fabricated. Integrating indium doped tin dioxide nanoparticles, these hydrogen sensors showed improved sensor characteristics such as sensitivity, response and selectivity at room temperature. Design parameters of interdigitated electrodes have been studied in association with sensor characteristics. It was observed that these parameters (gap between the electrodes, width and length of the fingers, and the number of the fingers) imposed different impacts on the sensor performance. In order to achieve small, robust, low cost and fast hydrogen micro/nano sensors with high sensitivity and selectivity, the modeling and process optimization was performed. The effect of humidity and the influence of the applied voltage were also studied. The sensor could be tuned to have high sensitivity (105), fast response time (10 seconds) and low energy consumption (19 nW). Finally, a portable hydrogen instrument integrated with a micro sensor, display, sound warning system, and measurement circuitry was fabricated based on the calibration data of the sensor.

No description available.

The main objective of the research in this dissertation is to take advantage of unique materials, innovative designs, novel microfabrication techniques, and specialized characterization tools to develop a set of BioMEMS devices and systems further validated with electrical, interface, geometric, and multiphysics models to address unique biological problems emanating from ethical treatment of animals in drug discovery, biological translation, decentralization and personalization of healthcare. This set of devices is designed to interface with multi-sized biological constructs such as 3D cellular networks, viruses, and proteins. The first objective explored a 3D printing-based microfabrication technology to create 2.5D/3D microelectrodes to interface with cellular constructs such as tissues and organoids. Investigations were carried out on how surface roughness and printing parameters play a critical role in the electrical response of the system for in-vitro applications. Three different metallization strategies were investigated and modeled in order to define novel self-insulated 2.5 and 3D microelectrodes. The second objective centered around virus and microparticle detection using a novel combination of microfluidics and Wi-Fi optical detection. Microfluidics were created designing a multilayered system and processing various polymeric materials. The optical system was able to detect and wirelessly transmit information about the presence of viruses including COVID-19 Delta strain and microparticles in the 5 to 10 microns size. The last objective of the dissertation presented the microfabrication of a BioMEMS platform for electrophysiological characterization of Actin protein (smallest entity within the size spectrum). This platform combined interdigitated electrodes, PDMS soft lithography, and impedance and interface modeling to better understand Actin protein dynamics in bundles. This dissertation proposes innovative ideas to the current state of the art for emerging paradigms in the medical technology field involving rapid sensing and manipulating biological entities at various size scales: (proteins, DNA/RNA), (pathogens, virus), and (organoids, spheroids, assembloids).

Cette thèse porte sur la conception et la réalisation de micros capteurs à électrodes interdigitées pour la caractérisation des milieux biologiques dans la gamme de fréquences : 100 kHz - 10 MHz. L'objectif principal de ce travail est l’optimisation géométrique de la structure d’un capteur à électrodes interdigitées afin d’élargir la plage fréquentielle de mesure en réduisant les effets de polarisation. Le premier chapitre synthétise les données fondamentales relatives au comportement électrique des tissus biologiques ainsi que leurs propriétés électriques notamment en basses fréquences. Le deuxième chapitre concerne une approche théorique pour l’optimisation du capteur pour élargir la bande de fréquence utile de mesure ; ce chapitre recommande également une nouvelle méthode pour déterminer les paramètres de la double couche à la surface en contact entre les électrodes et le milieu biologique. Dans le troisième chapitre nous proposons une modélisation tridimensionnelle du système d’électrodes chargé par un modèle du milieu biologique sous le logiciel ConventorWare®. Les résultats de simulation sont discutés. Les résultats obtenus nous permettent d’évaluer l'influence des paramètres géométriques de la structure interdigitée du capteur ainsi que les propriétés diélectriques du milieu sur l’impédance bioélectrique. Les facteurs d’influence en fonction de la fréquence sont ainsi maîtrisés lors de la conception d’u capteur interdigité destiné à la mesure de bioimpédance. Dans le quatrième chapitre, les dispositifs ainsi que la conception et la fabrication des composants développés au cours de cette thèse sont décrits. Dans le dernier chapitre, les mesures expérimentales effectuées avec de très faibles volumes de différentes solutions (solutions étalons, sang humain) par cinq micros capteurs à électrodes interdigitées. Les mesures sur les échantillons ainsi que la validation des théories d’optimisation ont été élaborées et discutées. Enfin nous avons comparé nos résultats à des valeurs publiées dans la littérature et nous avons justifié expérimentalement la théorie d’optimisation développée. / This thesis focuses on the design and realization of interdigitated sensors for the electrical characterization of the biological medium within the frequency range: 100 kHz - 10 MHz. The main objective of this thesis is to optimize the geometry of the sensor structure according to the specificities of the interdigitated electrodes structure. This optimization leads to widen the measurement frequency range by reducing the effects of polarization at low frequency. The first chapter synthesizes the basics and fundamentals relative to the electric behavior of biological tissues as well as to their electric properties. The second chapter concerns a theoretical approach for the optimization of the sensor to widen the useful frequency band of measurement; this chapter also presents a new method to determine the parameters of the double layer at the contact interface between the electrodes and the biological medium. A three-dimensional modelling of the system, the electrodes being loaded with a biological medium, is implemented using ConventorWare® software and the results discussed in the third chapter. The results obtained allow us to evaluate the influence of the geometrical parameters of the interdigitated structure of the sensor as well as the dielectric properties of the medium on the bioelectric impedance. In the fourth chapter, the devices developed during this thesis are described. The design and the manufacturing of components are presented. The last chapter deals with the experimental measurements obtained with very small volumes of the different solutions (standard solutions, human blood) using five micro sensors that we built in the laboratory. The measurements as well as the validation of the theoretical approach are discussed. Finally we have compared our results with published values in the literature and validated our experimental and theoretical approaches developed in this work.

Dans la lutte contre le cancer, la médecine personnalisée est une stratégie nécessaire et très prometteuse. En effet, il est primordial de pouvoir tester l'innocuité et l'efficacité de médicaments anticancéreux sur des échantillons provenant du patient lui-même, du fait de la diversité des réponses entre patients. Le but est d'améliorer la performance des soins et d'éviter des traitements inutiles et même parfois nocifs pour le patient. Ainsi, l'exemple de la chimiothérapie illustre parfaitement cette stratégie. Le cout élevé des molécules thérapeutiques, la nocivité de ces molécules et les réponses variées des patients face à une même molécule implique le recours aux tests de ces molécules sur un échantillon provenant du patient lui-même. Il en résulte un intérêt croissant dans le développement de tests simples, robustes et peu couteux permettant l'évaluation de la chimio sensibilité de cellules biologiques issues d'une biopsie. Les problématiques liées à la mise en place de tels tests sont la quantité de cellules disponibles dans une biopsie, la diversité des molécules thérapeutiques à tester et également le choix d'une technique de détection permettant de suivre la cinétique d'action des molécules sur les cellules biologiques. L'une des réponses à la faible quantité de cellules est le développement de tests dans des environnements microfluidiques qui nécessitent donc l'intégration et la miniaturisation d'une technique de détection. La stratégie qui sera étudiée dans cette thèse est l'utilisation de l'impedancemetrie par le biais d'électrodes inter digitées d'Oxyde d'Etain et d'Indium (ITO) pour l'analyse quantitative de l'état de cellules de cancer du sein pour des applications de criblage de médicaments anticancéreux. Ce matériau présente l'avantage d'être transparent permettant ainsi des mesures d'impédance qui pourrait être couplées à des mesures optiques dans un environnement microfluidique. Dans une première partie, nous avons caractérisé et étudié des électrodes inter digitées d'or et d'ITO pour des mesures d'impédance avec des cellules cancéreuses. Cette caractérisation par spectroscopie d'impédance réalisée dans des solutions de milieu de culture en présence et absence de cellules, ont permis de démontrer que la différence de sensibilité entre ces deux matériaux provenait à la fois d'une différence de comportement résistif mais également d'une différence d'impédance interfaciale, dans les deux cas à la défaveur de l'ITO. Après ce constat, nous avons donc poursuivi l'étude afin d'évaluer les capacités de l'ITO pour des mesures de chimio sensibilité de la molécule 5-fluorouracil et également proposé une stratégie pour améliorer la sensibilité de l'ITO tout en conservant sa transparence. La stratégie développée consiste en la modification de la surface de d'électrodes d'ITO avec de l'oxyde d'iridium pour améliorer la sensibilité de l'ITO, tout en gardant sa transparence. Cette approche est intéressante pour pouvoir concevoir un dispositif transparent et facile à coupler avec un système d'observation microscopique dans un environnement microfluidique / In the fight against cancer, personalized medicine is a necessary and very promising strategy. In fact, it is essential to be able to test the safety and effectiveness of anticancer drugs on samples from the patient, due to the diversity of responses between patients. The aim is to improve the performance of health care and avoid unnecessary and sometimes harmful treatments. Thus, chemotherapy perfectly illustrates this strategy. The high cost of therapeutic molecules, the harmfulness of these molecules and the varied responses of patients involve the use of tests with chemotherapeutic molecules on samples coming from cancer patients. This results in a growing interest in the development of simple, robust and inexpensive tests for assessing the chemo sensitivity of biological cells from a biopsy. The problems related to carrying out such tests are the quantity of cells available in a biopsy, the diversity of the therapeutic molecules to be tested and also the choice of a detection technique, able to monitor the kinetics of action of the molecules on the biological cells. One solution to the small amount of cells is to carry out the tests in microfluidic environments which therefore require the integration and miniaturization of a detection technique. The strategy that will be studied in this thesis is the use of electrical impedance with interdigitated electrodes of indium tin oxide (ITO) for the quantitative analysis of the state of breast cancer cells for screening applications of anticancer drugs. This material has the advantage of being transparent allowing impedance measurements that could be coupled to optical measurements in a microfluidic environment. In the first part, we characterized and studied interdigitated electrodes of gold and ITO for impedance measurements with cancer cells. This impedance spectroscopy characterization carried out in culture medium solutions, in the presence and absence of cells, demonstrated that the difference in sensitivity between these two materials comes from a difference in resistive behavior and also from a difference in interfacial impedance, in both cases to the disadvantage of ITO. After this, we continued the study to evaluate the capabilities of ITO for chemosensitivity measurements using the molecule 5 fluorouracil and we suggested a strategy to improve the sensitivity of ITO while maintaining its transparency. The strategy developed consists of modifying the surface of ITO electrodes with iridium oxide to improve the sensitivity of the ITO, while keeping its transparency. This approach is interesting for developing a transparent device and easy to couple with a microscopic observation system in a microfluidic environment