This dissertation investigates a method for extending the measurement range of an optical surface profiling instrument. The instrument examined in these experiments is a computer-controlled phase-modulated interference microscope. Because of its ability to measure surfaces with a high degree of vertical resolution as well as excellent lateral resolution, this instrument is one of the most favorable candidates for determining the microtopography of optical surfaces. However, the data acquired by the instrument are restricted to a finite lateral and vertical range. To overcome this restriction, the feasibility of a new testing technique is explored. By overlapping a series of collinear profiles the limited field of view of this instrument can be increased and profiles that contain longer surface wavelengths can be examined. This dissertation also presents a method to augment both the vertical and horizontal dynamic range of the surface profiler by combining multiple subapertures and two-wavelength techniques. The theory, algorithms, error sources, and limitations encountered when concatenating a number of profiles are presented. In particular, the effects of accumulated piston and tilt errors on a measurement are explored. Some practical considerations for implementation and integration into an existing system are presented. Experimental findings and results of Monte Carlo simulations are also studied to explain the effects of random noise, lateral position errors, and defocus across the CCD array on measurement results. These results indicate the extent to which the field of view of the profiler may be augmented. A review of current methods of measuring surface topography is included, to provide for a more coherent text, along with a summary of pertinent measurement parameters for surface characterization. This work concludes with recommendations for future work that would make subaperture-testing techniques more reliable for measuring the microsurface structure of a material over an extended region.

Thesis (M.S.)--Worcester Polytechnic Institute. / Keywords: vacuum; shape and deformation measurement; MEMS; vibrometry; scanning white light; Interferometry; thermal; vibration. Includes bibliographical references (136-139 leaves ).

One of the key measurement devices used in characterization of microelectromechanical systems (MEMS) is the interferometric microscope. This device allows remote, noninvasive measurements of the surface shape and deformations of MEMS in full-field-of-view with high spatial resolution and nanometer accuracy in near real-time. As MEMS are becoming more prevalent in the areas of consumer products and national defense, the demand for a versatile and easy to use characterization system is very high. This Thesis describes the design, implementation, and use of an interferometric system that is based on modular components which allow for many loading and measurement capabilities, depending on a specific application. The system has modules for subjecting MEMS to vacuum and dry gas environments, mechanical vibration excitation, thermal loads (both heating and cooling), and electrical loads. Three interferometric measurement modules can be interchanged to spatially measure shape and deformation of micro- and/or meso-scale objects, and temporally measure vibrations of these objects. Representative examples of the measurement and loading capabilities of the system are demonstrated with microcantilevers and a microgyroscope.