Trace amounts of germanium is determined by flame atomic absorption spectrometry by utilizing the vaporization of germanium tetrachloride. Using a continuous flow reactor, sample solution is mixed with concentrated hydrochloric acid and heated to 80&ordm / C to form volatile germanium tetrachloride which can be subsequently sent to N2O-C2H2 flame AAS. The necessary conditions for the volatilization of germanium tetrachloride are investigated in detail and the applicability of the method for the determination of trace amounts of germanium in real samples and standard reference materials are presented. Detection limit of the method, based on 3s, was 0.034 ng mL-1 using a sample of 1 mL. The precision was 0.3 %, expressed as the relative standard deviation for a germanium concentration of 1 ng mL-1. Owing to the high selectivity of the proposed method, no interference effect was observed.