Balun is a key component in radio frequency (RF) circuits. The conventional Si-based planar spiral balun presented a high insertion loss. To solve this problem, this thesis firstly develops a Si-based suspending spiral balun using electrochemical deposition and surface micromachining technology for the fourth generation of wireless communication system. To reduce the power dissipation of the conventional Si-based planar spiral balun, thesis utilized a suspending structure to reduce the power loss through the substrate and dielectric layer. The fabricated suspending spiral balun are constructed by three bottom GSG electrodes, thirty three supporting copper vias and a suspending spiral copper conducting layer. The main fabrication processes in this research including: (1) four thin-film deposition processes, (2) four photolithography processes, (3) two etching processes and (4) two copper electroplating processes. In addition, this thesis used the commercial software (Ansoft HFSS) to analysis the high frequency characteristic of Si-based suspending spiral balun. The finished Si-based suspending spiral balun were measured by a commercial network analyzer under 2~8 GHz testing frequency range. Based on the measurement results, the value of insertion loss is 1.26 dB at 5.2 GHz, magnitude imbalanced is lower than 0.86 dB, phase imbalanced is less than 3.4 degree and CMRR is more than 30 dB. Finally, this thesis successfully develops a Si-based suspending spiral balun using MEMS technology for the fourth generation wireless communication system.

Microwave tunable filters are key components in radar, satellite, wireless, and various dynamic communication systems. Compared to a traditional filter, a tunable filter is able to dynamically pass the required signal and suppress the interference from adjacent channels. In reconfigurable systems, tunable filters are able to adapt to dynamic frequency selection and spectrum access. They can also adapt to bandwidth variations to maximize data transmission, and can minimize interferences from or to other users. Tunable filters can be also used to reduce size and cost in multi-band receivers replacing filter banks. However, the tunable filter often suffers limited application due to its relatively low Q, noticeable return loss degradation, and bandwidth changing during the filter tuning. The research objectives of this thesis are to investigate the feasibility of designing high Q tunable filters based on dielectric resonators (DR) and coaxial resonators. Various structures and tuning methods that yield relatively high unloaded Q tunable filters are explored and developed. Furthermore, the method of designing high Q tunable filters with a constant bandwidth and less degradation during the tuning process has been also investigated. A series of novel structures of dielectric resonators have been proposed to realize in a high Q miniature tunable filters. The first type of TME mode DR filter is designed to be tuned by piezoelectric bending actuators outside the cavity, and has achieved a tuning range from 4.97 to 5.22 GHz and unloaded Q better than 536 over the tuning range. The second type of TME mode tunable filters are integrated with various tuning elements: GaAs varactors, MEMS switches, and MEMS capacitor banks are employed. The designed filter with MEMS switches operates at 4.72 GHz, and has achieved a tuning ratio of 3.5% with Q better than 510 over the tuning range. The designed filter with GaAs varactors operates at 4.92 GHz, and has achieved a tuning ratio of 2% with Q better than 170 over the tuning range. Finally, the designed filter with MEMS capacitor bank operates at 5.11 GHz, delivering a tuning ratio of 3.5% with Q better than 530 over the tuning range. Cavity combline/coaxial resonators are also used in the design of high Q tunable filters. This thesis presents a novel approach to design a tunable cavity combline filter tuned by a MEMS switched capacitor bank. Instead of mechanically moving the tuning disk, the cavity combline filter is tuned with capacitances loading on the tuning disks, which are electrically adjusted by MEMS switched capacitor bank. The assembled 2-pole filter operates at 2.5 GHz with a bandwidth of 22 MHz, a tuning range of 110 MHz and a Q better than 374 over the tuning range. The assembled 6-pole filter operates at 2.6 GHz with a bandwidth of 30 MHz and has a tuning range of 44 MHz. Finally, the design of high Q tunable filter with constant bandwidth is explored. A 4-pole high Q cavity combline tunable filter with constant bandwidth is demonstrated. The tuning has been realized manually and by using a piezoelectric motor respectively. The designed filter operates at 2.45 GHz and has achieved a stable bandwidth of 30 ??1.1 MHz over a tuning range of 400 MHz and an unloaded Q better than 3000. This design method for a constant bandwidth filter is applicable to both cavity combline filters and dielectric resonator filters.

Lors de la prospection sismique, un réseau de capteurs, utilisant principalement des géophones, est déployé à la surface libre afin d'enregistrer les ondes sismiques provenant du sous-sol. Cependant, l'énergie captée par ces géophones est largement dominée par les ondes de surface ou ondes de Rayleigh produites par la source. Étant donné leur nature, ces ondes de surface ne contiennent aucune information sur la composition des couches géologiques profondes. De ce fait, il est nécessaire d'employer un réseau très fin de capteurs dans le but de caractériser précisément ces composantes puis de les filtrer par des techniques de traitement du signal. Toutefois, les coûts engendrés nécessitent de nouvelles méthodes d'acquisition des ondes sismiques, employant moins de capteurs et permettant d'élargir le pas du réseau. Une telle technique a été mise en évidence, moyennant une mesure précise des rotations de la surface libre. La piste explorée dans ce manuscrit est l'utilisation d'un capteur MEMS haute performance pour mesurer les rotations de la surface libre, avec un coût, un poids et une consommation électrique minimaux. Plus particulièrement, le choix s'est porté sur la réalisation d'un accéléromètre angulaire, mesurant la rotation d'entrainement de son référentiel. La conception du capteur MEMS proposé utilise une technique de mesure différentielle de capacités et un contrôle en boucle fermée reposant sur la modulation ΣΔ. Un important travail de modélisation et de simulation a permis la fabrication de plusieurs prototypes qui ont ensuite été caractérisés. Une résolution fondamentale de 3 mrad.s-2 RMS dans une bande de fréquences comprises entre 60 Hz et 200 Hz a ainsi été obtenue. Les performances mesurées surpassent de loin celles d'autres accéléromètres angulaires de la littérature. Finalement, des analyses comparatives avec d'autres instruments de mesure ont permis de conclure sur la faisabilité de notre solution pour la prospection sismique. / In seismic exploration, most of the signal acquired by point-receiver geophones is dominated by surface waves or ground rolls. Because they propagate in the near surface, ground rolls do not contain any information on deeper targets. Thus, short spacing between receivers is required so that this noise component can be accurately characterized and removed by digital filtering. However, considering the cost of seismic exploration ventures, new acquisition techniques using fewer point receivers and larger spacing have to be developed. Such a technique is briefly introduced in this dissertation, requiring accurate measurements of ground rotations at the free surface with minimum cost, weight and power consumption. To address this need, the thesis proposes a high-performance rotation sensor based on MEMS technology. Unlike vibrating gyroscopes, sensitive to rotation rates through Coriolis effect, the solution developed is an angular accelerometer designed for differential capacitance measurements. A feedback controller is also implemented utilizing an oversampled ΣΔ -modulator to increase dynamic performances of the system. Thorough analytical designs along with simulations are challenged by fabricated prototypes measurements to achieve a high-sensitivity, high-resolution device. An experimental resolution of 3 mrad.s-2 RMS in the frequency band 60 Hz - 200 Hz is then obtained, which is far better than other micromachined angular accelerometers from literature. Moreover, comparison analyses are performed with specific instruments used for rotational seismology to conclude on the feasibility of a MEMS-based rotation sensor for seismic exploration.

This thesis devotes to develop a wafer-level packaging technique of the planar AgCl-based micro reference electrode and to investigate its various electrochemical characteristics (including the potential stability and offset voltage, AC impedance, cyclic-voltammetry analysis, electrochemical noise and reproducibility). The miniaturized all-solid-state reference electrode can integrated with many biomedical or biochemical sensors for substantially reduce the dimension of the whole sensing system and improve the commercial capability of portable detecting products. This study reports firstly a smallest module of the micro reference electrode with dimension only about 9 mm (L) ¡Ñ 6 mm (W) ¡Ñ 1 mm (H) in the worldwide using the silicon bulk-micromachining technology, thin film deposition and chloridation techniques. The packaged reference electrode module is constructed by two bonded wafers with different functions. One wafer of this module is defined as ¡§electrode chip¡¨ and it has a Ti/Pd/Ag/AgCl planar quasi-reference electrode deposited on its surface. Another wafer is called as ¡§packaging chip¡¨ and it has two bulk-micromachined silicon cavities for the filling/sealing of 1.33 ~ 6.40 £gL KCl-gel (as the salt-bridge of electrode) and electrical connection. Many electrochemical characteristics of the encapsulated solid-state micro reference electrode are tested and improved for the commercial applications. Including a very stable cell potential (<4 mV in 30000 sec.), an approximately zero offset-voltage, a low AC impedance (1~20 K£[), and high reproducibility (drift less than 3~8 mV in 30000 sec. and the range of offset voltage is -6 ~ 3 mV) of the packaged micro reference electrode are demonstrated. Furthermore, stable CV curve of the packaged Ti/Pd/Ag/AgCl/KCl-gel reference electrode were proved by cyclic-voltammetry analysis and its low electrochemical noise spectrum was investigated and discussed in this work. Compared with the commercial reference electrode, the planar miniaturized AgCl reference electrode module developed in this thesis has displayed its many excellent characteristics and with a dimension only 250 times smaller than the conventional reference electrode.

This thesis presents the design, fabrication and characterization of high performance and high fill factor surface micromachined uncooled infrared resistive microbolometer detectors which can be used in large format focal plane arrays (FPAs). The detector pixels, which have a pixel pitch of 25 &mu / m, are designed and fabricated as two-level structures using the enhanced sandwich type resistor while the active material is selected as Yttrium Barium Copper Oxide (YBCO). First level of the pixel structure is allocated for the formation of the support arms in order to obtain longer support arms hence lower thermal conductance values to get the desired high performance levels. The pixel body is built in the second level such that the fill factor and absorption of the detector is maximized. Structural and sacrificial layer thicknesses are also optimized in order to increase the absorption coefficient of the pixel in the 8-12 &mu / m wavelength range. The thermal simulations are conducted using finite element method (FEM) by CoventorWare software. The designed pixel has a fill factor of 92 % together with the thermal conductance and thermal time constant values calculated as 16.8 nW/K and 19.3 ms in the simulations, respectively. The pixels are fabricated at METU MEMS facilities after the design of a CMOS compatible process flow. All process steps are optimized individually to obtain the expected high performance. Characterization step of the pixels includes the measurements of temperature coefficient of resistance (TCR), noise and thermal conductance value together with the thermal time constant. Effective TCR of the pixel is measured as -2.81 %/K for a pixel with a support arm resistance of 8 k&Omega / and total resistance of 55 k&Omega / . The corner frequency of 1/f noise in the pixel is 9.5 kHz and 1.4 kHz under 20 &mu / A and 10 &mu / A current bias, respectively. The total rms noise is 192 pA within 8.4 kHz bandwidth for a current bias of 20 &mu / A. Thermal conductance, Gth, of the pixel is measured as 17.4 nW/K with a time constant of 17.5 ms. The measurement results indicate that the single pixels designed and fabricated in the scope of this thesis are applicable to large format FPAs in order to obtain a high performance imager. The expected NETD values are 33 mK and 36 mK for 384x288 and 640x480 format FPAs, respectively.