There is strong interest in the use of small low-cost highly sensitive magnetic field sensors for applications (such as small memory and biomedical devices) requiring weak field measurements. Among weak-field sensors, the magneto-impedance (MI) sensor has demonstrated an absolute resolution on the order of 10-11 T. The MI effect is a sensitive realignment of a periodic magnetization in response to an external magnetic field within small ferromagnetic structures. However, design of MI sensors has relied primarily on trial and error experimental methods along with decoupled models that separate the micromagnetic and classical electromagnetic equations describing the MI effect. To offer a basis for more cost-effective designs, this thesis research presentation begins with a general formulation describing MI sensors, which relaxes assumptions commonly made leading to decoupling. The coupled set of nonlinear equations is solved numerically using an efficient meshless method in a point collocation formulation. For the problem considered, the chosen method is shown to offer advantages over alternative methods including the finite element method. In the case of time, projection methods are used to stabilize the time discretization algorithm while quasi-Newton methods (nonlinear solver) are shown to be more computationally efficient, as well. Specifically, solutions for two MI sensor element geometries are presented, which were validated against published experimental data. While the examples illustrated here are for MI sensors, the approach presented can also be extended to other weak-field sensors like fluxgate and Hall effect sensors.

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In this thesis, we have performed systematical study of the complex impedance spectra(CIS) with the manganeses oxide thin films by the equivalent circuit model(ECM) composed of resistance and capacitance. The ECM has been utilized in analog of the electrical and dielectric properties of the granular films. The purpose of this research is to understand how the electrical- and magneto-transport properties in La0.67Ca0.33MnO3(LCMO),La0.8Ba0.2MnO3(LBMO),La0.67Sr0.33MnO3(LSMO(113)) and La0.67Sr1.33MnO4 (LSMO(214)) thin films, at various magnetic fields and temperatures. First of all, we demonstrate that the LSMO(214) and LSMO(113) can be sensitively affected by magnetic states on the manganite films. Our result provides further understanding of the dielectrics variation during the phase transition from an AFM insulating phase and/or a ferromagnetic metallic phase to a paramagnetic PM metallic phase. It is known that the strong correlation between the itinerant carriers and the local magnetic moments is the mechanism for FM/PM phase transition for LSMO(113), while the direct magnetic exchange coupling governed the AFM/PM phase transition and an indirect coupling to the status of intrinsic carriers for LSMO(214) films. These transitions can not be concludes directly by using a dc resistance measurement but can be clearly distinguished by the CIS measurement. On the other hand, the dc resistance (Rdc) and the relaxation time(£n) have the same tendency that this indicates the changes of £n matches to the electric transport properties for LCMO_90min and LSMO(214) thin films. We focus on the the dielectric properties of both samples are insensitive to temperature, revealing that the dielectric behavior is independent of magnetic phase transition but strongly associated with the transport properties. Therefore, the magnetic transitions can be most thoroughly investigated by combining CIS measurements and RC ECM, as well as by making dc resistance measurements. Moreover, the relative change of M£q(ac) is nearly larger than the dc resistive variation. This phenomenon, called giant magneto-impedance effect (GMI), implies that thehigh-frequency magnetotransport effect may enhance the performance of these manganese oxides for sensing the magnetic field. The CMI, have been analyzed by ECM, including two sets of parallel R and capacitance (C) components in series. The analyzing results the specific feature of grain boundaries(GBs) can be attributed to the interplay of magnetic moment spin disorder to ordering. The grain boundary (GB) effect can enhance low field magnetoresitance (LFMR) for artificial GBs, but shows very limited enhancement for those GBs in epitaxial films. This study finds that artificial GBs, which exhibit large LFMR, can be modeled as a non-conductive layer which disconnects the lattice periodicity of adjacent grains and contains no magnetic ions. The GBs in the present fully strained epitaxial film, which shows a relatively smaller LFMR, are more similar to a semi-continuous grain with continuous distribution of magnetic ions that align loosely parallel to the grain magnetic moment. In addition, we report in this study the high frequency magneto-transport properties, based on the classical model, of La0.8Ba0.2MnO3 and La0.67Ca0.33MnO3 thin films around their ferromagnetic transitions and under an external magnetic field. It is found that the specific features of magneto-impedance can be correlated with the complex magnetization response and the dielectric relaxation in corresponding phase states. The fast dielectric relaxation time, £nE, and the slow magnetic response, £nH, reflect the interplay of itinerant carriers and the magnetic coupling to the ac electromagnetic wave, indicating that the double exchange, or hopping, of carriers between O 2P and Mn 3d-eg states occur prior to the indirect magnetic coupling of adjacent Mn ions via strong Hunt¡¦s rules. Applied magnetic field enhances both electric and magnetic dipoles are now responding faster to the electromagnetic wave. The results of our work may provide a fundamental understanding of high frequency magnetic and electrical properties of the manganite films, and imply tips for device application of the films.

Recently, the giant magneto impedance (GMI) effect has been studied extensively because of its potential applications in sensor elements. The focus of this thesis work is to explore different compositions and processing conditions for CoSiB and NiFe thin films to obtain the soft magnetic properties and to evaluate their potential use in GMI sensor applications. Prior to this study, an MH Looper was constructed, which was extremely important and provided the basic magnetic characterization of the many ferromagnetic thin films deposited during this work. The CoSiB films were co-sputter deposited in an ultra high vacuum chamber. Films with different relative compositions of Co, Si and B were deposited by varying respective target powers. Different substrate bias conditions were also studied. Also, NiFe films were studied by varying relative composition by variation of target powers and also by variation deposition pressure. The effect of annealing was also studied. The magnetic and electrical characterization of these films was done using the MH Looper, Quad-pro four-point probe resistivity measurement, and Low Frequency Impedance analyzer HP4192A. Finally, CoSiB films with soft magnetic properties were obtained with optimized set of deposition parameters. A sample for GMI measurement was prepared, consisting of a multilayer thin film structure: CoSiB 200nm/ Cu 400nm / CoSiB 200nm. A serpentine pattern was generated on this film by photolithography technique. After obtaining the pattern, GMI studies were performed using LF impedance analyzer. This instrument was capable of providing the drive frequency in the range of 5Hz to 13MHz, but the impedance mis-match of the test fixture limited useful measurements to 9MHz. The highest GMI ratio observed was 6.2% at a 21 Oe longitudinal magnetic bias field at an 8MHz drive frequency. Transverse permeability measurements were performed by the use of two magnetic field axes of the MH Looper. The permeability behavior of the device reflects the impedance behavior with the external field. Permeability measurements were also performed on NiFe GMI Device with NiFe 600nm/ Cu 1200nm / NiFe 600nm sandwich structure. This sample was not successfully patterned and hence the impedance measurements could not be performed. Correlation of the magnetic properties of the structures was studied with the impedance responses.

La Magnéto-Impédance Géante (GMI pour Giant Magneto-Impedance) présente un certain nombre d’avantages, tels la haute sensibilité, la haute résolution de détection, la large bande passante et la flexibilité de l’élément sensible qui rendent cette technologie très prometteuse pour la réalisation de capteurs de courant flexibles, sans contact, capables de mesurer à la fois les courants continus (DC) et alternatifs (AC).Ce travail de thèse vise à explorer la faisabilité d’un capteur de courant flexible à base de GMI, en portant une attention particulière sur l’impact des paramètres d’influence qui conditionnent largement les solutions de mise en œuvre du capteur.Les effets de la température et des contraintes mécaniques de flexion et de torsion, qui s’appliquent dans un environnement de mesure réel, sont caractérisés en prenant en compte les grandeurs intrinsèques du fil nécessaires à la réalisation d’un capteur industriel. L’impact de la mise en œuvre et du conditionnement électronique vis-à-vis de ces grandeurs d’influence est aussi étudié. Les effets des perturbations magnétiques externes et de l’excentration du conducteur sous test dans la boucle de mesure sont quantifiés et une solution de blindage est proposée. Enfin, le prototype de capteur obtenu à l’issue de ces travaux est présenté, ainsi que ses performances, en dégageant les pistes d’optimisation et d’amélioration. / The GMI effect displays several advantages, such as high sensitivity, high detection resolution and bandwidth, and mechanical flexibility. These advantages predispose this technology to the implementation of flexible contactless current sensors measuring both DC and AC currents.This thesis work aims at exploring the feasibility of a flexible GMI current sensor. A particular attention to the impact of influence parameters which largely condition the design solutions of the sensor has been paid.The effects of temperature and mechanical constraints such as bending and torsion, which apply in a real measuring environment, are characterized by taking into account the intrinsic features which are necessary to the design of the sensor. The impact of the general measuring configuration and electronics are also studied. The effects of magnetic disturbances and of the position of the current-carrying conductor in the measuring loop are quantified and an adequate shielding method is proposed. Finally, the sensor prototype obtained at the end of this work is described with its performances and the possible optimization and enhancement ways.

Le potentiel de la GMI a été exploré pour la réalisation d'un capteur magnétique de mesure du courant électrique. Une partie notable de ce projet a été consacrée à l'investigation de l'électronique de conditionnement du capteur, notamment, l'électronique d'excitation de l'élément sensible et l'électronique de détection de la variation de la tension à ces bornes. Une nouvelle solution d'oscillateur numérique précis, stable et de haute fréquence a été proposée. Un convertisseur tension-courant basé sur la source de Howland a été associé à cet oscillateur. Pour la détection, des technologies innovantes et prometteuses, tel que le détecteur RMS-DC pour les mesures précises, ont été proposées. Un conditionnement électronique permet d'utiliser ce détecteur pour la démodulation des signaux alternatifs. Une approche originale de détecteur d'amplitude sans seuil utilisant un amplificateur limiteur a été développée. Ces technologies ont été intégrées avec succès dans un capteur de courant électrique. / A GMI current sensor was designed. This study was devoted to the investigation of the electronic conditioning of the sensor. An accurate, stable and high frequency digital oscillator was developed. A voltage-to-current converter based on the Howland source was associated to this oscillator. An innovative and promising technology for precise measurements was proposed: the RMS-DC detector. This detector was conditioned for demodulating AC signals. Also an original approach of an amplitude detector using a limiting amplifier was developed. These technologies have been successfully integrated into a GMI current sensor.

La capacité à détecter des micro-défauts ou des défauts profonds dans les pièces métalliques constitue un enjeu important pour l'industrie de l'aéronautique ou du nucléaire. La technique de contrôle non destructif (CND) par courant de Foucault est souvent utilisée pour cette application. Cette thèse s’inscrit dans le cadre d'une collaboration ayant pour but la réalisation et l'intégration de micro-capteurs de champ magnétique basés sur l’effet de magnéto-impédance (MI) à des systèmes de détection par CND. Ces micro-capteurs de structure multicouche (ferromagnétique/conducteur/ferromagnétique) ont été élaborés en salle blanche par dépôt de films minces. Un traitement thermique sous champ magnétique a ensuite permis d’optimiser les propriétés du matériau et d’induire des anisotropies dans le plan des couches ferromagnétiques. Une méthode basée sur la double démodulation d’amplitude du signal de mesure a été proposée pour la caractérisation dynamique des capteurs. Les paramètres importants tel que la géométrie, l’anisotropie et la fréquence d’excitation ont été étudiés afin d’optimiser les caractéristiques. Les résultats ont montré la nécessité de polariser les capteurs en champ. Nous avons donc étudié la possibilité de réaliser, grâce à une technique de micromoulage épais, un microsolénoïde 3D et des travaux préliminaires sur l’intégration d'un capteur dans le microsolénoïde par transfert de film ont été effectués. Enfin, une étude théorique a été réalisée en tenant compte des résultats obtenus expérimentalement. Pour cela, le modèle de Landau-Lifshitz-Gilbert (LLG) a été implanté dans un code de calcul électromagnétique par éléments finis permettant de calculer l’impédance du capteur en fonction du champ magnétique appliqué. / The capability to detect micro-defects or buried flaws in the metallic parts is an important issue for the aerospace or nuclear industry. The technique of nondestructive testing (NDT) by eddy current is widely used for these applications. This thesis is part of collaboration project aimed at the realization and integration of magnetic field microsensors based on the magneto-impedance (MI) effect for the NDT detection systems. These multilayered structure microsensors (ferromagnetic/conductor/ferromagnetic) were realized in the clean room by thin film deposition method. A post-annealing step with magnetic field was then used to optimize the material properties and to induce magnetic anisotropy in the ferromagnetic layers. A method based on the double amplitude demodulation was proposed for the dynamic characterization of the sensors. The important parameters such as the geometry, the anisotropy and the driven frequency were studied in order to optimize the characteristics. The results showed that a bias field is necessary for the application. Therefore, we have investigated the possibility to realize, through thick micromoulding technique, a 3D microsolenoid and preliminary work on integrating a sensor in the microsolenoid by film transfer has been carried out. Finally, a theoretical study was investigated by taking into account the results obtained experimentally. For this purpose, the model of Landau-Lifshitz-Gilbert (LLG) has been implemented in an electromagnetic finite element calculation program in order to determine the impedance of the sensor as a function of the applied magnetic field.

La Magneto-Impédance Géante (GMI) consiste en une forte variation de l’impédance d’un matériau ferromagnétique doux parcouru par un courant d’excitation alternatif haute fréquence lorsqu’il est soumis à un champ magnétique extérieur. Ce travail de thèse introduit de nouvelles techniques numériques et les pistes d’optimisation associées pour les capteurs GMI à haute sensibilité. L'originalité réside dans l'intégration d'un synthétiseur de fréquence et d'un récepteur entièrement numérique pilotés par un processeur de traitement de signal. Ce choix instrumental se justifie par le souhait de réduire le bruit de l’électronique de conditionnement qui limite le niveau de bruit équivalent en champ. Ce dernier caractérise le plus petit champ mesurable par le capteur. Le système de conditionnement conçu est associé à la configuration magnétique off-diagonal pour accroître la sensibilité intrinsèque de l’élément sensible. Cette configuration magnétique consiste en l’utilisation d’une bobine de détection autour du matériau ferromagnétique. Cette association permet en outre d’obtenir une caractéristique impaire de la réponse du capteur autour du champ nul, et par conséquent de pouvoir mettre en œuvre et d’utiliser le capteur sans avoir recours à une polarisation magnétique. Ce choix permet ainsi d’éliminer, ou au moins de minimiser les problématiques liées aux offsets des dispositifs GMI, tout en validant l’intérêt de cette configuration magnétique, notamment sur le choix du point de fonctionnement. Une modélisation des performances en bruit de toute la chaîne de mesure, incluant le système de conditionnement numérique, est réalisée. Une comparaison entre les niveaux de bruit équivalent en champ attendus par le modèle et mesurés est effectuée. Les résultats obtenus ont permis de dégager des lois générales d’optimisation des performances pour un capteur GMI numérique. Partant de ces pistes d’optimisation, un prototype de capteur complet et optimisé a été implémenté sur FPGA. Ce capteur affiche un niveau de bruit équivalent en champ de l’ordre de 1 pT/√Hz en zone de bruit blanc. En outre, ce travail permet de valider l’intérêt des techniques numériques dans la réalisation de dispositifs de mesure à haute sensibilité. / The Giant Magneto-Impedance (GMI) is a large change of the impedance of some soft ferromagnetic materials, supplied by an alternating high-frequency excitation current, when they are submitted to an external magnetic field. This thesis presents the design and performance of an original digital architecture for high-sensitivity GMI sensors. The core of the design is a Digital Signal Processor (DSP) which controls two other key elements: a Direct Digital Synthesizer (DDS) and a Software Defined Radio (SDR) or digital receiver. The choice of these digital concepts is justified by the will to reduce the conditioning electronics noise that limits the equivalent magnetic noise level. The latter characterizes the smallest measurable field by the sensor. The developed conditioning system is associated with the off-diagonal magnetic configuration in order to increase the intrinsic sensitivity of the sensitive element. This magnetic configuration consists of the use of an additional a pick-up coil wound around the ferromagnetic material. This association also makes it possible to obtain an asymmetrical characteristic (odd function) of the sensor response near the zero-field point and to consequently allow for sensor implementation and use without any bias magnetic field. Thus, this choice eliminates, or at least minimizes, the problems related to the offset cancelling of the GMI devices. Also, it validates the advantage of this magnetic configuration, especially the choice of the operating point. Modeling of the noise performance of the entire measurement chain, including the digital conditioning, is performed. A comparison between the expected and measured equivalent magnetic noise levels is then carried out. The results yield general optimization laws for a digital GMI sensor. Using these laws, an optimized prototype of a GMI sensor is designed and implemented on FPGA. An equivalent magnetic noise level in a white noise zone region of approximately 1 pT/√ Hz is obtained. Furthermore, this work also makes it possible to validate the interest of digital techniques in the realization of a high-sensitivity measuring devices.