In this work, the opto-piezo actuation and piezoelectric actuation in gallium arsenide (GaAs) is experimentally and theoretically verified. Experimentally the response of the respective actuations are measured using the current generated from the inverse piezoelectric effect. The mechanical structure used to generate this current is a micron size torsional resonator fabricated from a GaAs photodiode heterostructure. The photodiode heterostructure is optically and electrically designed as a photovoltaic (PV) cell while mechanically the structure resembles a bimorph. The bimorph design is a result of the PV cell consisting of a pn junction and a heterojunction where the depletion regions have the additional property of being piezoelectric. The opto-piezo actuation results from using the photogenerated voltage to piezoelectrically drive a mechanical structure. Using light modulated at the resonance frequency of the torsional resonator the measured current is shown to linearly increase with intensity. For the electrical actuation case, the torsional resonator is driven using the non- linear response of the pn junction to an applied voltage. The non-linear response results in generation of voltage at the harmonic frequencies of the applied voltage. The voltage generated at twice the applied frequency is given the label 2f and is used to piezoelectrically drive the mechanical structure. The above results for the two methods of actuation are theoretically validated by deriving a model for the expected current. The model predicts the current as a function of the voltage. For the opto-piezo case this voltage is the photovoltage. The photovoltage is determined using the AC PV model. This model is derived using the DC PV model and predicts the AC operation of a photodiode in the 3rd and 4th quadrants to resistive and reactive loads. Using the opto-mechanical coupling coefficient the efficiency of the opto-piezo actuation is compared to opto-thermal actuation and radiation pressure actuation. It is shown that the opto-piezo effect, in general, is several orders of magnitude better than the other two in converting optical energy into mechanical energy. This is an important result because in situations where low optical powers are only available and power, in general, cannot be spared, for e.g. on a satellite, devices that make use of the opto-piezo effect could be used for either actuation or sensing. Generally however, using the opto-piezo effect can lead to either integration of existing photonic devices with mechanical resonators or new photonic devices all together. For e.g. using the opto-piezo effect an adaptable optical correlator can be made which could be used to make artificial intelligent machines. / Thesis / Doctor of Philosophy (PhD)

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京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第18585号 / 工博第3946号 / 新制||工||1606(附属図書館) / 31485 / 京都大学大学院工学研究科機械理工学専攻 / (主査)教授 西脇 眞二, 教授 田畑 修, 教授 松原 厚 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM

La spectrométrie photoacoustique QEPAS constitue l’une des méthodes les plussensibles pour la détection de gaz à l’état de traces. Ses performances sont étroitement liées àcelles de sa source de lumière infrarouge cohérente et de son résonateur mécanique qui détecteles ondes acoustiques. La thèse a pour objectif de développer ces deux briques élémentaires.Dans un premier temps, les performances des résonateurs mécaniques sont modélisées, permettantde mieux comprendre leur comportement. Une formule analytique originale de leurfacteur de qualité y est incorporée, permettant de prédire avec précision les pertes qu’ils subissentlorsqu’ils résonnent dans un gaz. Grâce à ces modèles, de nouveaux résonateurs optimiséssont conçus et réalisés, aboutissant à des performances améliorées. Dans un secondtemps, les sources cohérentes infrarouges QCL et OPO sont améliorées pour la photoacoustique.L’impulsion de pompe optimale pour un OPO est présentée pour distribuer au mieuxl’énergie de pompe disponible dans le temps, et ainsi maximiser le rendement de rayonnementinfrarouge disponible. Un logiciel de simulation numérique original des OPOs est égalementcréé, et permet de simuler rapidement le spectre d’émission d’un OPO quelconque. / Infrared photoacoustic spectrometry QEPAS is one of the most sensitive techniquefor trace gas sensing. The goal of the thesis is to improve the two key elements of the instrument: the mechanical resonator and the coherent infrared light source.First, the use of resonators as an acoustic waves sensor is investigated, allowing to better understandtheir behavior. Our modeling include a new analytical formula of their quality factor,predicting the amount of losses they experience when immersed within a gaz. The models areused to design and fabricate new custom resonators, leading to enhanced performances. Second,two infrared sources named QCL and OPO are optimized for the photoacoustic application.The optimal pump pulse for an OPO is derived to efficiently distribute the available pumpenergy in time, hence maximizing the yield of infrared light. A simulation software has alsobeen created for OPOs, able to quickly predict the spectrum of any type of OPO.