by Man Wah-Kit. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1996. / Includes bibliographical references (leaves 177-180). / LIST OF FIGURES / LIST OF TABLES / abstract --- p.1 / Chapter 1. --- introduction --- p.3 / Chapter 2. --- fabrication process / Chapter 2-1 --- INTRODUCTION --- p.7 / Chapter 2-2 --- PROCESS DEVELOPMENT --- p.8 / Chapter 2-3 --- FABRICATION PROCEDURES FOR TIN FILMS --- p.10 / Chapter 2-4 --- FABRICATION PROCEDURES FOR TIN OXIDE FILMS --- p.14 / Chapter 2-5 --- FABRICATION THEORY --- p.21 / Chapter 2-6 --- OXYGEN ION IMPLANTATION OF TIN FILMS --- p.24 / Chapter 3. --- structural characterization / Chapter 3-1 --- INTRODUCTION --- p.30 / Chapter 3-2 --- MICROSTRUCTURE / Chapter 3-2-1 --- SOME RELATED THEORIES OF GRAIN GROWTH / Chapter (1) --- Classical Theory of Grain Growth --- p.30 / Chapter (2) --- Hillock Growth --- p.31 / Chapter (3) --- Dislocation Creep Theory --- p.33 / Chapter (4) --- Biaxial Stress in Thin Films --- p.35 / Chapter (5) --- Surface Cluster Growth --- p.37 / Chapter 3-3 --- EXPERIMENTATION AND RESULTS / Chapter 3-3-1 --- MICROSTRUCTURAL ANALYSIS UNDER OPTICAL MICROSCOPE --- p.39 / Chapter 3-3-2 --- THE STRESS AND HILLOCK HEIGHT ANALYSIS OF TIN OXIDE FILMS --- p.48 / Chapter 3-3-3 --- MICROSTRUCTURAL ANALYSIS BY MEANS OF ATOMIC FORCE MICROSCOPE (AFM) --- p.52 / Chapter 3-3-4 --- MICROSTRUCTURAL ANALYSIS BY X-RAY DIFFRACTION --- p.69 / Chapter 3-3-5 --- SURFACE ANALYSIS BY MEANS OF X-RAY PHOTOELECTRON SPECTROSCOPY / Chapter (1) --- Introduction --- p.73 / Chapter (2) --- Basic Theory --- p.73 / Chapter (3) --- Experimentation And Results --- p.75 / Chapter 3-3-6 --- SURFACE STUDY OF ION IMPLANTED TIN OXIDE FILMS / Chapter (1) --- Experimental Results --- p.82 / Chapter 3-4 --- DISCUSSION / Chapter 3-4-1 --- QUALITATIVE ANALYSIS OF MICROSTRUCTURE WITH THE OPTICAL MICROSCOPE --- p.88 / Chapter 3-4-2 --- QUALITATIVE ANALYSIS OF MICROSTRUCTURE WITH SEM AND AFM / Chapter (1) --- Grain Growth of Tin Oxide Films --- p.89 / Chapter (2) --- Dependence of Grain Size on Deposition Rate --- p.91 / Chapter (3) --- Dependence of Grain Size on Film Thickness --- p.92 / Chapter (4) --- Dependence of Grain Size on Substrate Temperature --- p.92 / Chapter (5) --- Origin of Hillock Growth of Tin Oxide Films --- p.93 / Chapter 3-4-3 --- FILM COMPOSITIONAL ANALYSIS WITH X-RAY DIFFRACTION --- p.95 / Chapter 3-4-4 --- SURFACE ANALYSIS WITH X-RAY PHOTOELECTRON SPECTROSCOPY …… --- p.95 / Chapter 3-4-5 --- SURFACE ANALYSIS OF OXYGEN IMPLANTED TIN FILMS --- p.96 / Chapter 4. --- OPTICAL CHARACTERIZATION / Chapter 4-1 --- INTRODUCTION --- p.98 / Chapter 4-2 --- THEORY / Chapter (1) --- Free Electron Model --- p.99 / Chapter (2) --- Effect of Film Thickness --- p.100 / Chapter (3) --- Effect of Oxygen Contents --- p.101 / Chapter (4) --- Electron-Lattice Interaction and Bandgap Studies --- p.102 / Chapter 4-3 --- EXPERIMENTATION AND RESULTS --- p.105 / Chapter 4-4 --- DISCUSSION / Chapter 4-4-1 --- BANDGAP STUDIES FOR TIN OXIDE FILMS WITH DIFFERENT DEPOSITION CONDITIONS / Chapter (1) --- Variation of Film Thickness --- p.122 / Chapter (2) --- Film Appearance --- p.123 / Chapter (3) --- Variation of Substrate Temperature --- p.123 / Chapter (4) --- Variation of Oxidation Conditions --- p.123 / Chapter 5. --- ELECTRICAL CHARACTERIZATION / Chapter 5-1 --- INTRODUCTION --- p.126 / Chapter 5-2 --- RELATED THEORY / Chapter 5-2-1 --- CURRENT-VOLTAGE (I-V) CHARACTERISTICS --- p.127 / Chapter 5-2-2 --- CAPACITANCE-VOLTAGE (C-V) CHARACTERISTICS --- p.131 / Chapter 5-2-3 --- RELATION OF ELECTRICAL TO STRUCTURAL PROPERTIES / Chapter (A) --- Effects of Deposition Conditions --- p.133 / Chapter (B) --- Effects of Grain Boundaries --- p.133 / Chapter (C) --- Effects of Ionic Impurities --- p.134 / Chapter (D) --- Effects of The Interface Properties --- p.134 / Chapter 5-2-4 --- MEASURING TECHNIQUES / Chapter (A) --- I-V Measurment of Tin Oxide on a Silicon Substrate --- p.136 / Chapter (B) --- C-V Measurement of Tin Oxide Films on Silicon Substrates --- p.137 / Chapter (C) --- Electrical Measurement of Tin Oxide Films on a Quartz Substrate --- p.137 / Chapter 5-3 --- EXPERIMENTATION --- p.138 / Chapter 5-4 --- RESULTS --- p.141 / Chapter 5-5 --- DISCUSSION / Chapter 5-5-1 --- Analysis of the Conduction Mechanism for Sn02/Si n-p Heterojunctions --- p.161 / Chapter 5-5-2 --- Analysis of the Conduction Mechanism for Sn02/Si n-n Heterojunctions --- p.162 / Chapter 5-5-3 --- Effect on the Conduction Mechanisms of Film Thickness --- p.164 / Chapter 5-5-4 --- Effect on the Conduction Mechanisms of Oxidation Time --- p.166 / Chapter 5-5-5 --- Interfacial Properties of SnOx/Si Heterojunctions --- p.166 / Chapter 5-5-6 --- Electrical Properties of SnOx Films on Quartz / Chapter (1) --- Dependence of Film Conductivity on Measuring Temperatures --- p.168 / Chapter (2) --- Dependence of Film Conductivity on Oxidation Time --- p.168 / Chapter (3) --- Dependence of Film Conductivity on Oxidation Temperature --- p.169 / Chapter (4) --- Invariance of Film Conductivity at Some Certain Measuring Temperatures --- p.170 / Chapter (5) --- Activation Energy of Sn02 Films on Quartz --- p.170 / Chapter 6. --- CONCLUSIONS --- p.172 / Chapter 7. --- FUTURE WORKS --- p.175 / Chapter 8. --- REFERENCES --- p.177 / Chapter 9. --- APPENDICES / Chapter 9-1 --- APPENDIX A List of photos --- p.181 / Chapter 9-2 --- APPENDIX B (1) ED AX results for some selected regions on samples with hillocks --- p.182 / Chapter (2) --- Relations between mean surface roughness and oxidation conditions --- p.185 / Chapter (3) --- XPS original data and typical XPS spectra for vacuum- evaporated SnO2 thin film --- p.186 / Chapter 9-3 --- "APPENDIX C Variations of optical parameters, refractive index n and extinction coefficient k in visible region with different oxidation conditions" --- p.189 / Chapter 9-4 --- APPENDIX D Electrical results for Sn02/Si heterojunction s --- p.191 / Chapter 9-5 --- APPENDIX E Calculations of band diagram for Sn02/Si heterojunctions --- p.194 / Chapter 9-6 --- APPENDIX F Resistivity versus impurity concentration for silicon at 300K --- p.196