Since the proliferation of CAD tools, visualizations have gained importance.. They provide invaluable visual feedback at the time of design, regardless whether it is fbi civil engineering or electronic circuit design-layout. Typically dynamic visualizations are produced in a two phase process: the calculation of positions and rendering of the image and its presentation as an animated video clip. This is a slow process that is unsuitable fbr interactive CAD visualizations, because the former two require finite element analysis Faster hardware eases the problem, but does not overcome it, because the algorithms are still too slow. Our MEMS CAD project works towards methods and techniques that are suitable for interactive design, with faster methods. The purpose of this PhD thesis is to contribute to the design of an interactive virtual prototyping of Micro Electro Mechanical Systems (MEMS) This research comprises the analysis of the visualization techniques that are appropriate for these tasks and identifying the difficulties that need to be overcome to be able to offer a MEMS design engineer a meaningful and interactive CAD design environment Such a VR-CAD system is being built in our research group with many participants in the team. Two particular problems are being addressed by presenting algorithms for truthful VR visualization methods: one is for displaying objects that are different in size on the computer screen. The other is modelling unsynchronized motion dynamics, that is different objects moving simultaneously at very high and vety low speed, by proposing stroboscopic simulation to present their dynamics on the screen They require specific size scaling and time scaling and filtering. It is these issues and challenges which make the design of a MEMS CAD tool different from other CAD tools. In the thesis I present algorithms for displaying animated virtual reality for MEMS virtual prototyping in a physically truthful way by using the simulated stroboscopic illumination to filter animated images to make it possible to show unsynchronized motion.. A scaling method was used to show or hide objects which cannot be shown simultaneously on the computer screen because of their large difference in size. The visualization of objects being designed and their animations is done with much consideration of visual perception and computer capability, which is rising attention, but not too often mentioned in the visualization domain.

This thesis presents the optimization of deep reactive ion etching process (DRIE) to achieve high precision 3-dimensional integrated micro electro mechanical systems (MEMS) sensors with high aspect ratio structures. Two optimization processes have been performed to achieve 20 &amp / #956 / m depth for 1 &amp / #956 / m opening for a dissolved wafer process (DWP) and to achieve 100 &amp / #956 / m depth for 1 &amp / #956 / m opening for silicon-on-glass (SOG) process. A number of parameters affecting the etch rate and profile angle are investigated, including the step times, etch step pressure, platen power, and electrode temperature. Silicon etch samples are prepared and processed in METU-MET facilities to understand and optimize the DRIE process parameters that can be used for the production of MEMS gyroscopes and accelerometers. The etch samples for DWP are masked using a photoresist, Shipley S1813. After the optimization process, vertical trench profiles are achieved with minimum critical dimension loss for trench depths up to 20 &amp / #956 / m. Since the selectivity of the resist is not sufficient for 100 &amp / #956 / m deep trench etch process, silicon dioxide (SiO2) is used as the mask for this process. At the end of the optimization processes, more than 100 &amp / #956 / m depth for 1 &amp / #956 / m opening with almost vertical sidewalls are achieved. In summary, this study provides an extensive understanding of the DRIE process for successful implementations of integrated MEMS sensors.

This thesis reports the development of micromachined accelerometers and gyroscopes that can be used for micromachined inertial measurement units (IMUs). Micromachined IMUs started to appear in the market in the past decade as low cost, moderate performance alternative in many inertial applications including military, industrial, medical, and consumer applications. In the framework of this thesis, a number of accelerometers and gyroscopes have been developed in three different fabrication processes, and the operation of these fabricated devices is verified with extensive tests. In addition, the fabricated accelerometers were combined with external readout electronics to obtain hybrid accelerometer systems, which were tested in industrial test facilities. The accelerometers and gyroscopes are designed and optimized using the MATLAB analytical simulator and COVENTORWARE finite element simulation tool. First set of devices is fabricated using a commercial foundry process called SOIMUMPs, while the second set of devices is fabricated using the electroplating processes developed at METU-MET facilities. The third set of devices is designed for a new advanced process based on DRIE, which is under development. Mechanical and electrical test results of the fabricated accelerometers and gyroscopes are in close agreement with the designed values. The testing of the SOI and nickel accelerometers is also performed in industrial test environments. In order to perform these tests, accelerometers are hybrid connected to commercially available capacitive readout circuits. These accelerometer systems require only two DC supply voltages for operation and provide an analog output voltage related to the input acceleration. The industrial tests show that the SOI accelerometer system yields a 799 &micro / g/&amp / #8730 / Hz average noise floor, a 1.8 mg/&amp / #8730 / Hz peak noise floor, a 22.2 mV/g sensitivity, and a 0.1 % nonlinearity, while the nickel accelerometer system yields a 228 &micro / g/&amp / #8730 / Hz average noise floor, a 375 &micro / g/&amp / #8730 / Hz peak noise floor, a 1.02 V/g sensitivity, and a 0.23 % nonlinearity. Long-term drift components of the accelerometers are determined to be smaller than 20 mg. These systems are the highest performance micromachined accelerometer systems developed in Turkey, and they can be used in implementation of a national inertial measurement unit.

Στις τελευταίες δεκαετίες η σμίκρυνση (miniaturization) έχει αποτελέσει ένα σημαντικό παράγοντα στην ανάπτυξη της τεχνολογίας. Ένας από τους κύριους στόχους της μέσω της μικρομηχανικής (micro-engineering) είναι η παραγωγή ολοκληρωμένων Μικρο-Ηλεκτρο-Μηχανικών Συστημάτων (MEMS), τα οποία χρηςιμοποιούνται σήμερα ως υποσυστήματα σε πάρα πολλές εφαρμογές. Αντικείμενο της παρούσας διατριβής είναι ο παράλληλος χειρισμός καθώς και η ανοιχτού βρόχου/άνευ αισθητήρων συναρμολόγηση μικροαντικειμένων χωρίς τη χρήση μικροβραχιόνων. Για το σκοπό αυτό η έρευνα επικεντρώθηκε σε τέσσερις διαφορετικές διαδικασίες/προσεγγίσεις: α) το μικροχειρισμό με τρισδιάστατα πεδία δυνάμεων, β) το μικροχειρισμό με προγραμματιζόμενα πεδία δυνάμεων στο επίπεδο, γ) το χειρισμό μικροαντικειμένων έγκλειστων σε σταγόνες υγρού και δ) την αυτοσυναρμολόγηση μικροαντικειμένων με ηλεκτροστατικές δυνάμεις. / In the last decades, miniaturization has become an important factor in the development of technology. One of its main objectives through the discipline of micro-engineering is the production of integrated Micro-Electro-Mechanical Systems (MEMS), which are currently used as sub-systems in many applications. The target of this thesis is the parallel manipulation and the open-loop/sensorless assembly of microparts without the use of microrobots. For this purpose, the research was focused on four different procedures: a) micromanipulation with 3D force fields, b) micromanipulation with programmable force fields on a plane, c) manipulation of microparts enclosed in a droplet of liquid and d)self-assembly of microparts with electrostatic forces.

abstract: A Microbial fuel cell (MFC) is a bio-inspired carbon-neutral, renewable electrochemical converter to extract electricity from catabolic reaction of micro-organisms. It is a promising technology capable of directly converting the abundant biomass on the planet into electricity and potentially alleviate the emerging global warming and energy crisis. The current and power density of MFCs are low compared with conventional energy conversion techniques. Since its debut in 2002, many studies have been performed by adopting a variety of new configurations and structures to improve the power density. The reported maximum areal and volumetric power densities range from 19 mW/m2 to 1.57 W/m2 and from 6.3 W/m3 to 392 W/m3, respectively, which are still low compared with conventional energy conversion techniques. In this dissertation, the impact of scaling effect on the performance of MFCs are investigated, and it is found that by scaling down the characteristic length of MFCs, the surface area to volume ratio increases and the current and power density improves. As a result, a miniaturized MFC fabricated by Micro-Electro-Mechanical System(MEMS) technology with gold anode is presented in this dissertation, which demonstrate a high power density of 3300 W/m3. The performance of the MEMS MFC is further improved by adopting anodes with higher surface area to volume ratio, such as carbon nanotube (CNT) and graphene based anodes, and the maximum power density is further improved to a record high power density of 11220 W/m3. A novel supercapacitor by regulating the respiration of the bacteria is also presented, and a high power density of 531.2 A/m2 (1,060,000 A/m3) and 197.5 W/m2 (395,000 W/m3), respectively, are marked, which are one to two orders of magnitude higher than any previously reported microbial electrochemical techniques. / Dissertation/Thesis / Doctoral Dissertation Electrical Engineering 2016

abstract: Early detection and treatment of disease is paramount for improving human health and wellness. Micro-scale devices promote new opportunities for the rapid, cost-effective, and accurate identification of altered biological states indicative of disease early-onset; these devices function at a scale more sensitive to numerous biological processes. The application of Micro-Electro-Mechanical Systems (MEMS) in biomedical settings has recently emerged and flourished over course of the last two decades, requiring a deep understanding of material biocompatibility, biosensing sensitively/selectively, biological constraints for artificial tissue/organ replacement, and the regulations in place to ensure device safety. Capitalizing on the inherent physical differences between cancerous and healthy cells, our ultra-thin silicone membrane enables earlier identification of bladder cancer—with a 70% recurrence rate. Building on this breakthrough, we have devised an array to multiplex this sample-analysis in real-time as well as expanding beyond bladder cancer. The introduction of new materials—with novel properties—to augment current and create innovative medical implants requires the careful analysis of material impact on cellular toxicity, mutagenicity, reactivity, and stability. Finally, the achievement of replacing defective biological systems with implanted artificial equivalents that must function within the same biological constraints, have consistent reliability, and ultimately show the promise of improving human health as demonstrated by our hydrogel check valve. The ongoing proliferation, expanding prevalence, and persistent improvement in MEMS devices through greater sensitivity, specificity, and integration with biological processes will undoubtedly bolster medical science with novel MEMS-based diagnostics and therapeutics. / Dissertation/Thesis / Doctoral Dissertation Electrical Engineering 2018

The purpose of this research is to identify the configurations of several mechanism classes which result in bistable behavior. Bistable mechanisms have use in many applications, such as switches, clasps, closures, hinges, and so on. A powerful method for the design of such mechanisms would allow the realization of working designs much more easily than has been possible in the past. A method for the design of bistable mechanisms is especially needed for micro-electro-mechanical systems (MEMS) because fabrication and material constraints often prevent the use of simple, well-known bistable mechanism configurations. In addition, this knowledge allows designers to take advantage of the many benefits of compliant echanisms, especially their ability to store and release energy in their moving segments. Therefore, an analysis of a variety of mechanism classes has been performed to determine the configurations of compliant segments or rigid-body springs in a mechanism which result in bistable behavior. The analysis revealed a relationship between the placement of compliant segments and the stability characteristics of the mechanism which allows either analysis or synthesis of bistable mechanisms to be performed very easily. Using this knowledge, a method of type synthesis for bistable mechanisms has been developed which allows bistable mechanisms to be easily synthesized. Several design examples have been presented which demonstrate the method. The theory has also been applied to the design of several bistable micromechanisms. In the process of searching for usable designs for micro-bistable mechanisms, a mechanism class was defined, known as "Young" mechanisms, which represent a feasible and useful way of achieving micro-mechanism motion similar to that of any four-bar mechanism. Based on this class, several bistable micro-mechanisms were designed and fabricated. Testing demonstrated the ability of the mechanisms to snap between the two stable states. In addition, the mechanisms showed a high degree of repeatability in their stable positions.

This work developed a process to provide physical, electrical, and environmental protection to the electrical lead system of an optical switch device. A literature review was conducted to find materials and processes suitable to the stress-sensitive, high voltage characteristics of many optical switch devices. An automatic dispensing dam and fill process, and three candidate materials (two epoxy and one silicone) were selected for investigation. Experimental and analytical techniques were used to evaluate the materials. Methods applied included interferometric die warpage measurements, electrochemical migration resistance tests (ECMT), thermal cycling, and finite element analysis. The silicone dam and fill system was selected based upon the results of die warpage and electrochemical migration resistance tests. A modified, selective dam and fill process was developed and preliminary reliability testing was performed. The paper provides detailed instructions for successful encapsulation of the optical switch's lead system.

Varactors form an important part of many communication circuits. They are utilized in oscillators, tunable matching networks, tunable filters and phase-shifters. This thesis deals with the design, analysis, characterization and applications of a novel MEMS varactor. Lower actuation voltage and higher dynamic range are the two important issues widely addressed in the study of MEMS varactors. The pull-in instability, due to which only 33% of the gap between plates could be covered smoothly, greatly reduces useful dynamic range of MEMS varactors. We propose a torsional MEMS varactor that exploits “displacement amplification” whereby pull-in is overcome and wide dynamic range is achieved. The torsion beam in the device undergoes torsion as well as bending. Behavior of the device has been analyzed through torque and force balance. Based on the torque balance and the force balance expressions, theoretical limits of torsion angle and bending for stable operation have been derived. Torsional MEMS varactors and its variants are fabricated through a commercial fabrication process (polyMUMPS) and extensive characterization has been carried out. Capacitance-voltage characteristics show a maximum dynamic range of 1:16 with parasitic capacitance subtracted out from the capacitance values. A bidirectional torsional varactor, in which the top AC plate moves not only towards bottom plate but also away from bottom plate, is also tested. The bottom AC plate is isolated from low resistivity substrate with a thin nitride layer. This gives rise to large parasitic capacitances at higher frequencies. So to avoid this, a varactor with both AC plates suspended in air is designed and fabricated. A dynamic range of 1:8 including parasitic capacitances has been achieved. Self-actuation is studied on fabricated structures and a torsional varactor that overcomes self-actuation has been proposed. Hysteresis behavior of the torsional varactor is analyzed for different AC signals across the varactor plates. Effects of residual stress on C-V characteristics are studied and advantages and disadvantages of residual stress on device performance are discussed. The torsional varactors have been cycled between Cmax and Cmin for 36 hours continuously without any failure. High-frequency characteristics of torsional varactors are analyzed through measurements on one-port and two port configurations. Measurements are done on polyMUMPS devices to study the capacitance variation with voltage, quality factor (Q) and capacitance variation with frequency. Effects of substrate are de-embedded from the device and characteristics of device are studied. An analog phase shifter based on torsional varactor proposed and analyzed through HFSS simulations. Very high tuning range can be achieved with a LC-VCO based on torsional varactors. A LC VCO with the torsional varactor as a capacitor in LC tank is designed. The torsional varactor and IC are fabricated separately and are integrated through wire bonding. Bond-wires are used as inductors.

Accelerometer sensors fabricated with micromachining technologies started to take place of yesterday&rsquo / s bulky sensors in many application areas. The application areas include a wide range from consumer electronics and health systems to military and aerospace applications. Therefore, the performance requirements extend form 1 &mu / g&rsquo / s to 100 thousand g&rsquo / s. However, high performance strategic grade MEMS accelerometer sensors still do not exist in the literature. Smart designs utilizing the MEMS technology is necessary in order to acquire high performance specifications. This thesis reports a high performance accelerometer with a new process by making the use of bulk micromachining technology. The new process includes the utilization of Silicon-on-Insulator (SOI) wafer and its buried oxide (BOX) layer. The BOX layer helps to realize interdigitated finger structures, which commonly find place in surface micromachined CMOS-MEMS capacitive accelerometers. The multi-metal layered CMOS-MEMS devices inherently incorporate interdigitated finger structures. Interdigitated finger structures are highly sensitive to acceleration in comparison with comb-finger structures, which generally find usage in bulk-micromachined devices, due to absence of anti-gap. The designed sensors based on this fabrication process is sought to form a fully-differential signal interfaced sensor with incorporation of the advantages of high sensitive interdigitated finger electrodes and high aspect ratio SOI wafer&rsquo / s bulk single crystal silicon device. Under the light of the envisaged process, sensor designs were made, and verified using a computing environment, MATLAB, and a finite element analysis simulator, CoventorWARE. The verified two designs were fabricated, and all the tests, except the centrifuge test, were made at METU-MEMS Research Center. Among the fabricated sensors, the one designed for the high performance achieves a capacitance sensitivity of 178 fF with a rest capacitance of 8.1 pF by employing interdigitated finger electrodes, while its comb-finger implementation can only achieve a capacitance sensitivity of 75 fF with a rest capacitance of 10 pF.