This work presents design and fabrication technologies on vibration-induced electromagnetic micro-generators using LTCC (Low temperature co-fire ceramic) processes. LTCC fabrication with some special advantages has simplistically processes and multilayer stack procedure, resulting in a micro-inducer can consist of the multilayer silver (Ag) induction micro-coils and a helical ceramic micro-spring. Highly electrical conductible Ag and its multilayer micro-coil structures can enhance the power output of generators. This work is composed of three parts. The first part describes the design of two kinds of micro-generator; a magnetic core generator (MCG) and sided-magnet generator (SMG). According to their respective structures, an analytical mode is also developed to investigate its resonant frequency and the spring constant of the micro-spring, as well as the bending stress and fatigue life of the supporting beam. The voltage output, current output and power output on the helical induction micro-coils, as well as the relationship of vibration amplitude versus vibration frequency in the vibrating system are calculated. The second part introduces how to integrate the Ag multilayer induction micro-coils and the helical ceramic micro-spring using LTCC technique, and organize the design and fabrication of LTCC micro-inducers. From the fabrication procedures, it is known that a stacking error places a limit on the total numbers of micro-coils layer. The experimental results verify that the application of LTCC to the fabrication of micro-inducers is feasible, and that the phenomenon of plane warpage, volumetric shrinkage, layer delamination and surface crack of sintered ceramic structures has been fully controlled. In the third part, measurement setup, vibrating tests and experiments on generating electricity are completed. The performances with different-structure devices are evaluated. Voltage output, current output and power output, as well as changing trends of power density with respect to the layer number of induction micro-coils and magnets are discussed. Relationship of the electrical parasitical damping coefficient versus the vibration amplitude and vibration velocity, relationship between the induced inductor and the current output, the power output depending on the electrical load resistance and differences between fabrication lots are investigated. At last, comparisons between analytical and experimental power output are conduced. For MCG micro-generator, the analytical value is 0.88 mW, about 13.6% smaller than the experimental value of 1 mW. For SMG micro-generator, the analytical value is 1.73 mW, about 10.7% larger than the measured value of 1.56 mW. The analytical models are verified. In the MCG device, the experimental results show that a maximum voltage output of 25.19 mV, a current output of 82.9 mA and a power density of 2.36 mW/cm3 under 120 Hz frequency and 0.03-mm amplitude are obtained. In addition, when operated at 69 Hz vibration frequency and vibration amplitude of 0.03 mm, the experimental maximum voltage output, current output and power density of the SMG device are 44.5 mV, 83.1 mA and 2.17 mW/cm3, respectively. Except the power density, other electricity performances of SMG device are better than MCG. Apparently, the power density of MCG and SMG device presented by this study competes favorably with the results from other devices in the literature.