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Microplasma MEMS device : its design, fabrication and application in hydrogen generation for fuel cells /Sabnavis, BinduMadhav. January 2009 (has links)
Thesis (M.S.)--Rochester Institute of Technology, 2009. / Typescript. Includes bibliographical references (leaves 56-58).
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Simulation of the effects of acoustic noise on MEMS gyroscopesRoth, Grant, Flowers, George T. January 2009 (has links)
Thesis--Auburn University, 2009. / Abstract. Vita. Includes bibliographic references (p.75-76).
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Towards early stage disease detection in microdevices : fabrication and testing of micro total analysis systems for bioanalytical applications / /Pan, Tao, January 2007 (has links) (PDF)
Thesis (Ph. D.)--Brigham Young University. Dept. of Chemistry and Biochemistry, 2007. / Includes bibliographical references.
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Dynamics of hybrid MEMS sensors and switches for mass and acceleration detectionAlsaleem, Fadi M. January 2009 (has links)
Thesis (Ph. D.)--State University of New York at Binghamton, Thomas J. Watson School of Engineering and Applied Science, Department of Mechanical Engineering, 2009. / Includes bibliographical references.
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Microgripper force feedback integration using piezoresistive cantilever structure /Simon, Todd R. January 2008 (has links)
Thesis (M.S.)--Rochester Institute of Technology, 2008. / Typescript. Includes bibliographical references (leaves 73-75).
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Microfluidics for protein crystallization and mapping phase diagrams of aqueous solutions /Selimovic, Seila. January 2010 (has links)
Thesis (Ph. D.)--Brandeis University, 2010. / "UMI:3390521." MICROFILM COPY ALSO AVAILABLE IN THE UNIVERSITY ARCHIVES. Includes bibliographical references.
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Ortho-planar mechanisms for microelectromechanical systems /Lusk, Craig P., January 2005 (has links) (PDF)
Thesis (Ph. D.)--Brigham Young University. Dept. of Mechanical Engineering, 2005. / Includes bibliographical references (p. 199-214).
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A micromachined magnetic field sensor for low power electronic compass applicationsChoi, Seungkeun. January 2007 (has links)
Thesis (Ph. D.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2007. / Allen, Mark, Committee Chair ; Brand, Oliver, Committee Member ; Kenney, James, Committee Member ; Hesketh, Peter, Committee Member ; Michaels, Jennifer, Committee Member.
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Microelectromechanical resonator-based components for wireless communications : filters and transmission lines /Alastalo, Ari. January 2006 (has links) (PDF)
Diss. Teknillinen korkeakoulu, 2006. / Myös verkkojulkaisuna.
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A Molecular Electronic Transducer based Low-Frequency Accelerometer with Electrolyte Droplet Sensing BodyJanuary 2013 (has links)
abstract: "Sensor Decade" has been labeled on the first decade of the 21st century. Similar to the revolution of micro-computer in 1980s, sensor R&D; developed rapidly during the past 20 years. Hard workings were mainly made to minimize the size of devices with optimal the performance. Efforts to develop the small size devices are mainly concentrated around Micro-electro-mechanical-system (MEMS) technology. MEMS accelerometers are widely published and used in consumer electronics, such as smart phones, gaming consoles, anti-shake camera and vibration detectors. This study represents liquid-state low frequency micro-accelerometer based on molecular electronic transducer (MET), in which inertial mass is not the only but also the conversion of mechanical movement to electric current signal is the main utilization of the ionic liquid. With silicon-based planar micro-fabrication, the device uses a sub-micron liter electrolyte droplet sealed in oil as the sensing body and a MET electrode arrangement which is the anode-cathode-cathode-anode (ACCA) in parallel as the read-out sensing part. In order to sensing the movement of ionic liquid, an imposed electric potential was applied between the anode and the cathode. The electrode reaction, I_3^-+2e^___3I^-, occurs around the cathode which is reverse at the anodes. Obviously, the current magnitude varies with the concentration of ionic liquid, which will be effected by the movement of liquid droplet as the inertial mass. With such structure, the promising performance of the MET device design is to achieve 10.8 V/G (G=9.81 m/s^2) sensitivity at 20 Hz with the bandwidth from 1 Hz to 50 Hz, and a low noise floor of 100 ug/sqrt(Hz) at 20 Hz. / Dissertation/Thesis / M.S. Electrical Engineering 2013
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