Un (bio)capteur classique est principalement composé de deux éléments essentiels : une couche réceptrice sensible à l’analyte à laquelle on s’intéresse et un transducteur qui permet de convertir une stimulation chimique / biologique en un signal physique mesurable. Dans le cas idéal, un capteur ne doit pas nécessiter de marquage de la cible, doit posséder de très grandes sensibilité et sélectivité envers elle, ne requiert qu’une faible quantité de cette dernière et doit présenter un temps de réponse très court. Au vu de ces critères, les microsystèmes électromécaniques (MEMS) sont des candidats très prometteurs dans le développement de capteurs. Les polymères fonctionnels, tels que les polymères à empreinte moléculaire (MIPs), sont une approche très intéressante dans l’utilisation des MEMS car ils peuvent être intégrés dans des technologies existantes de MEMS à base de silicium ou complètement remplacer ces technologies. Le but de cette thèse porte sur le développement d’un capteur MEMS composé de polymères (fonctionnels). Un chapitre initial (chapitre 2) introduit des nouveaux systèmes de fabrication de polymères fonctionnels. Des biopuces composées de MIPs imprimés par jet d’encre sont présentées ainsi qu’une technique basée sur la polymérisation radicale contrôlée qui permet le dépôt d’un fin enrobage de MIPs sur des microstructures. La deuxième partie de ce chapitre présente la fabrication de polymères à empreinte moléculaire par stéréolithographie deux-photons, qui peut être vue comme une extension de l’impression 3D. Afin d’illustrer cette technologie de prototypage rapide, deux capteurs composés de MIPs sont présentés : un capteur à grille de diffraction et un capteur en microlevier. Les deux principaux chapitres de ce manuscrit (chapitre 3 et 4) se focalisent sur le développement d’un nouveau concept de fabrication pour les capteurs MEMS. Ce concept est basé sur la polymérisation d’une poutre à fort ratio de forme à l’extrémité d’une fibre optique de télécommunication. Cette poutre a été mise en vibration à sa résonnance et a ainsi pu être utilisée comme un capteur à base de levier. Le capteur en polymère a permis l’intégration de MIPs comme élément récepteur et la reconnaissance sélective de l’antibiotique enrofloxacine. De plus, un nouveau système de mesure intégré est présenté dans le chapitre 4. Ce système de mesure intègre la fibre optique en guidant un rayon laser à travers elle ainsi qu’à travers le levier qui y est attaché.Le rayon lumineux sortant est ensuite focalisé sur une photodiode sensible à la position du rayon lumineux, permettant ainsi la mesure du spectre de résonance de la poutre en polymère. Ce système de mesure est caractérisé et ses performances sont présentées au travers de la détection de masse du levier en polymère et de mesures faites en milieu liquide. / A classical (bio)sensor consists of two key components: A receptor layer that detects the analyte of interest and the transducer which converts the chemical / biological stimuli into a physical measurable signal. Ideally a sensor is label-free, highly sensitive and selective towards the target, requires low sample amount and shows a fast response time. Regarding these criteria microelectromechanical systems (MEMS) offer great potential for the sensor development. One interesting approach for this development are functional polymer materials, such as molecularly imprinted polymers (MIPs), that can be either integrated to existing MEMS based on silicon or completely replace the silicon technology. The emphasis of this thesis is focused on the development of a MEMS sensor based on (functional) polymers. In an initial chapter (chapter 2) new fabrication schemes for functional polymers are introduced. Inkjet-printed biochips based on MIPs are presented and a technique based on controlled radical polymerization is shown that allows the deposition of thin MIP shells on a microfabricated pattern. In the second part of this chapter the fabrication of molecularly imprinted polymers by two-photon stereolithography is shown which can be seen as an extension of 3dimensional printing. As possible application of this rapid prototyping technology two sensors based on MIPs are introduced a diffraction grating sensor and a microcantilever sensor. The two main chapters of this manuscript (chapter 3 and chapter 4) report the development of a new fabrication concept for MEMS sensors. It is based on the polymerization of a high aspect ratio beam on the extremity of an optical telecommunication fiber which was actuated at resonance and thus could be used as a cantilever sensor. The polymer sensor allowed the integration of MIPs as sensing element and the selective recognition of the antibiotic enrofloxacin. Furthermore, is a new, integrated read-out scheme presented in chapter 4. This read-out scheme integrates the optical fiber, by guiding a probe laser beam through it and attached cantilever beam. The output light beam is then focused on a position sensitive photodiode and thus enabled to monitor the resonance spectra of the polymer beam. The read-out scheme is characterized and its performance is shown by demonstrating the mass sensitivity of the polymeric cantilever beam and by measurements in liquid environments.

Now-a-days sensors are not limited only to industry or research laboratories but have come to common man’s usage. From kids toys to house hold equipment like washing machine, microwave oven as well as in automobiles, a wide variety of sensors and actuators can be easily seen. The aim of the present thesis work is to discuss the design, development, fabrication and testing of miniaturized piezoresistive, absolute type, low pressure sensor and flow sensor. Detailed performance study of these sensors in different ambient conditions (including harsh environment such as radiation, temperature etc.) has been reported. Extensive study on designing of thin silicon diaphragms and optimization of piezoresistor parameters is presented. Various experiments have been performed to optimize the fabrication and packaging processes. In the present work, two low range absolute type pressure sensors (0-0.5 bar and 0-1 bar) and a novel flow sensor (0-0.1 L min-1) for gas flow rate measurement are developed. The thesis is divided into following six chapters. Chapter 1: It gives a general introduction about miniaturization, MEMS technology and its applications in sensors area. A brief overview of different micromachining techniques is presented, giving their relative advantages and limitations. Literature survey of various types of MEMS based pressure sensors along with recent developments is presented. At the end, the motivation for the present work and organization of the thesis is discussed. Chapter 2: In this chapter, various design aspects of low, absolute type pressure sensors (0-0.5 bar and 0-1 bar) are discussed in detail. Static analysis of the silicon diaphragms has been carried out both analytically as well as through finite element simulations. Piezoresistive analysis is carried out to optimize the piezoresistor dimensions and locations for maximum sensitivity and minimum nonlinearity. All the Finite Element Analyses (FEA) were carried out using Coventorware software. A novel approach for the selection of resistor parameters (sheet resistance, length to width ratio) is reported . Finally, the expected performance of the designed sensors is summarized. Chapter 3: This chapter is divided into two parts. The first part presents the fabrication process flow adopted to develop these low range absolute pressure sensors. Two fabrication process approaches (wet etching and dry etching) which are used to fabricate the thin diaphragms are discussed in detail. Following an overall description, various aspects of the fabrication are elaborated on, like mask design, photolithography process, ion-implantation, bulk micromachining and wafer bonding. The required parameters for implantation doses, annealing cycles, low stress nitride deposition and anodic bonding are optimized through extensive experimental trials. The second part of this chapter discusses about the different levels of packaging involved in the realization of pressure sensors. Finite Element Analyses (FEA) of Level -0 and Level-1 packages has been carried out using ANSYS software to optimize the packaging materials. Exhaustive experimental studies on the selection of die attach materials and their characterization is carried out. Based upon these studies, the glass thickness and die-attach materials are selected. Chapter 4: The chapter discusses the measurement of the fabricated devices. The wafer level characterization which includes I-V characterization, measurement of offset and full scale output is discussed first. And then the temperature coefficient of resistance and offset is measured at wafer level itself. The performance characteristics like sensitivity, nonlinearity, hysteresis and offset of packaged pressure sensors is presented for all the variants (0.5 bar and 1 bar sensors fabricated by KOH and DRIE process) and their comparison with simulated values shows a close match. The measurement of dynamic characteristics using in-house developed test set-up are presented. The next section discussed detailed study about the stability of the developed sensors. The last part of this chapter reports the harsh environment characterization of the sensors viz. high temperature, humidity exposure, radiation testing etc. Chapter 5: The development of a novel micro-orifice based flow sensor for the flow rate measurement in the range of L min-1 is presented in this chapter. The sensing element is a thin silicon diaphragm having four piezoresistors at the edges. A detailed theoretical analysis showing the relationship between output voltage generated and flow rate has been discussed. The flow sensor is calibrated using an in-house developed testing set-up. Novelty of the design is that the differential pressure is measured at the orifice plate itself without the need of two pressure sensors or u-tube which is required otherwise. Chapter 6: This chapter summarizes the salient features of the work presented in this thesis with the conclusion. And then the scope for carrying out the further work is discussed.