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Laser-micromachined under-water micro gripper using ionic conducting polymer film (ICPF).January 2000 (has links)
Kwok, Yiu-fai. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2000. / Includes bibliographical references (leaves 87-89). / Abstracts in English and Chinese. / ABSTRACT --- p.I / ACKNOWLEDGMENTS --- p.II / TABLE OF CONTENT --- p.III / LIST OF FIGURES --- p.V / Chapter 1 --- INTRODUCTION --- p.1 / Chapter 1.1 --- Background --- p.1 / Chapter 1.2 --- Motivation of this project --- p.1 / Chapter 1.3 --- Organization --- p.2 / Chapter 2 --- LITERATURE SURVEY --- p.3 / Chapter 2.1 --- Ionic Conducting Polymer Film (ICPF) --- p.3 / Chapter 2.2 --- Electroactive Polymer (EAP) --- p.4 / Chapter 2.3 --- Micro Active Guide Wire Catheter System --- p.5 / Chapter 2.4 --- Space Application - Dust Wiper --- p.6 / Chapter 2.5 --- Micro gripper --- p.8 / Chapter 2.6 --- Summary of literature survey --- p.14 / Chapter 3 --- METAL-POLYMER COMPOSITIONS --- p.15 / Chapter 3.1 --- Introduction --- p.15 / Chapter 3.2 --- Perfluorosulfonic acid polymer (Nafion) --- p.15 / Chapter 3.3 --- Working principle of ICPF --- p.19 / Chapter 3.4 --- Different types of composition --- p.21 / Chapter 3.4.1 --- Chromium-Gold-polymer composite --- p.23 / Chapter 3.4.2 --- Platinum-Gold-polymer composite --- p.25 / Chapter 3.4.3 --- Silver-polymer composite --- p.27 / Chapter 3.4.4 --- Silver/Copper-gold polymer composite --- p.27 / Chapter 3.4.5 --- Gold-polymer composite --- p.28 / Chapter 4 --- ICPF FABRICATION --- p.30 / Chapter 4.1 --- Introduction --- p.30 / Chapter 4.2 --- ICPF fabrication process --- p.31 / Chapter 4.3 --- Surface pre-treatment --- p.33 / Chapter 4.4 --- Gold thin film deposition (Evaporation) --- p.34 / Chapter 4.4.1. --- Filament evaporation --- p.35 / Chapter 4.4.2 --- Electronic-beam evaporation --- p.39 / Chapter 4.4.3 --- Structural analysis of evaporation --- p.40 / Chapter 4.5 --- Chemical electroplating --- p.42 / Chapter 4.5.1. --- Deposition rate calibration --- p.44 / Chapter 5 --- DESIGN AND PACKAGE --- p.46 / Chapter 6 --- LASER MICROMACHINING --- p.49 / Chapter 6.1 --- Introduction to Laser micromachining --- p.49 / Chapter 6.2 --- C02 laser --- p.50 / Chapter 6.3 --- Nd:YAG Laser --- p.51 / Chapter 6.4 --- Laser micromachining of ICPF actuator --- p.52 / Chapter 7 --- EXPERIMENTAL RESULTS AND ANALYSIS --- p.61 / Chapter 7.1 --- Introduction --- p.61 / Chapter 7.2 --- Measurement setup --- p.62 / Chapter 7.3 --- Width test --- p.68 / Chapter 7.4 --- Length test --- p.73 / Chapter 7.5 --- Voltage test --- p.76 / Chapter 8 --- MICRO GRIPPER ACTUATION --- p.79 / Chapter 8.1 --- Development of micro gripper --- p.79 / Chapter 8.2 --- Micro gripper --- p.80 / Chapter 9 --- CONCLUSION --- p.82 / Chapter 10 --- APPENDIX --- p.83 / Chapter 10.1 --- Procedures in using E-beam evaporator --- p.83 / Chapter 10.2 --- Procedures in using Thermo couple evaporator --- p.85 / Chapter 11 --- REFERENCE --- p.87
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Characterisation and optimisation of the variable frequency microwave technique and its application to microfabricationAntonio, Christian. January 2006 (has links)
Thesis (PhD) - Swinburne University of Technology, Industrial Research Institute Swinburne - 2006. / A thesis submitted to the Industrial Research Institute Swinburne, Swinburne University of Technology in fulfillment of the requirements for the degree of Doctor of Philosophy - 2006. Typescript. Includes bibliographical references (p. 183-193).
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Design and manufacturing of plastic micro-cantilevers by injection moldingRios, Erick E. 08 1900 (has links)
No description available.
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Nanomaterials characterization and bio-chemical sensing using microfabricated devicesYu, Choongho, Shi, Li, January 2004 (has links) (PDF)
Thesis (Ph. D.)--University of Texas at Austin, 2004. / Supervisor: Li Shi. Vita. Includes bibliographical references.
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Thin film resistance to hydrofluoric acid etch with applications in monolithic microelectronic/MEMS integrationMcKenzie, Todd G. 01 December 2003 (has links)
No description available.
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Production and Analysis of Polymeric Microcantilever PartsMcFarland, Andrew W. 24 November 2004 (has links)
This dissertation presents work involving the manufacture and analytic modeling of microcantilever parts (length-width-thickness of roughly 500-100-10 microns). The manufacturing goals were to devise a means for and demonstrate repeatable production of microcantilevers from techniques not used in the integrated-circuit field, which are the exclusive means of current microcantilever production. The production of microcantilevers was achieved via a solvent casting approach and with injection molding, which produced parts from various thermoplastic polymeric materials (amorphous, semi-crystalline, fiber- and nanoclay-filled) in a repeatable fashion. Limits of the injection molding process in terms of the thinnest cantilevers possible were examined with 2 microns being the lower bound.
Subsets of the injection-molded parts were used in a variety of sensing applications, some results were successful (e.g., vapor-phase, resonance- and deflection-based sensing), while others showed poor results, likely due to experimental shortcomings (e.g., fluid-phase, deflection-based sensing). Additionally, microcantilever parts with integrated tips were injection-molded and showed to function at the same level as commercial, tipped, silicon-nitride parts when imaging an optical grating; this experimental work was the first demonstration of injection-molded parts for chemical sensing and force spectroscopy.
The scientific results were (i) the derivation of a length scale dependent bending stiffness and experimental evidence showing that such an effect was observed, (ii) the development of a new microcantilever experimental mode (surface stress monitoring via microcantilever bending resonant frequencies) and experimental validation of the technique, and (iii) a new method for determining microcantilever geometry based upon measurement of a bending, lateral, and torsional mode and experimental validation of the procedure.
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