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A novel design for atmospheric laser radar (lidar) is presented, implementing a digital micromirror device (DMD) for use in (A) aligning transmitter and receiver boresight angles and in (B) field-of-view (FOV) control of such "DMD lidar" instruments. A novel technique is presented to extract the transmitter-receiver overlap-compensation function from ratioing data from different FOVs in the same pointing direction. DMD lidar design considerations and trades are surveyed. Principles of modeling DMD lidar performance are introduced and implemented in a performance-predictive system simulation with data-validated results. Operational capabilities of DMD lidar are demonstrated through a hardware prototype with field measurement examples. Additional capabilities offered by integrating DMD within lidar and other optical systems are presented, including single-pixel Radon-imaging techniques.

This thesis presents the design and development of a novel two-axis micromirror utilizing electrostatic, repulsive-force rotational actuators for laser scanned vector display systems. The micromirror consists of a 1.0 mm reflective mirror plate that can be rotated at high speeds to steer a laser beam to generate images. Fabricated using PolyMUMPs, the micromirror is operated in a non-resonant mode between 0 V and 200 V and can achieve a maximum optical scanning angle of ±2.6° in each axis with a settling time as fast as 2.75 ms and a first resonant frequency of 1400 Hz. Open-loop control methods were developed for image correcting and improving image quality. The micromirror was integrated into a portable, handheld vector display device which included designing and developing driving circuits, device firmware, mechanical components and optical components.

This thesis presents the design and development of a novel two-axis micromirror utilizing electrostatic, repulsive-force rotational actuators for laser scanned vector display systems. The micromirror consists of a 1.0 mm reflective mirror plate that can be rotated at high speeds to steer a laser beam to generate images. Fabricated using PolyMUMPs, the micromirror is operated in a non-resonant mode between 0 V and 200 V and can achieve a maximum optical scanning angle of ±2.6° in each axis with a settling time as fast as 2.75 ms and a first resonant frequency of 1400 Hz. Open-loop control methods were developed for image correcting and improving image quality. The micromirror was integrated into a portable, handheld vector display device which included designing and developing driving circuits, device firmware, mechanical components and optical components.

Micromirrors and diffraction gratings were developed for spectroscopy and magnetic field sensor in this thesis. MEMS blazed gratings were successfully fabricated in different grating periodicities to cover a wide infrared wavelength range. Lorentz force actuated micromirrors were investigated, and two types of mirrors were fabricated: rotating and pop-up micromirrors. The deflection angle of the mirrors was controllable by altering the driving current on the mirror. Deflection angle vs. driving current was studied for different mirror types and different spring dimensions. A Lorentz force based magnetic field sensor is also demonstrated. The sensor employs the rotating micromirror as a resonator. With an AC current flowing around the micromirror, a periodic Lorentz force is generated which drives the resonator. The rotational amplitude of the micromirror is measured with an optical positioning system and external circuits. The highest resolution of the magnetic field sensor is 0.4 nT at 50 mArms, and 53 mHz filter bandwidth. With appropriate current level, this sensor can measure a wide range of magnetic field, from nT to T. / October 2016

A process for micromachining of micro-mirror devices from silicon-on-insulator wafers was proposed and implemented. Test methods and force applicators for these devices were developed. Following successful fabrication of these devices, a novel process for fabrication of devices out of the plane of the silicon wafer was proposed, so that the devices could be actuated electrostatically. In particular, the process makes use of thick photoresist layers as a sacrificial mold into which an amorphous nickel-phosphorous alloy may be deposited. Ideal design of the electrostatically actuated micro-mirrors was investigated, and a final design was selected and modeled using FEA software, which found that serpentine-hinged devices require approximately 33% of the actuation force of their straight-beamed counterparts. An aqueous electroless plating solution composed of nickel acetate, sodium hypophosphite, citric acid, ammonium acetate, and Triton X-100 in was developed for use with the process, and bath operating parameters of 85°C and 4.5 pH were determined. However, this electroless solution failed to deposit in the presence of the photoresist. Several mechanisms proposed for deposition failure included leaching of organic solvents from the photoresist, oxidation of the nickel-titanium seed layer on which the deposition was intended to occur, and nonlinear diffusion of dissolved oxygen in the solution.

A reflective type Fresnel lens using an array of micromirrors is designed and fabricated using the MUMPs?? surface micromachining process. The focal length of the lens can be rapidly changed by controlling both the rotation and translation of electrostatically actuated micromirrors. The suspension spring, pedestal and electrodes are located under the mirror to maximize the optical efficiency. The micromirror translation and rotation are plotted versus the applied voltage. Relations are provided for the fill-factor and the numerical aperture as functions of the lens diameter, the mirror size, and the tolerances specified by the MUMPs?? design rules. Linnik interferometry is used to measure the translation, rotation, and flatness of a fabricated micromirror. The reflective type Fresnel lens is controlled by independent DC voltages of 16 channels with a 0 to 50V range, and translational and torsional stiffness are calibrated with measured data. The spot diameter of the point source by the fabricated and electrostatically controlled reflective type Fresnel lens is measured to test focusing quality of the lens.

Micro-Electro-Mechanical Systems (MEMS) micromirrors have been developed for more than two decades along with the development of MEMS technology. They have been used into many application fields: optical switches, digital light projector (DLP), adoptive optics (AO), high definition (HD) display, barcode reader, endoscopic optical coherence tomography (OCT) and confocal microscope, and so on. Especially, MEMS mirrors applied into endoscopic OCT and confocal microscope are the intensive research field. Various actuation mechanisms, such as electrostatic, electromagnetic, electro bimorph thermal, electrowetting, piezoelectric (PZT) and hybrid actuators, are adopted by different types of micromirrors. Among these actuators, the electrostatic is easily understood and simple to realize, therefore, it is broadly adopted by a large number of micromirrors. This thesis reports the design, fabrication, and characterization of a 2-D Silicon-on-insulation (SOI) MEMS micromirror with sidewall (SW) electrodes for endoscopic OCT or confocal microscope imaging. The biaxial MEMS mirror with SW electrodes is actuated by electrostatic actuators. The dimension of mirror plate is 1000micron×1000micron, with a thickness of a 35micron. The analytical modeling of SW electrodes, fabrication process, and performance characteristics are described. In comparison to traditional electrostatic actuators, parallel-plate and comb-drive, SW electrodes combined with bottom electrodes achieve a large tilt angle under a low drive voltage that the comb-drive does and possess fairly simple fabrication process same as that of the parallel-plate. A new fabrication process based on SOI wafer, hybrid bulk/surface micromachined technology, and a high-aspect-ratio shadow mask is presented. Moreover, the fabrication process is successfully extended to fabricate 2×2 and 4×4 micromirror arrays. Finally, a biaxial MEMS mirror with SW electrodes was used into Confocal MACROscope for imaging. Studied optical requirements in terms of two optical configurations and frequency optimization of the micromirror, the biaxial MEMS mirror replaces the galvo-scanner and improves the MACROscope. Meanwhile, a new Micromirror-based Laser Scanning Microscope system is presented and allows 2D images to be acquired and displayed.

A reflective type Fresnel lens using an array of micromirrors is designed and fabricated using the MUMPs?? surface micromachining process. The focal length of the lens can be rapidly changed by controlling both the rotation and translation of electrostatically actuated micromirrors. The suspension spring, pedestal and electrodes are located under the mirror to maximize the optical efficiency. The micromirror translation and rotation are plotted versus the applied voltage. Relations are provided for the fill-factor and the numerical aperture as functions of the lens diameter, the mirror size, and the tolerances specified by the MUMPs?? design rules. Linnik interferometry is used to measure the translation, rotation, and flatness of a fabricated micromirror. The reflective type Fresnel lens is controlled by independent DC voltages of 16 channels with a 0 to 50V range, and translational and torsional stiffness are calibrated with measured data. The spot diameter of the point source by the fabricated and electrostatically controlled reflective type Fresnel lens is measured to test focusing quality of the lens.

Micro-Electro-Mechanical Systems (MEMS) micromirrors have been developed for more than two decades along with the development of MEMS technology. They have been used into many application fields: optical switches, digital light projector (DLP), adoptive optics (AO), high definition (HD) display, barcode reader, endoscopic optical coherence tomography (OCT) and confocal microscope, and so on. Especially, MEMS mirrors applied into endoscopic OCT and confocal microscope are the intensive research field. Various actuation mechanisms, such as electrostatic, electromagnetic, electro bimorph thermal, electrowetting, piezoelectric (PZT) and hybrid actuators, are adopted by different types of micromirrors. Among these actuators, the electrostatic is easily understood and simple to realize, therefore, it is broadly adopted by a large number of micromirrors. This thesis reports the design, fabrication, and characterization of a 2-D Silicon-on-insulation (SOI) MEMS micromirror with sidewall (SW) electrodes for endoscopic OCT or confocal microscope imaging. The biaxial MEMS mirror with SW electrodes is actuated by electrostatic actuators. The dimension of mirror plate is 1000micron×1000micron, with a thickness of a 35micron. The analytical modeling of SW electrodes, fabrication process, and performance characteristics are described. In comparison to traditional electrostatic actuators, parallel-plate and comb-drive, SW electrodes combined with bottom electrodes achieve a large tilt angle under a low drive voltage that the comb-drive does and possess fairly simple fabrication process same as that of the parallel-plate. A new fabrication process based on SOI wafer, hybrid bulk/surface micromachined technology, and a high-aspect-ratio shadow mask is presented. Moreover, the fabrication process is successfully extended to fabricate 2×2 and 4×4 micromirror arrays. Finally, a biaxial MEMS mirror with SW electrodes was used into Confocal MACROscope for imaging. Studied optical requirements in terms of two optical configurations and frequency optimization of the micromirror, the biaxial MEMS mirror replaces the galvo-scanner and improves the MACROscope. Meanwhile, a new Micromirror-based Laser Scanning Microscope system is presented and allows 2D images to be acquired and displayed.