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Particulate contamination during wafer processing is a major concern in the microelectronics industry. The impurities may be generated from holding tanks, shipping containers, filter membranes and photolithographic materials, and hence may be organic and inorganic in nature. In liquids, these particles develop a surface charge, the magnitude and sign of which is unique for a particular solid/liquid combination. The substrate that is processed in liquids also develops a similar surface charge, and if the charge on the substrate and impurity particles are opposite to each other, deposition of impurities onto the substrate is likely to occur. Hence an understanding of the surface charge characteristics may have an impact in developing techniques to control particulate contamination from semiconductor process liquids. In this work, an attempt has been made to elucidate the surface charge characteristics of a variety of organic and inorganic particles in liquids of interest to the semiconductor industry. The techniques of microelectrophoresis and streaming potential using flat plates and filter membranes were used to this end. The data obtained have been utilized to understand and predict particulate contamination from liquids and deposition onto the wafer surfaces. This might in turn be useful in developing filter membranes of interest to the semiconductor industry.

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The objective of this study is to investigate the fully nonlinear interactions of wave-current and submerged bodies by a BEM-based numerical wave tank (NWT). In this paper, a new concept, a total velocity potential function (a combining form of a regular wave and a uniform current potential function), is adopted to solve the wave-current- body interaction problems. Two sets of the boundary integral equation (BIE) included velocity and local acceleration fields are adopted in order to find the surface wave forms and to calculate the hydrodynamic forces on the body. Applying the linear wave-current solution as a feeding function to the input boundary, it can generate waves similar to a wave maker. A numerical damping zone performed by Cointe(1990) is modified and deployed to dissipate the wave energy of the wave-current field near the end-wall and input boundary. Finally, both Mixed Eulerian-Lagrangian method (MEL) and Runge-Kutta 4th order scheme (RK4) are used to update the water elevation and velocity potential. To prove the reliability of this study, a fully nonlinear NWT is established and examined by comparing the simulated results with other researches'. It shows well agreement with analytic solutions published by others. On the other hand, three different types of structures which are submerged circular cylinder, rectangular and dual-cylinder are adopted to investigate the effects of nonlinear interactions of wave-current-body. The simulated results in weak nonlinear effect show excellent agreement with the linear solutions. Therefore, we conclude that the current method adopting the total velocity potential in the wave-current-body interaction problems is very robust and stable, and lay a good foundation for the advanced ydrodynamic problems.

Thesis (doctoral)--Universität Berlin, 1871. / Vita.