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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"cplasma etching profile"" "subject:"deplasma etching profile""

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Model Analysis of Plasma-Surface Interactions during Silicon Oxide Etching in Fluorocarbon Plasmas / フルオロカーボンプラズマによる酸化シリコンエッチングにおけるプラズマ－表面相互作用の数値解析

Fukumoto, Hiroshi 23 May 2012 (has links)
Kyoto University (京都大学) / 0048 / 新制・課程博士 / 博士(工学) / 甲第17064号 / 工博第3613号 / 新制||工||1548(附属図書館) / 29784 / 京都大学大学院工学研究科航空宇宙工学専攻 / (主査)教授 斧 髙一, 教授 稲室 隆二, 教授 青木 一生 / 学位規則第4条第1項該当
Fluorocarbon plasmas
Inductively coupled plasma
Plasma etching profile
Charging
500

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