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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"plasmaenhanced vapor deposition"" "subject:"plasmonicenhanced vapor deposition""

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Modeling and optimization of plasma-enhanced chemical vapor deposition using neural networks and genetic algorithms

Han, Seung Soo 12 1900 (has links)
No description available.
Integrated circuits
Silicon oxide films
Plasma-enhanced vapor deposition

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