To improve the wire bondability, interfacial adhesion and popcorn cracking resistance in the packaging processing of IC and MEMS chips, this thesis utilized oxygen and helium plasmas to modify and clean the surface of metal pads. The influences of the plasma cleaning time, metal pad materials and wire bonding time/temperature/power on the strength of wire bonding were investigated. Two different wire materials (Al wire with 32 £gm in diameter and Au wire with 25 £gm in diameter) were bonded on the surface of Al, Au and Pt metal pads using a commercial ultrasonic wire bonder (SPB-U688), respectively. The pull strength detection of the implemented micro joints is characterized by an accurate pull strength testing system (Dage SERIES-4000). Based on hundred measurement results, this research has three conclusions described as follows. (I) The pull strength of Au pad is higher than that of Al and Pt pads no matter with the plasma cleaning process or not. The maximum pull strength (12.286 g) can be achieved as the surface of Au pad was modified by the helium plasma for 180 seconds. (II) Helium plasma cleaned wafer can obtain larger improvement of pull strength than that of the oxygen plasma under the same plasma time. However, this result can not be concluded in Al and Pt pads. (III) The optimized wire bonding time/power of the Au, Al and Pt pads are 0.07 s/2.1, 0.05 s/0.6 W and 0.03 s/2.7 W, respectively.

The project contains theoretical research of electrotechnical manufacture for lead-free reflow soldering. It contains characterization of soldering processes. Includes variations of solder paste printing, principles of part placing and also reflow soldering process. The project appoints possibilities of testing solder joints strength, mainly focused on mechanical vibrations. It describes a design and preparation of solder joint strength test methods by mechanical vibrations. It compares influence of vibrations on part types and solder alloys.

This thesis deals with the design and implementation of a device for measuring pull strength by surface mounted devices (SMD). It analyzes the theory of pull strength testing of solder joints with emphasis on standard IEC 62137-1-3 and describes the selection of components utilized to create mechanical construction and electrical parts. These electronic parts made or innovated in this work were control system based on microcontroler Atmega164P, power circuit for stepper motor and communication of measure equipment TEST 321 with PC. The whole design is complemented by simulation of mechanical stress to the critical components using ANSYS. The conclusion summarizes the most important parameters of this equipment.