This study investigates sub 200nm half-pitch polymer structures by nanoimprint process. The trench structures were fabricated on quartz glass with various depths and widths by FIB. To investigate the best nanoimprint process on SU-8, we studied various parameters such as: imprinting temperature, imprinting pressure, and temperature for de-molding, etc. ¡@This study had successfully defined 50nm width with different depths on to SU-8 by imprint. ¡@Imprint temperature above Tg 30¢J with constant pressure on continuous impressing and de-mold in room temperature would result in better imprinting results. The filling rate of this nanoimprint technology was measured by atomic force microscopy. ¡@For structures above/near 100nm half-pitch, the filling rate is nearly 100%.

This thesis aimed to design and develop a novel micro-thermal electric generator (£g-TEG) with a transparent parallel-array bridge microstructure using the ANSYS finite element analysis software and Micro Electro Mechanical Systems (MEMS) technology. The presented £g-TEG can convert the temperature difference between the indoor and outdoor planes of building glass window into a useful electrical power. The thermoelectrically transferred output electrical power is suitable for recharging various mobile communication products. Conventional £g-TEG presented a high fabrication cost, low integration compatibility with IC processes and non-transparent characteristics. To improve these disadvantages, this research utilizes a batch production surface micromachining technology to implement the Poly-Si based parallel-array £g-TEG on a transparent quartz glass substrate and the main fabrication processes adopted in this research are including six thin-film deposition processes and five photolithography processes. The implemented Poly-Si based transparent £g-TEG has successfully demonstrates a maximum temperature difference of 1.38¢J between the hot plane (substrate) and cold plane (suspending microstructure), a maximum output voltage of 13.28 mV/cm2, a maximum output power of 110.22 nW/cm2 and a maximum light transmission of 40%.

Ultrasonic pulse method is a non-destructive method, which is used in the construction industry to evaluate individual parameters of building structures. The aim of the thesis was to create the prerequisites for determining the rate of ultrasonic pulse propagation on refractory silica fittings and quartz glass fittings. Selected factors influencing the speed of ultrasonic pulse propagation in the tested samples were studied, namely the influence of the sounding direction, the influence of the natural frequency of the probes and the influence of the acoustic coupling material on the ultrasonic pulse method.

Объектом исследования являются 3 образца нанокерамики на основе Al2O3, и 4 образца кварцевых стекол: КИ, КВ, КУ, КС-4В. Цель данной работы – исследование акустических свойств, обусловленных особенностями микро- (нано)структуры двух категорий материалов микро- и оптоэлектроники – нанокерамики на основе Al2O3 и оптических кварцевых стекол. В процессе работы были: исследованы акустические свойства материалов микро- (нанокерамика на основе Al2O3) и оптоэлектроники (кварцевые стекла), исследованы оптические параметры кварцевых стекол и установлена корреляция между акустическими и оптическими параметрами. В результате исследования был создан оригинальный измерительный стенд и разработана методика измерения значений скоростей поперечных ультразвуковых волн, определены упругие характеристики нанокерамики на основе Al2O3 и кварцевых стекол, а также оптические параметры стекол. В данной работе удалось установить корреляцию между акустическими и оптическими параметрами. Используя измерения скоростей ультразвука и оптического поглощения, были определены фундаментальные характеристики образцов. Это способствует пониманию структурно-чувствительных свойств, а значит, в дальнейшем и влиять на них, создавая материалы с нужными параметрами для лучшей работы приборов микро- и оптоэлектроники. / Objects of research are 3 samples of nanoceramiсs based on Al2O3 and 4 samples of quartz glasses: KI, KU, KV, KS-4V. The aim of this work is the study of the acoustic properties due to the peculiarities of micro- (nano)structures of the two categories of micro- and optoelectronics materials: nanoceramics based on Al2O3 and optical quartz glass. The acoustic properties of materials micro- (nanoceramics based on Al2O3) and optoelectronics (quartz glass) were studied, the optical parameters of quartz glass were investigated, and a correlation between acoustic and optical parameters was found. The original test stand and the method of measuring the transverse ultrasonic waves velocities were created, the elastic characteristics of nanoceramics based on Al2O3 and optical quartz glass and the optical parameters of glass were determine. In this paper we determined a correlation between acoustic and optical parameters. Using measurements of the velocity of ultrasound and optical absorption fundamental characteristics of the samples were determined. This contributes to an understanding of structure-sensitive properties that will help create materials with the necessary parameters for the best performance of micro- and optoelectronics.