Micromachining technologies enabled the use of miniaturized transducers in many high technology sensing systems. These transducers have many advantages like small-size, low-cost and high-reliability. One of the applications micro-machined transducers are used is inertial navigation systems, where the exact position of a moving frame is continuously monitored by tracking the linear and angular motions of the frame. Other than navigation applications, inertial sensors are used in health and military applications as well as consumer electronics. Today accelerometers capable of measuring accelerations from 0.5g-1g range up to several thousand g&rsquo / s are commercially available in the market which have been fabricated using micromachining technologies. The aim of this research is to develop such a state-of-the-art micro-machined accelerometer system, whose performance is expected to reach tactical-grade level. In order to achieve these performance values a MATLAB algorithm is developed to optimize the accelerometer performances in the desired levels. Expected performance parameters of the designed accelerometer structures are extracted from the simulations done by both Coventorware finite element modeling tool and MATLAB. Designed structures are then fabricated with silicon-on-glass, dissolved wafer and dissolved epitaxial wafer processes. These fabrication results are compared and it is observed that highest yield accelerometers are fabricated with the SOG process. But these accelerometers could not be able to satisfy tactical grade performance parameters. Best performances are obtained with DWP, but due to high internal stress, yield of the sensors were very low. DEWP increased the yield of this process from 2-3% to 45-50% but the expected operation range of the designs dropped to &plusmn / 12.5g range. Using the fabricated accelerometers in DEWP a three axial accelerometer package is prepared and tests results proved that this three axial accelerometer system was satisfying the tactical grade requirements. In addition to these a three axial monolithic accelerometer fabrication technique is proposed and sensors are designed which are suitable for this process. Best performances achieved with single axis accelerometers were 153&micro / g/&radic / Hz noise floor, 50&micro / g bias drift, 0.38% non-linearity and a maximum operation range of 33.5g which has the higher dynamic range among its counterparts in the literature. Performance results achieved with the three axes accelerometer were ~150&micro / g bias drift, &lt / 200&micro / g/&radic / Hz noise density, ~0.4% non-linearity with higher than &plusmn / 10g operation range.

MEMS accelerometers are quickly approaching navigation grade performance and navigation market for MEMS accelerometer systems are expected to grow in the recent years. Compared to conventional accelerometers, these micromachined sensors are smaller and more durable but are generally worse in terms of noise and dynamic range performance. Since MEMS accelerometers are already dominant in the tactical and consumer electronics market, as they are in all modern smart phones today, there is significant demand for MEMS accelerometers that can reach navigation grade performance without significantly altering the developed process technologies. This research aims to improve the performance of previously fabricated and well-known MEMS capacitive closed loop &Sigma / &Delta / accelerometer systems to navigation grade performance levels. This goal will be achieved by reducing accelerometer noise level through significant changes in the system architecture and implementation of a new electronic interface readout ASIC. A flexible fourth order &Sigma / &Delta / modulator was chosen as the implementation of the electro-mechanical closed loop system, and the burden of noise shaping in the modulator was shifted from the mechanical sensor to the programmable electronic readout. A novel operational transconductance amplifier (OTA) was also designed for circuit implementation of the electronic interface readout. Design and fabrication of the readout was done in a standard 0.35 &micro / m CMOS technology. With the newly designed and fabricated readout, single-axis accelerometers were implemented and tested for performance levels in 1g range. The implemented system achieves 5.95 &micro / g/sqrt Hz, 6.4 &micro / g bias drift, 131.7 dB dynamic range and up to 37.2 g full scale range with previously fabricated dissolved epitaxial wafer process (DEWP) accelerometers in METU MEMS facilities. Compared to a previous implementation with the same accelerometer element reporting 153 &micro / g/sqrtHz, 50 &micro / g bias drift, 106.8 dB dynamic range and 33.5 g full scale range / this research reports a 25 fold improvement in noise, 24 dB improvement in dynamic range and removal of the deadzone region.

This thesis presents the development of integrated readout electronics for diode type microbolometers and development of external camera electronics for microbolometers. The developed readout electronics are fabricated with its integrated 160x120 resolution FPA (Focal Plane Array) in the XFAB SOI-CMOS 1.0 &mu / m process. The pixels in the FPA have 70 &mu / m pixel pitch, and they are sensitive in the 8&ndash / 12 &mu / m band of the infrared spectrum. Each pixel has 4 serially connected diodes, and diode turn on voltage changes as the temperature of the suspended and thermally isolated pixel increases due to the absorbed infrared power. Suspension of the pixels is obtained with a post-CMOS MEMS etching process, but this process requires no critical litography and/or deposition steps. This dramatically reduces the detector process cost, which makes this microbolometer FPA suitable for ultra low-cost applications such as automobile, security, and commercial applications. The readout electronics of the FPA include digital blocks such as timing and programming blocks as well as analog blocks such as a differential trans-conductance amplifier, a switched capacitor integrator, a sampleand- hold, and current DACs. This new readout design has reduced number of pins to simplify the external electronics and allows wafer-level vacuum packaging compared to the 128x128 FPA developed in a previous study at METU with the same approach. Both of these features further decrease the cost. Two kinds of external camera electronics are developed for two SOI type microbolometers. The first one is for the 128x128 SOI microbolometer previously designed in METU. The developed external camera electronics have 1.5mVrms noise, which is much less than the microbolometer noise. The overall system has an average NETD of 465 mK and a peak NETD of 320mK. The second developed external camera electronics are for the 160x120 SOI microbolometers that developed in the scope of this thesis. The developed external camera electronics has 0.55mVrms noise which is much less than the bolometer noise which is 5mVrms. The overall system has an average NETD of 820 mK and a peak NETD of 350 mK. Each of these external camera electronics include a custom designed PCB, an FPGA board with appropiate configurion and a software working on a PC. The custom designed PCB holds the external components for the microbolometer, an FPGA takes and processes the bolometer data and it sends to a PC, and a PC processes these data and forms a streaming video. These two external camera electronics allow to obtain human images verifying that the developed microbolometers can be used for security and automotive applications.

Τα συστήματα μοριακής διαγνωστικής έχουν έρθει στο προσκήνιο τα τελευταία χρόνια δίνοντας τη δυνατότητα για αυτοματοποιημένες, αξιόπιστες, γρήγορες και χαμηλού κόστους βιολογικές αναλύσεις. Τέτοια συστήματα χαρακτηρίζονται από σύνθετη λειτουργικότητα, η οποία συνδυάζει πληθώρα ενεργοποιητών και αισθητήρων που συνεργάζονται για την εκτέλεση βιολογικών πρωτοκόλλων. Με βάση τα πρωτόκολλα αυτά και με τη χρήση μικροροϊκών συστημάτων, τα βιολογικά δείγματα και αντιδραστήρια υποβάλλονται σε διάφορα στάδια επεξεργασίας. Κατόπιν της επεξεργασίας τους, τα δείγματα υπό μελέτη καταλήγουν πάνω στην επιφάνεια αισθητήρων, οι οποίοι είναι ειδικά ευαισθητοποιημένοι ώστε να ανιχνεύουν συγκεκριμένες βιολογικές αλληλεπιδράσεις ενδιαφέροντος και να αποκρίνονται μεταβάλλοντας αναλόγως ένα φυσικό μέγεθος, μετρήσιμο από ηλεκτρονικά κυκλώματα. Τα ηλεκτρονικά κυκλώματα ανάγνωσης των αισθητήρων αποτελούν ένα από τα κυριότερα τμήματα ενός συστήματος μοριακής διαγνωστικής, καθώς βάσει της απόκρισης αυτών προκύπτουν τα διαγνωστικά αποτελέσματα. Κατά συνέπεια, αναγνωρίζεται ο σημαντικός ρόλος που κατέχουν στη συνολική αναλυτική διαδικασία. Είναι απαραίτητο οι μετρήσεις που εκτελούν να χαρακτηρίζονται από μεγάλη ακρίβεια με υψηλή διακριτική ικανότητα για κάθε αισθητήριο στοιχείο. Ταυτόχρονα όμως, πρέπει να εξασφαλίζεται και η αξιοπιστία της μέτρησης σε επίπεδο βιολογικής διεργασίας. Σε αυτό το στόχο συντελεί η χρήση συστοιχιών αισθητήρων, με τις οποίες η ίδια μέτρηση μπορεί να εκτελεστεί παράλληλα σε πολλά στοιχεία και συνοδεύεται από μετρήσεις θετικού και αρνητικού ελέγχου. Πάνω στη συστοιχία μπορούν να εκτελεστούν και συμπληρωματικές μετρήσεις περισσότερων δειγμάτων, ώστε τα αποτελέσματα που εξάγονται να δίνουν μια πιο ολοκληρωμένη αναλυτική εικόνα. Υπό αυτό το πρίσμα, οι μεγάλου μεγέθους συστοιχίες αισθητήρων μπορούν να προσφέρουν βέλτιστα αποτελέσματα. Η παρούσα διδακτορική διατριβή επικεντρώνεται στα κυκλώματα ανάγνωσης συστοιχιών χωρητικών και ηλεκτροχημικών αισθητήρων, δύο ευρέως χρησιμοποιούμενων τεχνολογιών αισθητήρων. Η αρχή λειτουργίας των χωρητικών αισθητήρων βασίζεται στο γεγονός ότι οι αλληλεπιδράσεις βιομορίων που μελετούνται ασκούν δυνάμεις και παραμορφώνουν την ευέλικτη μεμβράνη πυριτίου που αποτελεί τον έναν οπλισμό ενός μεταβλητού πυκνωτή. Συνέπεια αυτής της παραμόρφωσης είναι η ανάλογη μεταβολή της χωρητικότητας που παρουσιάζει η μεμβράνη με το υπόστρωμα πυριτίου, μεταβολή που μετράται από το κύκλωμα. Στην περίπτωση των ηλεκτροχημικών αισθητήρων, η αντίστοιχη αλληλεπίδραση βιομορίων, με τη βοήθεια βιομορίων σήμανσης, προκαλεί τη μεταβολή της αγωγιμότητας μεταξύ των ηλεκτροδίων τους. Υπό ελεγχόμενες συνθήκες πόλωσης τάσης, το αναπτυσσόμενο ρεύμα που μετράται αντιστοιχεί στην εξέλιξη του βιολογικού φαινομένου. Ιδιαίτερη έμφαση δίνεται στις δυνατότητες κλιμάκωσης της εκάστοτε αρχιτεκτονικής ώστε να είναι επεκτάσιμη στην ανάγνωση πολύ μεγάλων συστοιχιών αισθητήρων με βέλτιστο τρόπο, διατηρώντας μικρές διαστάσεις για τα κυκλώματα ανάγνωσης. Συγχρόνως, εξασφαλίζεται με διάφορες στρατηγικές η ορθή λήψη μετρήσεων από κάθε στοιχείο, χωρίς την επίδραση από τα υπόλοιπα μέλη της συστοιχίας. Για την ανάγνωση συστοιχιών χωρητικών αισθητήρων σχεδιάστηκε και υλοποιήθηκε ολοκληρωμένο κύκλωμα σε τεχνολογία 0.35 μm, που στον πυρήνα της μέτρησης διαθέτει έναν ταλαντωτή χαλάρωσης με βρόχο υστέρησης ρεύματος. Υποστηρίζεται από προγραμματιζόμενες πηγές ρεύματος διέγερσης ώστε να καλύπτεται ένα ευρύ φάσμα χωρητικοτήτων για τους αισθητήρες. Το σύστημα πολύπλεξης που αναπτύχθηκε για τη διασύνδεση κάθε μέλους από τις συστοιχίες αισθητήρων πάνω στον πυρήνα ανάγνωσης μπορεί να διαχειριστεί πεπλεγμένες συστοιχίες, όπου τα στοιχεία είναι οργανωμένα με κοινές γραμμές και στήλες ηλεκτρικών επαφών στους οπλισμούς τους. Με αυτόν τον τρόπο είναι δυνατή η δημιουργία μεγάλων συστοιχιών με μικρό πλήθος ακροδεκτών διασύνδεσης. Η πρόκληση της ανάγνωσης τέτοιου είδους συστοιχιών έγκειται στις αλληλεπιδράσεις μεταξύ των στοιχείων, λόγω ανεπιθύμητων μονοπατιών στο ρεύμα φόρτισης του ταλαντωτή. Μία πρώτη αντιμετώπιση αυτού του προβλήματος διαφωνίας γίνεται με τη χρήση διακοπτών δύο καταστάσεων στις μονάδες πολύπλεξης, ώστε να ελέγχεται ο τρόπος με τον οποίο διεγείρεται το μετρούμενο καθώς και τα υπόλοιπα στοιχεία κατά τη μέτρηση. Με διαδοχικές μετρήσεις υπό διαφορετικές συνδεσμολογίες στους πολυπλέκτες και με κατάλληλη μαθηματική επεξεργασία, μπορούν να εξαχθούν ακριβείς μετρήσεις για την κατάσταση κάθε αισθητήρα της συστοιχίας. Η στατικότητα του συστήματος κατά τη διάρκεια των διαδοχικών μετρήσεων που είναι προϋπόθεση για το σωστό υπολογισμό των αποτελεσμάτων, βασίζεται στην ιδιαίτερα αργή εξέλιξη των βιολογικών φαινομένων στην επιφάνεια των αισθητήρων. Στα πλαίσια της διατριβής έγινε και ένας επανασχεδιασμός του κυκλώματος ανάγνωσης συστοιχιών, σε επίπεδο σχηματικού και φυσικού σχεδιασμού, του οποίου η λειτουργία επιβεβαιώθηκε με post-layout εξομοιώσεις. Σε αυτή την ανάπτυξη έγινε προσθήκη επιπλέον υπομονάδων και η βελτίωση των υπαρχουσών. Από τα κύρια χαρακτηριστικά αυτού του σχεδιασμού είναι μια μονάδα απομονωτή, που προσφέρει έναν δεύτερο τρόπο αντιμετώπισης του προβλήματος διαφωνίας μεταξύ των στοιχείων, αποτρέποντας το ρεύμα φόρτισης του ταλαντωτή να οδηγηθεί προς μη επιθυμητά στοιχεία. Επιπλέον, οι μονάδες ταλάντωσης που χρησιμοποιεί το επανασχεδιασμένο κύκλωμα είναι δύο, για ταυτόχρονη ανάγνωση αισθητήρων και ταχύτερη σάρωση μεγάλων συστοιχιών, με το εύρος του προγραμματιζόμενου ρεύματος να είναι μεγαλύτερο, καλύπτοντας μεγαλύτερο φάσμα αισθητήρων. Τέλος, αυτή η έκδοση του κυκλώματος έχει πιο αυτόνομο χαρακτήρα, με την ενσωμάτωση ενός υποσυστήματος σειριακής επικοινωνίας και ελέγχου. Για τη δεύτερη τεχνολογία αισθητήρων που καλύπτει η παρούσα διατριβή, των ηλεκτροχημικών αισθητήρων, σχεδιάστηκαν και υλοποιήθηκαν κυκλώματα ανάγνωσης συστοιχιών με χρήση διακριτών στοιχείων, καθώς επίσης και κυκλώματα με το βασικό πυρήνα μέτρησης να υλοποιείται σε ολοκληρωμένη μορφή με τεχνολογία 90 nm. Για τους σχεδιασμούς αυτούς έχει αναπτυχθεί η τεχνική της υβριδικής πολύπλεξης, βάσει της οποίας τα μέλη της συστοιχίας ομαδοποιούνται καταλλήλως, ώστε να επιτευχθούν οι απαιτούμενες επιδόσεις σε ρυθμούς δειγματοληψίας από το κύκλωμα ανάγνωσης, ενώ παράλληλα το μέγεθος του κυκλώματος παραμένει μικρό. Η υβριδική πολύπλεξη συνδυάζει διαδοχική ανάγνωση με παράλληλη ανάγνωση στοιχείων, κάνοντας χρήση πολυπλεκτών και κατάλληλου αριθμού υποσυστημάτων μέτρησης που επαναχρησιμοποιούνται για πολλά αισθητήρια στοιχεία. Η ιδιαιτερότητα που έχουν αυτού του τύπου οι μετρήσεις έγκειται στην απαίτηση για διαρκή πόλωση όλων των στοιχείων χωρίς διακοπή της ροής του ρεύματος μέσω αυτών, που καλύπτεται μέσω ειδικά διαμορφωμένων πολυπλεκτών δύο καταστάσεων οι οποίοι εξασφαλίζουν τις σωστές συνθήκες λειτουργίας. Επιπρόσθετες βελτιώσεις που παρέχει η υλοποίηση του κυκλώματος ανάγνωσης σε μορφή ολοκληρωμένου είναι η δυνατότητα εναλλαγής μεταξύ δύο τύπων κυκλωμάτων μέτρησης, με χρήση ενισχυτή διαντίστασης και ολοκληρωτή. Οι δύο τρόποι μέτρησης χρησιμοποιούνται συμπληρωματικά, ώστε να καλυφθεί μεγάλη δυναμική περιοχή λειτουργίας και γρήγορη απόκριση, αλλά και υψηλή ανάλυση, ανάλογα με τις απαιτήσεις κατά τη διάρκεια της πειραματικής διαδικασίας. Για το χαρακτηρισμό των κυκλωμάτων ανάγνωσης που αναπτύχθηκαν και για τις δύο τεχνολογίες αισθητήρων, έγιναν μετρήσεις με πρότυπα φορτία, καθώς και με συστοιχίες, για να εξαχθούν συμπεράσματα για την απόκρισή τους. Κατόπιν των ελέγχων καλής λειτουργίας των κυκλωμάτων και των μεθόδων που ακολουθούνται, πραγματοποιήθηκαν και επιτυχείς μετρήσεις βιολογικής σημασίας, που επιβεβαιώθηκαν από συστήματα αναφοράς. / Molecular diagnostics systems have come to the forefront in recent years allowing for automated, reliable, rapid and inexpensive bioassays. Such systems are characterized by complex functionality, which combines variety of actuators and sensors that cooperate to perform biological protocols. Based on these protocols and using microfluidic systems, biological samples and reagents are subjected to various processing steps. Following this treatment, the samples under study are placed on the surface of sensors, which are functionalized to detect specific biological interactions of interest and respond accordingly by changing a physical quantity, measurable by electronic circuits. The sensor readout electronic circuits are one of the main parts of a molecular diagnostics system, as the diagnostic results are based on their response. Consequently, it is recognized that they hold an important role in the overall analytical process. It is necessary that the measurements they perform are highly accurate with high resolution for each sensor element. At the same time, the reliability of the measurement at a biological process level must be ensured. To this aim contributes the use of sensor arrays, with which the same measurement can be performed in parallel on many elements and accompanied by positive and negative control measurements. On the array, additional measurements of multiple samples can be performed, so that the output results give a more comprehensive analytical picture. In this light, large sensor arrays can provide optimal results. This thesis focuses on the readout circuitry for capacitive and electrochemical sensor arrays, two widely used sensor technologies. The operating principle of capacitive sensors is based on the fact that the interactions between the biomolecules under study exert forces and deform the flexible silicon film constituting an armature of a variable capacitor. The consequence of this deformation is a proportional change in capacitance between the film and the silicon substrate, a variation measured by the circuit. In the case of electrochemical sensors, the respective interaction of biomolecules, with the aid of labeling biomolecules, causes a change in conductivity between their electrodes. Under controlled bias voltage conditions, the resulting current that is measured corresponds to the progress of the biological phenomenon. Particular emphasis is given to the scalability potential of each architecture, so it can be optimally expanded for reading very large sensor arrays, maintaining small dimensions for the readout circuits. At the same time, through various strategies it is ensured that measurements of each element are properly acquired, without influence from other members in the array. To read out the capacitive sensor arrays an integrated circuit based on a 0.35 μm technology was designed and implemented, which at its measuring core uses a relaxation oscillator with a current hysteresis loop. It is complemented by programmable excitation current sources to cover a wide range of capacitances for the sensors. The multiplexing system that was developed to connect each member of the sensor arrays on the readout core can handle 'entangled' arrays, where the elements are arranged with common lines and columns of electrical contacts at their armatures. In this way it is possible to create large arrays with a small number of interface terminals. The challenge of reading such arrays lies in the interactions between the elements, because of side paths in the oscillator charging current. A first way to address this crosstalk problem is the use of two-state switches in the multiplexing units, in order to control the way in which the measured element is excited, as well as the other array elements, during measurement. Through successive measurements under different connection configurations on the multiplexers and appropriate mathematical processing, accurate measurements for the status of each sensor in the array can be obtained. The measured system can be considered static during successive measurements, which is a prerequisite for the correct calculation of results, due to the very slow progress of biological phenomena on the surface of the sensors. In the course of this thesis, a redesign of the array readout circuit was made, at a schematic and physical layout design level, the function of which was confirmed by post-layout simulations. In this development extra submodules were incorporated and existing ones were improved. One of the main features of this design is a buffer unit, which offers a second way of addressing the crosstalk problem between the elements, by preventing the oscillator charging current to excite undesirable elements. Furthermore, the redesigned circuit uses two oscillation units for simultaneous sensor readout and faster scanning of large arrays, with the range of their programmable current being greater, covering a larger spectrum of sensors. Finally, this version of the circuit has a more autonomous nature, by incorporating a serial communication and control subsystem. For the second sensor technology covered by this thesis, the electrochemical sensors, array readout circuits were designed and implemented using discrete components, as well as circuits with the basic measurement core being implemented in integrated form using a 90 nm technology. For these designs the technique of hybrid multiplexing was developed, whereby the members of the array are grouped appropriately to achieve the required performance in sampling rate from the readout circuit, while the size of the circuit remains small. Hybrid multiplexing combines sequential and parallel element reading, using multiplexers and the appropriate number of measurement subsystems that are reused for many sensing elements. The particularity of this type of measurements is the requirement for continuous biasing of all elements without interruptions in the current flow through them, which is addressed by specially configured two-state multiplexers that ensure the correct operating conditions. Additional enhancements offered by the implementation of the readout circuit in integrated form is the ability to switch between two types of measurement circuits, using a transimpedance amplifier and an integrator. The two modes of measurement are used in complement, to cover a wide operating dynamic range and fast response, and also high resolution, depending on the requirements during the experimental process. For the characterization of the readout circuits developed for both sensor technologies, measurements were made using standard loads, as well as arrays, to draw conclusions about their response. Following the validation of the proper operation of the circuits and methods used, successful measurements of biological significance were made, which were confirmed by reference systems.

This thesis reports the development of low-cost uncooled microbolometer focal plane arrays (FPAs) together with their integrated readout circuitry for infrared night vision applications. Infrared microbolometer detectors are based on suspended and thermally isolated p+-active/n-well diodes fabricated using a standard 0.35 &micro / m CMOS process followed by a simple post-CMOS bulk-micromachining process. The post-CMOS process does not require any critical lithography or complicated deposition steps / and therefore, the FPA cost is reduced considerably. The integrated readout circuitry is developed specially for the p+-active/n-well diode microbolometers that provides lower input referred noise voltage than the previously developed microbolometer readout circuits suitable for the diode type microbolometers. Two FPAs with 64 &times / 64 and 128 &times / 128 array formats have been implemented together with their low-noise integrated readout circuitry. These FPAs are first of their kinds where such large format uncooled infrared FPAs are designed and fabricated using a standard CMOS process. The fabricated detectors have a temperature coefficient of -2 mV/K, a thermal conductance value of 1.55 &times / 10-7 W/K, and a thermal time constant value of 36 ms, providing a measured DC responsivity (&amp / #8476 / ) of 4970 V/W under continuous bias. The measured detector noise is 0.69 &micro / V in 8 kHz bandwidth, resulting a measured detectivity (D*) of 9.7 &times / 108 cm&amp / #8730 / Hz/W. The 64 &times / 64 FPA chip has 4096 pixels scanned by an integrated 16-channel parallel readout circuit composed of low-noise differential transconductance amplifiers, switched capacitor integrators, and sample-and-hold circuits. It measures 4.1 mm &times / 5.4 mm, dissipates 25 mW power, and provides an estimated NETD value of 0.8 K at 30 frames/sec (fps) for an f/1 optics. The measured uncorrected voltage non-uniformity for the 64 &times / 64 array after the CMOS fabrication is 0.8 %, which is reduced further down to 0.2 % for the 128 &times / 128 array using an improved FPA structure that can compensate for the fixed pattern noise due to the FPA routing. The 128 &times / 128 FPA chip has 16384 microbolometer pixels scanned by a 32-channel parallel readout circuitry. The 128 &times / 128 FPA measures 6.6 mm &times / 7.9 mm, includes a PTAT temperature sensor and a vacuum sensor, dissipates 25 mW power, and provides an estimated NETD value of 1 K at 30 fps for an f/1 optics. These NETD values can be decreased below 350 mK with further optimization of the readout circuit and post-CMOS etching steps. Hence, the proposed method is very cost-effective to fabricate large format focal plane arrays for very low-cost infrared imaging applications.

Compton cameras localize γ-ray sources in 3D space by observing evidence of Compton scattering with detectors sensitive to ionizing radiation. This thesis proposes a software system for operating a novel Compton camera device comprised of Timepix3 detectors and Katherine readouts. To communicate with readouts using UDP-based protocol, a dedicated hardware library was developed. The presented software can successfully control the acquisition of multiple Timepix3 detectors and simultaneously process their measurements in a real-time setting. To recognize instances of Compton scattering among observed interactions, a chain of algorithms is applied with explicit consideration for a possibly high volume of measured information. Unlike alternate approaches, the presented work uses a recently published charge drift time model to improve its spatial resolution. In order to achieve localization of γ-ray sources, the software performs conical back projection into a discretized cuboid volume. Results of randomized evaluation with simulated data indicate that the presented implementation is correct and constitutes a viable method of γ-ray source localization in 3D space. Experimental verification with a prototype model is in progress.

abstract: High speed image sensors are used as a diagnostic tool to analyze high speed processes for industrial, automotive, defense and biomedical application. The high fame rate of these sensors, capture a series of images that enables the viewer to understand and analyze the high speed phenomena. However, the pixel readout circuits designed for these sensors with a high frame rate (100fps to 1 Mfps) have a very low fill factor which are less than 58%. For high speed operation, the exposure time is less and (or) the light intensity incident on the image sensor is less. This makes it difficult for the sensor to detect faint light signals and gives a lower limit on the signal levels being detected by the sensor. Moreover, the leakage paths in the pixel readout circuit also sets a limit on the signal level being detected. Therefore, the fill factor of the pixel should be maximized and the leakage currents in the readout circuits should be minimized. This thesis work presents the design of the pixel readout circuit suitable for high speed and low light imaging application. The circuit is an improvement to the 6T pixel readout architecture. The designed readout circuit minimizes the leakage currents in the circuit and detects light producing a signal level of 350µV at the cathode of the photodiode. A novel layout technique is used for the pixel, which improves the fill factor of the pixel to 64.625%. The read out circuit designed is an integral part of high speed image sensor, which is fabricated using a 0.18 µm CMOS technology with the die size of 3.1mm x 3.4 mm, the pixel size of 20µm x 20 µm, number of pixel of 96 x 96 and four 10-bit pipelined ADC’s. The image sensor achieves a high frame rate of 10508 fps and readout speed of 96 M pixels / sec. / Dissertation/Thesis / Masters Thesis Electrical Engineering 2016

Le traitement d’images classique est basé sur l’évaluation des données délivrées par un système à basede capteur de vision sous forme d’images. L’information lumineuse captée est extraiteséquentiellement de chaque élément photosensible (pixel) de la matrice avec un certain cadencementet à fréquence fixe. Ces données, une fois mémorisées, forment une matrice de données qui estréactualisée de manière exhaustive à l’arrivée de chaque nouvelle image. De fait, Pour des capteurs àforte résolution, le volume de données à gérer est extrêmement important. De plus, le système neprend pas en compte le fait que l’information stockée ai changé ou non par rapport à l’imageprécédente. Cette probabilité est, en effet, assez importante. Ceci nous mène donc, selon « l’activité »de la scène filmée à un haut niveau de redondances temporelles. De même, la méthode de lectureusuelle ne prend pas en compte le fait que le pixel en phase de lecture a la même valeur ou non que lepixel voisin lu juste avant. Cela rajoute aux redondances temporelles un taux de redondances spatialesplus ou moins élevé selon le spectre de fréquences spatiales de la scène filmée. Dans cette thèse, nousavons développé plusieurs solutions qui visent contrôler le flot de données en sortie de l’imageur enessayant de réduire les redondances spatiales et temporelles des pixels. Les contraintes de simplicité etd’« intelligence » des techniques de lecture développées font la différence entre ce que nousprésentons et ce qui a été publié dans la littérature. En effet, les travaux présentés dans l’état de l’artproposent des solutions à cette problématique, qui en général, exigent de gros sacrifices en terme desurface du pixel, vu qu’elles implémentent des fonctions électroniques complexes in situ.Les principes de fonctionnement, les émulations sous MATLAB, la conception et les simulationsélectriques ainsi que les résultats expérimentaux des techniques proposées sont présentés en détailsdans ce manuscrit. / The classical image processing is based on the evaluation of data delivered by a vision sensor systemas images. The captured light information is extracted sequentially from each photosensitive element(pixel) of the matrix with a fixed frequency called frame rate. These data, once stored, form a matrixof data that is entirely updated at the acquisition of each new image. Therefore, for high resolutionimagers, the data flow is huge. Moreover, the conventional systems do not take into account the factthat the stored data have changed or not compared to the previously acquired image. Indeed, there is ahigh probability that this information is not changed. Therefore, this leads, depending on the "activity"of the filmed scene, to a high level of temporal redundancies. Similarly, the usual scanning methodsdo not take into account that the read pixel has or not the same value of his neighbor pixel read oncebefore. This adds to the temporal redundancies, spatial redundancies rate that depends on the spatialfrequency spectrum of the scene. In this thesis, we have developed several solutions that aim to controlthe output data flow from the imager trying to reduce both spatial and temporal pixels redundancies. Aconstraint of simplicity and "Smartness" of the developed readout techniques makes the differencebetween what we present and what has been published in the literature. Indeed, the works presented inthe literature suggest several solutions to this problem, but in general, these solutions require largesacrifices in terms of pixel area, since they implement complex electronic functions in situ.The operating principles, the emulation in MATLAB, the electrical design and simulations and theexperimental results of the proposed techniques are explained in detail in this manuscript

Le travail présenté dans cette thèse a été effectué au sein de la collaboration internationale LHCb qui a conçue et qui exploite un détecteur pour la physique des particules auprès de l’accélérateur proton-proton, le LHC, au CERN à Genève. Ces travaux concerne l’opération de l’expérience dans son ensemble. Ils ont montré toutes leurs forces pendant la première année de prise de données qui a débutée fin 2009. Ils couvrent plusieurs systèmes qui sont très dépendant les uns des autres. Deux systèmes sont plus particulièrement étudiés. Le premier est en charge de la surveillance des faisceaux, du niveau des bruits de fond et de la luminosité. Le second permet la visualisation, l’analyse et l’optimisation des conditions expérimentales. Ces deux systèmes sont fortement interconnectés. En effet, l’amélioration de la qualité des faisceaux de la machine et la diminution du bruit de fond augmentent le nombre de collisions utiles pour la physique. En même temps, comprendre les paramètres clefs qui gouvernent l’opération de l’expérience permet de les optimiser et d’améliorer la qualité des données collectées. / There are two main central topics in the thesis: the LHCb beam, background and luminosity monitoring systems and the LHCb optimization systems of experimental conditions. These systems are heavily connected to each other, as improving the machine beam, background and luminosity conditions will automatically improve global operation by maximizing the ratio of luminosity recorded over signal background. At the same time, improving the operation of the experiment will help improve luminosity, by studying more accurately the beam and background conditions and therefore improving the LHC machine settings. In this thesis, the systems to accomplish the requirements of these two main topics are described in detail.

The specific recognition of the DNA is crucial for the correct functioning of the cell. Although its mechanisms are extensively studied, the actual process is not yet fully understood, partly due to the variance observed in readout mechanisms so far. In this work, a particular type of specific recognition is examined: the shape readout in the DNA minor groove. Based on a sta- tistical analysis of three-dimensional structures of protein-DNA complexes acquired from the Protein Data Bank, I propose a previously unrecorded readout mechanism of widened minor grooves by hydrophobic amino acids. In addition, the effect of DNA sequence on the topography of the contacted locus, the preferred secondary structures and the interaction between the protein and DNA are explored, as well as the relative information amount of examined features concerning the DNA deformation. 1