Philosophiae Doctor - PhD / In this work we primarily set out to investigate the technique of Aqueous Chemical Growth as a means of producing WO3 thin films that find applications in gas sensing and electrochromism. For the first time we demonstrated in this work, the heterogenous nucleation and growth of WO3 thin films on plain glass substrates and F-doped SnO2-glass substrates. This was achieved without the use of surfactants and template directing methods, using as a precursor solution Peroxotungstic Acid generated from the action of 30% H2O2 on pure W powder. The substrates used needed no surface-modification. On the plain glass substrates (soda lime silicates) a variety of micronanostructures could be observed prime of which were nanoplatelets that acted as a basic building block for the self-assembly of more hierarchical 3-d microspheres and thin films. On FTO a wide variety of micro-/nanostructures were observed dominant amongst which were urchin-like microspheres. The dominant crystallographic structure observed (through X-ray diffraction analysis, SAED, HRTEM) for the WO3 thin films on both substrate types post-annealing at 500 ˚C for a period of 1 - 2 h, was hexagonal-WO3. Next was monoclinic WO3. On rarer occasions the formation of triclinic and cubic WO3 was observed. The thin films produced showed a fairly high degree of porosity and had thicknesses in the range of 900 nm - 3.5 μm. I-V characterisation measurements using a 4-point collinear probe Keithley source alongside photoluminescence was used to establish the insulating nature of some of the films as well as their sub-stoichiometric nature. X-ray Photoelectron Spectroscopy was used to confirm the substoichiometric nature of some of the films.

This dissertation concerns the development, fabrication and integration in a gas sensing microdevice of a novel 3-dimensional (3D) nanostructured metal-oxide semiconducting film that effectively merges the benefits of inorganic nanomaterials with the simplicity offered by non-lithographic electrochemistry-based preparation techniques. The film is synthesized via the porous-anodic-alumina-assisted anodizing of an Al/Nb metal bilayer sputter-deposited on a SiO2/Si substrate and is basically composed of a 200 nm thick NbO2 layer holding an array of upright-standing spatially separated Nb2O5 nanocolumns, being 50 nm wide, up to 900 nm long and of 8109 cm2 population density. The nanocolumns work as semiconducting nano-channels, whose resistivity is greatly impacted by the surface and interface reactions. Either Pt or Au patterned electrodes are prepared on the top of the nanocolumn array using an innovative sensor design realized by means of microfabrication technology or via a direct original point electrodeposition technique, followed by selective dissolution of the alumina overlayer. For gas-sensing tests the film is mounted on a standard TO-8 package using the wire-bonding technique. Electrical characterization of the 3D niobium-oxide nanofilm reveals asymmetric electron transport properties due to a Schottky barrier that forms at the Au/Nb2O5 or Pt/Nb2O5 interface. Effects of the active film morphology, structure and composition on the electrical and gas-sensing performance focusing on sensitivity, selectivity, detection limits and response/recovery rates are explored in experimental detection of hydrogen gas and ammonia. The fast and intensive response to H2 confirms the potential of the 3D niobium-oxide nanofilm as highly appropriate active layer for sensing application. A computer-aided microfluidics simulation of gas diffusion in the 3D nanofilm predicts a possibility to substantially improve the gas-sensing performance through the formation of a perforated top electrode, optimizing the film morphology, altering the crystal structure and by introducing certain innovations in the electrode design. Preliminary experiments show that a 3D nanofilm synthesized from an alternative Al/W metal bilayer is another promising candidate for advanced sensor applications. The techniques and materials employed in this work are advantageous for developing technically simple, cost-effective and environmentally friendly solutions for practical micro- and nanodevices, where the well-defined nano-channels for charge carriers and surface reactions may bring unprecedented benefits.