Along with knowledge of the interactions unique to microscale devices, designers of microelectromechanical systems (MEMS) require information about complex fabrication and packaging techniques in order to fully complete a successful design. To that end, the successful design of MEMS requires the collaboration of experts and designers in a variety of engineering fields. From the decision-based design perspective, MEMS designers require a means to sort the input and information generated in a collaborative design process. While the potential for the use of languages and part libraries have been addressed in the literature as a means to solve this problem, a means to embody these principles has not been addressed. The use of modular, executable, decision-centric templates to rapidly compose, solve, archive, and reuse compromise Decision Support Problems (cDSP) for specific design problems has been proposed in the literature. The result of this work is a means of separating procedural design knowledge from declarative knowledge and parsing the cDSP into a set of computer-interpretable templates. A stated need in this work is the extension of the templates to accommodate the coupled solution of two cDSPs utilizing game theoretic principles. In this thesis, the theoretical structures of decision-centric templates are applied to the needs of MEMS designers. Computer interpretable, decision-centric templates, used to save, reuse, and aid in design decisions, are extended to permit MEMS designers and fabricators to collaborate via coupled cDSPs, using game theoretic principles of cooperative, noncooperative, and leader-follower games. This approach is illustrated through its application to the design and prototype fabrication of microscale gas chromatography separation channels. The outcome of this work is twofold: first, MEMS designers and fabricators will have a means to compose, collaboratively solve, archive, and reuse compromise Decision Support Problems in a computer interpretable manner, and second, decision templates will be extended through the use of game theoretic principles.