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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"Si【c_4】"" "subject:"Si【f_4】""

1

プラズマプロセシング用SiH4のラジカル非発光種に関する研究

後藤, 俊夫, 稲葉, 成基, 羽根, 一博, 河野, 明広 03 1900 (has links)
科学研究費補助金 研究種目:一般研究(B) 課題番号:17520427 研究代表者:後藤 俊夫 研究期間:1985-1986年度
LIF法
電子衝突
ラジカル非発光種
Lifetime
Electron Collision
Non-Emissive Radical
Plasma Processing
生成断面積
寿命
Emission Cross Section
Si【H_4】
プラズマプロセシング
発光断面積
<SiH_4>
Level Excitation Cross Section

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