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1	A process recipe for bonding a silicone membrane to a plastic substrate Schönström, Linus, Nordh, Anna, Strignert, Anton, Lemel, Frida, Ekengard, Jakob, Wallin, Sofie, Jabri, Zargham January 2013 (has links) A spin-cast silicone membrane has been successfully bonded between two injection-molded microstructured plastic discs. This sandwich structure creates a useful platform for mass production of microfluidic systems, provided that the bonds are leakproof. The bonds were achieved by a silicon dioxide coating deposited on the plastic discs by evaporation. This investigation is concerned with the process and the result only, no theory is discussed. bonding silicone corona surface treater SiO2 coating thermoplastic substrate PVD temperature PDMS membrane spin-coating thickness measurements microfluidic systems bonding PDMS silicon dioxide coating spin-cast silicone membrane PDMS polydimethylsiloxane poly(dimethylsiloxane) silicon dioxide PVD SiO2 PVD silicon dioxide evaporation SiO2 evaporation thickness of a thin film silicon dioxide deposition SiO2 deposition adhesion testing cycloolefincopolymer cycloolefinpolymer cyclic olefin copolymer cyclic olefin polymer COC COP plasma surface treater surface activator surface oxidizer